Abstract

A novel method of fabricating phase-only optical filters that is based on the properties of a uniaxial crystal is proposed. With these optical filters, the phase differences are tunable among the different filter zones. Many focal patterns can be obtained if these optical filters are placed in front of a lens; furthermore, these optical filters can also be used to make up for the distortions in fabrications in which they were used only as untunable optical filters.

© 2004 Optical Society of America

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1999

1998

T. R. M. Sales, G. M. Morris, “Axial superresolution with phase-only pupil filters,” Opt. Commun. 156, 227–230 (1998).
[CrossRef]

1997

1991

H. Fukuda, T. Terasawa, S. Okazaki, “Spatial filtering for depth of focus and resolution enhancement in optical lithography,” J. Vac. Sci. Technol. B 9, 3113–3116 (1991).
[CrossRef]

1990

1989

1986

1982

1980

R. Boivin, A. Boivin, “Optimized amplitude filtering for superresolution over a restricted field—I. Achievement of maximum central irradiance under an energy constraint,” Opt. Acta 27, 587–610 (1980).
[CrossRef]

1977

C. J. R. Sheppard, “The use of lenses with annular aperture in scanning optical microscopy,” Optik 48, 329–334 (1977).

1952

G. Toraldo di Francia, “Super-gain antennas and optical resolving power,” Nuovo Cimento Suppl. 9, 426–435 (1952).
[CrossRef]

Barnes, T. H.

Boivin, A.

R. Boivin, A. Boivin, “Optimized amplitude filtering for superresolution over a restricted field—I. Achievement of maximum central irradiance under an energy constraint,” Opt. Acta 27, 587–610 (1980).
[CrossRef]

Boivin, R.

R. Boivin, A. Boivin, “Optimized amplitude filtering for superresolution over a restricted field—I. Achievement of maximum central irradiance under an energy constraint,” Opt. Acta 27, 587–610 (1980).
[CrossRef]

Campos, J.

Cox, I. J.

Davis, J. A.

Ding, Z.

Eiju, T.

Escalera, J. C.

Fan, Z.

Fujii, H.

Fukuda, H.

H. Fukuda, T. Terasawa, S. Okazaki, “Spatial filtering for depth of focus and resolution enhancement in optical lithography,” J. Vac. Sci. Technol. B 9, 3113–3116 (1991).
[CrossRef]

Gu, M.

Z. Ding, G. Wang, M. Gu, Z. Wang, Z. Fan, “Superresolution with an apodization film in a confocal setup,” Appl. Opt. 36, 360–363 (1997).
[CrossRef] [PubMed]

M. Gu, Principles of Three-Dimensional Imaging in Confocal Microscopes (World Scientific, Singapore, 1996).

Hegedus, Z.

Hirose, Y.

Kubota, K.

Marquez, A.

Matusda, K.

Morris, G. M.

Okazaki, S.

H. Fukuda, T. Terasawa, S. Okazaki, “Spatial filtering for depth of focus and resolution enhancement in optical lithography,” J. Vac. Sci. Technol. B 9, 3113–3116 (1991).
[CrossRef]

Ooyama, N.

Safaris, V.

Sales, T. R. M.

Sheppard, C. J. R.

I. J. Cox, C. J. R. Sheppard, T. Wilson, “Reappraisal of arrays of concentric annuli as superresolving filters,” J. Opt. Soc. Am. 72, 1287–1291 (1982).
[CrossRef]

C. J. R. Sheppard, “The use of lenses with annular aperture in scanning optical microscopy,” Optik 48, 329–334 (1977).

Terasawa, T.

H. Fukuda, T. Terasawa, S. Okazaki, “Spatial filtering for depth of focus and resolution enhancement in optical lithography,” J. Vac. Sci. Technol. B 9, 3113–3116 (1991).
[CrossRef]

Toraldo di Francia, G.

G. Toraldo di Francia, “Super-gain antennas and optical resolving power,” Nuovo Cimento Suppl. 9, 426–435 (1952).
[CrossRef]

Wang, G.

Wang, Z.

Wilson, T.

Yamanaka, Y.

Yzuel, J.

Zhao, K.

K. Zhao, X. Zhong, Optics, 2nd ed. (Peking University Press, Peking, 1996), pp. 165–179.

Zhong, X.

K. Zhao, X. Zhong, Optics, 2nd ed. (Peking University Press, Peking, 1996), pp. 165–179.

Appl. Opt.

J. Opt. Soc. Am.

J. Opt. Soc. Am. A

J. Vac. Sci. Technol. B

H. Fukuda, T. Terasawa, S. Okazaki, “Spatial filtering for depth of focus and resolution enhancement in optical lithography,” J. Vac. Sci. Technol. B 9, 3113–3116 (1991).
[CrossRef]

Nuovo Cimento Suppl.

G. Toraldo di Francia, “Super-gain antennas and optical resolving power,” Nuovo Cimento Suppl. 9, 426–435 (1952).
[CrossRef]

Opt. Acta

R. Boivin, A. Boivