Abstract

A new tool for hydrodynamic radial polishing, HyDra, allows for the local polishing of optical surfaces with a controllable wear rate. The results of the removal rate for different polisher types and sizes, applied air pressures for slurry expulsion, and tool height with respect to the working surface, are reported. We present a numerical analysis of the volumetric removal rate for the dynamic experiments as well as a comparison with a similar technique.

© 2004 Optical Society of America

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References

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  1. E. Ruiz, E. Sohn, E. Luna, L. Salas, “Hydrodynamic radial flux polishing and grinding tool for optical and semiconductor surfaces,” patent pending.
  2. E. Luna, A. Cordero-Dávila, E. Ruiz, M. Núñez, J. González-García, V. H. Cabrera-Pelaez, J. Valdez, B. García, V. García, L. Salas, I. Cruz-González, E. Sohn, A. Córdova, “Herramienta hidrodinámica de pulido (HyDra) para los espejos del TIM. Parte I. Experimentos estáticos y simulaciones numéricas,” Technical Report CI-2002-01, Instituto de Astronomía, Universidad Nacional Autonoma de México, Apartado Postal 70-264, C.P. 45020, México City, México (2002).
  3. A. Cordero-Dávila, E. Luna, E. Ruiz, M. Núñez, J. González, V. Cabrera, J. Valdez, L. Salas, I. Cruz-González, E. Sohn, “Herramienta Hidrodinámica de pulido (HyDra) para los espejos del TIM. Parte II. Experimentos dinámicos,” Technical Report CI-2002-03, Instituto de Astronomía, Universidad Nacional Autonoma de México, Apartado Postal 70-264, C.P. 45020, México City, México (2002).
  4. A. Cordero-Dávila, E. Luna, M. Núñez, J. González-García, V. H. Cabrera-Pelaez, J. Valdez, B. Martínez, B. García, V. García-Ramírez, L. Salas, I. Cruz-González, E. Ruiz, E. Sohn, M. A. Rodríguez-Pineda, “Polishing TIM mirror segments with HyDra,” in Future Giant Telescopes, J. Roger, P. Angel, R. Gilmozzi, eds., Proc. SPIE4840, 604–611 (2003).
    [CrossRef]
  5. R. E. Wagner, R. R. Shannon, “Fabrication of aspherics using a mathematical model for material removal,” Appl. Opt. 13, 1683–1689 (1974).
    [CrossRef] [PubMed]
  6. O. Fähnle, H. van Brug, H. Frankena, “Fluid jet polishing optical surfaces,” Appl. Opt. 38, 6771–6773 (1998).
    [CrossRef]
  7. S. M. Booij, H. van Brug, J. M. Braat, O. W. Fähnle, “Nanometer deep shaping with fluid jet polishing,” Opt. Eng. 41, 1926–1931 (2002).
    [CrossRef]
  8. S. M. Booij, H. van Brug, O. W. Fähnle, “A mathematical model for machining spot in fluid jet polishing,” in Optical Fabrication and Testing, Vol. 42 of OSA Trends in Optics and Photonics Series (Optical Society of America, Washington, D.C., 2000), pp. 70–72.
  9. S. M. Booij, H. van Brug, M. Singh, J. J. M. Braat, “Nanometer accurate shaping with fluid jet polishing,” in Optical Manufacturing and Testing IV, H. P. Stahl, ed., Proc. SPIE4451, 222–232 (2001).
    [CrossRef]
  10. S. M. Booij, “Fluid jet polishing: possibilities and limitations of a new fabrication technique,” Ph.D. thesis (Technishe Universiteit Delft, Delft, The Netherlands, 2003).

2002 (1)

S. M. Booij, H. van Brug, J. M. Braat, O. W. Fähnle, “Nanometer deep shaping with fluid jet polishing,” Opt. Eng. 41, 1926–1931 (2002).
[CrossRef]

1998 (1)

O. Fähnle, H. van Brug, H. Frankena, “Fluid jet polishing optical surfaces,” Appl. Opt. 38, 6771–6773 (1998).
[CrossRef]

1974 (1)

Booij, S. M.

S. M. Booij, H. van Brug, J. M. Braat, O. W. Fähnle, “Nanometer deep shaping with fluid jet polishing,” Opt. Eng. 41, 1926–1931 (2002).
[CrossRef]

S. M. Booij, “Fluid jet polishing: possibilities and limitations of a new fabrication technique,” Ph.D. thesis (Technishe Universiteit Delft, Delft, The Netherlands, 2003).

S. M. Booij, H. van Brug, M. Singh, J. J. M. Braat, “Nanometer accurate shaping with fluid jet polishing,” in Optical Manufacturing and Testing IV, H. P. Stahl, ed., Proc. SPIE4451, 222–232 (2001).
[CrossRef]

S. M. Booij, H. van Brug, O. W. Fähnle, “A mathematical model for machining spot in fluid jet polishing,” in Optical Fabrication and Testing, Vol. 42 of OSA Trends in Optics and Photonics Series (Optical Society of America, Washington, D.C., 2000), pp. 70–72.

Braat, J. J. M.

S. M. Booij, H. van Brug, M. Singh, J. J. M. Braat, “Nanometer accurate shaping with fluid jet polishing,” in Optical Manufacturing and Testing IV, H. P. Stahl, ed., Proc. SPIE4451, 222–232 (2001).
[CrossRef]

Braat, J. M.

S. M. Booij, H. van Brug, J. M. Braat, O. W. Fähnle, “Nanometer deep shaping with fluid jet polishing,” Opt. Eng. 41, 1926–1931 (2002).
[CrossRef]

Cabrera, V.

A. Cordero-Dávila, E. Luna, E. Ruiz, M. Núñez, J. González, V. Cabrera, J. Valdez, L. Salas, I. Cruz-González, E. Sohn, “Herramienta Hidrodinámica de pulido (HyDra) para los espejos del TIM. Parte II. Experimentos dinámicos,” Technical Report CI-2002-03, Instituto de Astronomía, Universidad Nacional Autonoma de México, Apartado Postal 70-264, C.P. 45020, México City, México (2002).

Cabrera-Pelaez, V. H.

E. Luna, A. Cordero-Dávila, E. Ruiz, M. Núñez, J. González-García, V. H. Cabrera-Pelaez, J. Valdez, B. García, V. García, L. Salas, I. Cruz-González, E. Sohn, A. Córdova, “Herramienta hidrodinámica de pulido (HyDra) para los espejos del TIM. Parte I. Experimentos estáticos y simulaciones numéricas,” Technical Report CI-2002-01, Instituto de Astronomía, Universidad Nacional Autonoma de México, Apartado Postal 70-264, C.P. 45020, México City, México (2002).

A. Cordero-Dávila, E. Luna, M. Núñez, J. González-García, V. H. Cabrera-Pelaez, J. Valdez, B. Martínez, B. García, V. García-Ramírez, L. Salas, I. Cruz-González, E. Ruiz, E. Sohn, M. A. Rodríguez-Pineda, “Polishing TIM mirror segments with HyDra,” in Future Giant Telescopes, J. Roger, P. Angel, R. Gilmozzi, eds., Proc. SPIE4840, 604–611 (2003).
[CrossRef]

Cordero-Dávila, A.

A. Cordero-Dávila, E. Luna, M. Núñez, J. González-García, V. H. Cabrera-Pelaez, J. Valdez, B. Martínez, B. García, V. García-Ramírez, L. Salas, I. Cruz-González, E. Ruiz, E. Sohn, M. A. Rodríguez-Pineda, “Polishing TIM mirror segments with HyDra,” in Future Giant Telescopes, J. Roger, P. Angel, R. Gilmozzi, eds., Proc. SPIE4840, 604–611 (2003).
[CrossRef]

E. Luna, A. Cordero-Dávila, E. Ruiz, M. Núñez, J. González-García, V. H. Cabrera-Pelaez, J. Valdez, B. García, V. García, L. Salas, I. Cruz-González, E. Sohn, A. Córdova, “Herramienta hidrodinámica de pulido (HyDra) para los espejos del TIM. Parte I. Experimentos estáticos y simulaciones numéricas,” Technical Report CI-2002-01, Instituto de Astronomía, Universidad Nacional Autonoma de México, Apartado Postal 70-264, C.P. 45020, México City, México (2002).

A. Cordero-Dávila, E. Luna, E. Ruiz, M. Núñez, J. González, V. Cabrera, J. Valdez, L. Salas, I. Cruz-González, E. Sohn, “Herramienta Hidrodinámica de pulido (HyDra) para los espejos del TIM. Parte II. Experimentos dinámicos,” Technical Report CI-2002-03, Instituto de Astronomía, Universidad Nacional Autonoma de México, Apartado Postal 70-264, C.P. 45020, México City, México (2002).

Córdova, A.

E. Luna, A. Cordero-Dávila, E. Ruiz, M. Núñez, J. González-García, V. H. Cabrera-Pelaez, J. Valdez, B. García, V. García, L. Salas, I. Cruz-González, E. Sohn, A. Córdova, “Herramienta hidrodinámica de pulido (HyDra) para los espejos del TIM. Parte I. Experimentos estáticos y simulaciones numéricas,” Technical Report CI-2002-01, Instituto de Astronomía, Universidad Nacional Autonoma de México, Apartado Postal 70-264, C.P. 45020, México City, México (2002).

Cruz-González, I.

E. Luna, A. Cordero-Dávila, E. Ruiz, M. Núñez, J. González-García, V. H. Cabrera-Pelaez, J. Valdez, B. García, V. García, L. Salas, I. Cruz-González, E. Sohn, A. Córdova, “Herramienta hidrodinámica de pulido (HyDra) para los espejos del TIM. Parte I. Experimentos estáticos y simulaciones numéricas,” Technical Report CI-2002-01, Instituto de Astronomía, Universidad Nacional Autonoma de México, Apartado Postal 70-264, C.P. 45020, México City, México (2002).

A. Cordero-Dávila, E. Luna, M. Núñez, J. González-García, V. H. Cabrera-Pelaez, J. Valdez, B. Martínez, B. García, V. García-Ramírez, L. Salas, I. Cruz-González, E. Ruiz, E. Sohn, M. A. Rodríguez-Pineda, “Polishing TIM mirror segments with HyDra,” in Future Giant Telescopes, J. Roger, P. Angel, R. Gilmozzi, eds., Proc. SPIE4840, 604–611 (2003).
[CrossRef]

A. Cordero-Dávila, E. Luna, E. Ruiz, M. Núñez, J. González, V. Cabrera, J. Valdez, L. Salas, I. Cruz-González, E. Sohn, “Herramienta Hidrodinámica de pulido (HyDra) para los espejos del TIM. Parte II. Experimentos dinámicos,” Technical Report CI-2002-03, Instituto de Astronomía, Universidad Nacional Autonoma de México, Apartado Postal 70-264, C.P. 45020, México City, México (2002).

Fähnle, O.

O. Fähnle, H. van Brug, H. Frankena, “Fluid jet polishing optical surfaces,” Appl. Opt. 38, 6771–6773 (1998).
[CrossRef]

Fähnle, O. W.

S. M. Booij, H. van Brug, J. M. Braat, O. W. Fähnle, “Nanometer deep shaping with fluid jet polishing,” Opt. Eng. 41, 1926–1931 (2002).
[CrossRef]

S. M. Booij, H. van Brug, O. W. Fähnle, “A mathematical model for machining spot in fluid jet polishing,” in Optical Fabrication and Testing, Vol. 42 of OSA Trends in Optics and Photonics Series (Optical Society of America, Washington, D.C., 2000), pp. 70–72.

Frankena, H.

O. Fähnle, H. van Brug, H. Frankena, “Fluid jet polishing optical surfaces,” Appl. Opt. 38, 6771–6773 (1998).
[CrossRef]

García, B.

A. Cordero-Dávila, E. Luna, M. Núñez, J. González-García, V. H. Cabrera-Pelaez, J. Valdez, B. Martínez, B. García, V. García-Ramírez, L. Salas, I. Cruz-González, E. Ruiz, E. Sohn, M. A. Rodríguez-Pineda, “Polishing TIM mirror segments with HyDra,” in Future Giant Telescopes, J. Roger, P. Angel, R. Gilmozzi, eds., Proc. SPIE4840, 604–611 (2003).
[CrossRef]

E. Luna, A. Cordero-Dávila, E. Ruiz, M. Núñez, J. González-García, V. H. Cabrera-Pelaez, J. Valdez, B. García, V. García, L. Salas, I. Cruz-González, E. Sohn, A. Córdova, “Herramienta hidrodinámica de pulido (HyDra) para los espejos del TIM. Parte I. Experimentos estáticos y simulaciones numéricas,” Technical Report CI-2002-01, Instituto de Astronomía, Universidad Nacional Autonoma de México, Apartado Postal 70-264, C.P. 45020, México City, México (2002).

García, V.

E. Luna, A. Cordero-Dávila, E. Ruiz, M. Núñez, J. González-García, V. H. Cabrera-Pelaez, J. Valdez, B. García, V. García, L. Salas, I. Cruz-González, E. Sohn, A. Córdova, “Herramienta hidrodinámica de pulido (HyDra) para los espejos del TIM. Parte I. Experimentos estáticos y simulaciones numéricas,” Technical Report CI-2002-01, Instituto de Astronomía, Universidad Nacional Autonoma de México, Apartado Postal 70-264, C.P. 45020, México City, México (2002).

García-Ramírez, V.

A. Cordero-Dávila, E. Luna, M. Núñez, J. González-García, V. H. Cabrera-Pelaez, J. Valdez, B. Martínez, B. García, V. García-Ramírez, L. Salas, I. Cruz-González, E. Ruiz, E. Sohn, M. A. Rodríguez-Pineda, “Polishing TIM mirror segments with HyDra,” in Future Giant Telescopes, J. Roger, P. Angel, R. Gilmozzi, eds., Proc. SPIE4840, 604–611 (2003).
[CrossRef]

González, J.

A. Cordero-Dávila, E. Luna, E. Ruiz, M. Núñez, J. González, V. Cabrera, J. Valdez, L. Salas, I. Cruz-González, E. Sohn, “Herramienta Hidrodinámica de pulido (HyDra) para los espejos del TIM. Parte II. Experimentos dinámicos,” Technical Report CI-2002-03, Instituto de Astronomía, Universidad Nacional Autonoma de México, Apartado Postal 70-264, C.P. 45020, México City, México (2002).

González-García, J.

E. Luna, A. Cordero-Dávila, E. Ruiz, M. Núñez, J. González-García, V. H. Cabrera-Pelaez, J. Valdez, B. García, V. García, L. Salas, I. Cruz-González, E. Sohn, A. Córdova, “Herramienta hidrodinámica de pulido (HyDra) para los espejos del TIM. Parte I. Experimentos estáticos y simulaciones numéricas,” Technical Report CI-2002-01, Instituto de Astronomía, Universidad Nacional Autonoma de México, Apartado Postal 70-264, C.P. 45020, México City, México (2002).

A. Cordero-Dávila, E. Luna, M. Núñez, J. González-García, V. H. Cabrera-Pelaez, J. Valdez, B. Martínez, B. García, V. García-Ramírez, L. Salas, I. Cruz-González, E. Ruiz, E. Sohn, M. A. Rodríguez-Pineda, “Polishing TIM mirror segments with HyDra,” in Future Giant Telescopes, J. Roger, P. Angel, R. Gilmozzi, eds., Proc. SPIE4840, 604–611 (2003).
[CrossRef]

Luna, E.

A. Cordero-Dávila, E. Luna, M. Núñez, J. González-García, V. H. Cabrera-Pelaez, J. Valdez, B. Martínez, B. García, V. García-Ramírez, L. Salas, I. Cruz-González, E. Ruiz, E. Sohn, M. A. Rodríguez-Pineda, “Polishing TIM mirror segments with HyDra,” in Future Giant Telescopes, J. Roger, P. Angel, R. Gilmozzi, eds., Proc. SPIE4840, 604–611 (2003).
[CrossRef]

E. Luna, A. Cordero-Dávila, E. Ruiz, M. Núñez, J. González-García, V. H. Cabrera-Pelaez, J. Valdez, B. García, V. García, L. Salas, I. Cruz-González, E. Sohn, A. Córdova, “Herramienta hidrodinámica de pulido (HyDra) para los espejos del TIM. Parte I. Experimentos estáticos y simulaciones numéricas,” Technical Report CI-2002-01, Instituto de Astronomía, Universidad Nacional Autonoma de México, Apartado Postal 70-264, C.P. 45020, México City, México (2002).

A. Cordero-Dávila, E. Luna, E. Ruiz, M. Núñez, J. González, V. Cabrera, J. Valdez, L. Salas, I. Cruz-González, E. Sohn, “Herramienta Hidrodinámica de pulido (HyDra) para los espejos del TIM. Parte II. Experimentos dinámicos,” Technical Report CI-2002-03, Instituto de Astronomía, Universidad Nacional Autonoma de México, Apartado Postal 70-264, C.P. 45020, México City, México (2002).

E. Ruiz, E. Sohn, E. Luna, L. Salas, “Hydrodynamic radial flux polishing and grinding tool for optical and semiconductor surfaces,” patent pending.

Martínez, B.

A. Cordero-Dávila, E. Luna, M. Núñez, J. González-García, V. H. Cabrera-Pelaez, J. Valdez, B. Martínez, B. García, V. García-Ramírez, L. Salas, I. Cruz-González, E. Ruiz, E. Sohn, M. A. Rodríguez-Pineda, “Polishing TIM mirror segments with HyDra,” in Future Giant Telescopes, J. Roger, P. Angel, R. Gilmozzi, eds., Proc. SPIE4840, 604–611 (2003).
[CrossRef]

Núñez, M.

E. Luna, A. Cordero-Dávila, E. Ruiz, M. Núñez, J. González-García, V. H. Cabrera-Pelaez, J. Valdez, B. García, V. García, L. Salas, I. Cruz-González, E. Sohn, A. Córdova, “Herramienta hidrodinámica de pulido (HyDra) para los espejos del TIM. Parte I. Experimentos estáticos y simulaciones numéricas,” Technical Report CI-2002-01, Instituto de Astronomía, Universidad Nacional Autonoma de México, Apartado Postal 70-264, C.P. 45020, México City, México (2002).

A. Cordero-Dávila, E. Luna, M. Núñez, J. González-García, V. H. Cabrera-Pelaez, J. Valdez, B. Martínez, B. García, V. García-Ramírez, L. Salas, I. Cruz-González, E. Ruiz, E. Sohn, M. A. Rodríguez-Pineda, “Polishing TIM mirror segments with HyDra,” in Future Giant Telescopes, J. Roger, P. Angel, R. Gilmozzi, eds., Proc. SPIE4840, 604–611 (2003).
[CrossRef]

A. Cordero-Dávila, E. Luna, E. Ruiz, M. Núñez, J. González, V. Cabrera, J. Valdez, L. Salas, I. Cruz-González, E. Sohn, “Herramienta Hidrodinámica de pulido (HyDra) para los espejos del TIM. Parte II. Experimentos dinámicos,” Technical Report CI-2002-03, Instituto de Astronomía, Universidad Nacional Autonoma de México, Apartado Postal 70-264, C.P. 45020, México City, México (2002).

Rodríguez-Pineda, M. A.

A. Cordero-Dávila, E. Luna, M. Núñez, J. González-García, V. H. Cabrera-Pelaez, J. Valdez, B. Martínez, B. García, V. García-Ramírez, L. Salas, I. Cruz-González, E. Ruiz, E. Sohn, M. A. Rodríguez-Pineda, “Polishing TIM mirror segments with HyDra,” in Future Giant Telescopes, J. Roger, P. Angel, R. Gilmozzi, eds., Proc. SPIE4840, 604–611 (2003).
[CrossRef]

Ruiz, E.

A. Cordero-Dávila, E. Luna, M. Núñez, J. González-García, V. H. Cabrera-Pelaez, J. Valdez, B. Martínez, B. García, V. García-Ramírez, L. Salas, I. Cruz-González, E. Ruiz, E. Sohn, M. A. Rodríguez-Pineda, “Polishing TIM mirror segments with HyDra,” in Future Giant Telescopes, J. Roger, P. Angel, R. Gilmozzi, eds., Proc. SPIE4840, 604–611 (2003).
[CrossRef]

E. Luna, A. Cordero-Dávila, E. Ruiz, M. Núñez, J. González-García, V. H. Cabrera-Pelaez, J. Valdez, B. García, V. García, L. Salas, I. Cruz-González, E. Sohn, A. Córdova, “Herramienta hidrodinámica de pulido (HyDra) para los espejos del TIM. Parte I. Experimentos estáticos y simulaciones numéricas,” Technical Report CI-2002-01, Instituto de Astronomía, Universidad Nacional Autonoma de México, Apartado Postal 70-264, C.P. 45020, México City, México (2002).

A. Cordero-Dávila, E. Luna, E. Ruiz, M. Núñez, J. González, V. Cabrera, J. Valdez, L. Salas, I. Cruz-González, E. Sohn, “Herramienta Hidrodinámica de pulido (HyDra) para los espejos del TIM. Parte II. Experimentos dinámicos,” Technical Report CI-2002-03, Instituto de Astronomía, Universidad Nacional Autonoma de México, Apartado Postal 70-264, C.P. 45020, México City, México (2002).

E. Ruiz, E. Sohn, E. Luna, L. Salas, “Hydrodynamic radial flux polishing and grinding tool for optical and semiconductor surfaces,” patent pending.

Salas, L.

E. Ruiz, E. Sohn, E. Luna, L. Salas, “Hydrodynamic radial flux polishing and grinding tool for optical and semiconductor surfaces,” patent pending.

A. Cordero-Dávila, E. Luna, E. Ruiz, M. Núñez, J. González, V. Cabrera, J. Valdez, L. Salas, I. Cruz-González, E. Sohn, “Herramienta Hidrodinámica de pulido (HyDra) para los espejos del TIM. Parte II. Experimentos dinámicos,” Technical Report CI-2002-03, Instituto de Astronomía, Universidad Nacional Autonoma de México, Apartado Postal 70-264, C.P. 45020, México City, México (2002).

E. Luna, A. Cordero-Dávila, E. Ruiz, M. Núñez, J. González-García, V. H. Cabrera-Pelaez, J. Valdez, B. García, V. García, L. Salas, I. Cruz-González, E. Sohn, A. Córdova, “Herramienta hidrodinámica de pulido (HyDra) para los espejos del TIM. Parte I. Experimentos estáticos y simulaciones numéricas,” Technical Report CI-2002-01, Instituto de Astronomía, Universidad Nacional Autonoma de México, Apartado Postal 70-264, C.P. 45020, México City, México (2002).

A. Cordero-Dávila, E. Luna, M. Núñez, J. González-García, V. H. Cabrera-Pelaez, J. Valdez, B. Martínez, B. García, V. García-Ramírez, L. Salas, I. Cruz-González, E. Ruiz, E. Sohn, M. A. Rodríguez-Pineda, “Polishing TIM mirror segments with HyDra,” in Future Giant Telescopes, J. Roger, P. Angel, R. Gilmozzi, eds., Proc. SPIE4840, 604–611 (2003).
[CrossRef]

Shannon, R. R.

Singh, M.

S. M. Booij, H. van Brug, M. Singh, J. J. M. Braat, “Nanometer accurate shaping with fluid jet polishing,” in Optical Manufacturing and Testing IV, H. P. Stahl, ed., Proc. SPIE4451, 222–232 (2001).
[CrossRef]

Sohn, E.

E. Ruiz, E. Sohn, E. Luna, L. Salas, “Hydrodynamic radial flux polishing and grinding tool for optical and semiconductor surfaces,” patent pending.

A. Cordero-Dávila, E. Luna, E. Ruiz, M. Núñez, J. González, V. Cabrera, J. Valdez, L. Salas, I. Cruz-González, E. Sohn, “Herramienta Hidrodinámica de pulido (HyDra) para los espejos del TIM. Parte II. Experimentos dinámicos,” Technical Report CI-2002-03, Instituto de Astronomía, Universidad Nacional Autonoma de México, Apartado Postal 70-264, C.P. 45020, México City, México (2002).

A. Cordero-Dávila, E. Luna, M. Núñez, J. González-García, V. H. Cabrera-Pelaez, J. Valdez, B. Martínez, B. García, V. García-Ramírez, L. Salas, I. Cruz-González, E. Ruiz, E. Sohn, M. A. Rodríguez-Pineda, “Polishing TIM mirror segments with HyDra,” in Future Giant Telescopes, J. Roger, P. Angel, R. Gilmozzi, eds., Proc. SPIE4840, 604–611 (2003).
[CrossRef]

E. Luna, A. Cordero-Dávila, E. Ruiz, M. Núñez, J. González-García, V. H. Cabrera-Pelaez, J. Valdez, B. García, V. García, L. Salas, I. Cruz-González, E. Sohn, A. Córdova, “Herramienta hidrodinámica de pulido (HyDra) para los espejos del TIM. Parte I. Experimentos estáticos y simulaciones numéricas,” Technical Report CI-2002-01, Instituto de Astronomía, Universidad Nacional Autonoma de México, Apartado Postal 70-264, C.P. 45020, México City, México (2002).

Valdez, J.

A. Cordero-Dávila, E. Luna, M. Núñez, J. González-García, V. H. Cabrera-Pelaez, J. Valdez, B. Martínez, B. García, V. García-Ramírez, L. Salas, I. Cruz-González, E. Ruiz, E. Sohn, M. A. Rodríguez-Pineda, “Polishing TIM mirror segments with HyDra,” in Future Giant Telescopes, J. Roger, P. Angel, R. Gilmozzi, eds., Proc. SPIE4840, 604–611 (2003).
[CrossRef]

E. Luna, A. Cordero-Dávila, E. Ruiz, M. Núñez, J. González-García, V. H. Cabrera-Pelaez, J. Valdez, B. García, V. García, L. Salas, I. Cruz-González, E. Sohn, A. Córdova, “Herramienta hidrodinámica de pulido (HyDra) para los espejos del TIM. Parte I. Experimentos estáticos y simulaciones numéricas,” Technical Report CI-2002-01, Instituto de Astronomía, Universidad Nacional Autonoma de México, Apartado Postal 70-264, C.P. 45020, México City, México (2002).

A. Cordero-Dávila, E. Luna, E. Ruiz, M. Núñez, J. González, V. Cabrera, J. Valdez, L. Salas, I. Cruz-González, E. Sohn, “Herramienta Hidrodinámica de pulido (HyDra) para los espejos del TIM. Parte II. Experimentos dinámicos,” Technical Report CI-2002-03, Instituto de Astronomía, Universidad Nacional Autonoma de México, Apartado Postal 70-264, C.P. 45020, México City, México (2002).

van Brug, H.

S. M. Booij, H. van Brug, J. M. Braat, O. W. Fähnle, “Nanometer deep shaping with fluid jet polishing,” Opt. Eng. 41, 1926–1931 (2002).
[CrossRef]

O. Fähnle, H. van Brug, H. Frankena, “Fluid jet polishing optical surfaces,” Appl. Opt. 38, 6771–6773 (1998).
[CrossRef]

S. M. Booij, H. van Brug, M. Singh, J. J. M. Braat, “Nanometer accurate shaping with fluid jet polishing,” in Optical Manufacturing and Testing IV, H. P. Stahl, ed., Proc. SPIE4451, 222–232 (2001).
[CrossRef]

S. M. Booij, H. van Brug, O. W. Fähnle, “A mathematical model for machining spot in fluid jet polishing,” in Optical Fabrication and Testing, Vol. 42 of OSA Trends in Optics and Photonics Series (Optical Society of America, Washington, D.C., 2000), pp. 70–72.

Wagner, R. E.

Appl. Opt. (2)

O. Fähnle, H. van Brug, H. Frankena, “Fluid jet polishing optical surfaces,” Appl. Opt. 38, 6771–6773 (1998).
[CrossRef]

R. E. Wagner, R. R. Shannon, “Fabrication of aspherics using a mathematical model for material removal,” Appl. Opt. 13, 1683–1689 (1974).
[CrossRef] [PubMed]

Opt. Eng. (1)

S. M. Booij, H. van Brug, J. M. Braat, O. W. Fähnle, “Nanometer deep shaping with fluid jet polishing,” Opt. Eng. 41, 1926–1931 (2002).
[CrossRef]

Other (7)

S. M. Booij, H. van Brug, O. W. Fähnle, “A mathematical model for machining spot in fluid jet polishing,” in Optical Fabrication and Testing, Vol. 42 of OSA Trends in Optics and Photonics Series (Optical Society of America, Washington, D.C., 2000), pp. 70–72.

S. M. Booij, H. van Brug, M. Singh, J. J. M. Braat, “Nanometer accurate shaping with fluid jet polishing,” in Optical Manufacturing and Testing IV, H. P. Stahl, ed., Proc. SPIE4451, 222–232 (2001).
[CrossRef]

S. M. Booij, “Fluid jet polishing: possibilities and limitations of a new fabrication technique,” Ph.D. thesis (Technishe Universiteit Delft, Delft, The Netherlands, 2003).

E. Ruiz, E. Sohn, E. Luna, L. Salas, “Hydrodynamic radial flux polishing and grinding tool for optical and semiconductor surfaces,” patent pending.

E. Luna, A. Cordero-Dávila, E. Ruiz, M. Núñez, J. González-García, V. H. Cabrera-Pelaez, J. Valdez, B. García, V. García, L. Salas, I. Cruz-González, E. Sohn, A. Córdova, “Herramienta hidrodinámica de pulido (HyDra) para los espejos del TIM. Parte I. Experimentos estáticos y simulaciones numéricas,” Technical Report CI-2002-01, Instituto de Astronomía, Universidad Nacional Autonoma de México, Apartado Postal 70-264, C.P. 45020, México City, México (2002).

A. Cordero-Dávila, E. Luna, E. Ruiz, M. Núñez, J. González, V. Cabrera, J. Valdez, L. Salas, I. Cruz-González, E. Sohn, “Herramienta Hidrodinámica de pulido (HyDra) para los espejos del TIM. Parte II. Experimentos dinámicos,” Technical Report CI-2002-03, Instituto de Astronomía, Universidad Nacional Autonoma de México, Apartado Postal 70-264, C.P. 45020, México City, México (2002).

A. Cordero-Dávila, E. Luna, M. Núñez, J. González-García, V. H. Cabrera-Pelaez, J. Valdez, B. Martínez, B. García, V. García-Ramírez, L. Salas, I. Cruz-González, E. Ruiz, E. Sohn, M. A. Rodríguez-Pineda, “Polishing TIM mirror segments with HyDra,” in Future Giant Telescopes, J. Roger, P. Angel, R. Gilmozzi, eds., Proc. SPIE4840, 604–611 (2003).
[CrossRef]

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Figures (20)

Fig. 1
Fig. 1

Profile of the simulated wear obtained by placing HyDra at four different radial positions. As can be seen, decreasing the footprint depth tends to conform HyDra along the glass rotation axis. For all cases, the dwell time for a given radius was 1.5 h.

Fig. 2
Fig. 2

Radial dependence of the maximum theoretic depth and experimental footprint produced by HyDra.

Fig. 3
Fig. 3

Foucaultgram and interferogram of the static imprint of maximum depth at a pressure of 50 PSI and 1-mm height with use of 750 ml of a concentration of 0.4-μm cerium oxide polisher.

Fig. 4
Fig. 4

Optimized removal rate obtained by modifying the height of HyDra with respect to the glass, with a constant supply pressure of 35 PSI and a 0.4-μm cerium oxide polisher.

Fig. 5
Fig. 5

Optimized removal rate obtained by modifying the height of HyDra with respect to the glass with a constant supply pressure of 40 PSI and a 0.4-μm cerium oxide polisher.

Fig. 6
Fig. 6

Optimized removal rate obtained by modifying the tool height with respect to the glass. A constant supply pressure of 45 PSI was applied with use of a 0.4-μm cerium oxide polisher.

Fig. 7
Fig. 7

Optimized removal rate obtained by modifying the height of HyDra with respect to the glass. A constant supply pressure of 50 PSI and a 0.4-μm cerium oxide polisher was used.

Fig. 8
Fig. 8

Optimized removal rate as a function of pressure for a polisher concentration of 250 ml. 1 PSI = 51.715 torr.

Fig. 9
Fig. 9

Optimized removal rate as a function of pressure for a polisher concentration of 500 ml. 1 PSI = 51.715 torr.

Fig. 10
Fig. 10

Optimized removal rate as a function of pressure for a polisher concentration of 750 ml. 1 PSI = 51.715 torr.

Fig. 11
Fig. 11

Schematic diagram of the polishing system.

Fig. 12
Fig. 12

Removal rate obtained for all polishers with a pressure of 50 PSI, except the 0.05-μm aluminum oxide, which used 45 PSI, 1-mm height and 750-ml polisher concentration.

Fig. 13
Fig. 13

Illustration of a dynamic experiment.

Fig. 14
Fig. 14

Erosion transversal view.

Fig. 15
Fig. 15

Foucaultgram (left) and interferogram (right) of a dynamic experiment with use of 12-μm aluminum oxide polisher of with a concentration of 750 ml. The maximum wear obtained was 1005 nm.

Fig. 16
Fig. 16

Simulated dynamic wear profile.

Fig. 17
Fig. 17

Wear profile of a dynamic experiment.

Fig. 18
Fig. 18

Comparison between the maximum dynamic removal rate of the experiments for each polisher with their respective concentrations (in milliliters).

Fig. 19
Fig. 19

Removal rate obtained from the dynamic experiments at a pressure of 50 PSI, a height of 1 mm, and a distance from the tool center with respect to the glass of 26 mm for each concentration.

Fig. 20
Fig. 20

Numerically simulated wear volumes (in cubic millimeters per hour) as a function of polisher particle volume (in cubic micrometers).

Tables (2)

Tables Icon

Table 1 Optimization Parameters for Different Polishers

Tables Icon

Table 2 Results Obtained for the Dynamic Experimentsa

Equations (2)

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ΔV=j=1j=n a2dj.
VRR=j=1j=n a2djΔt.

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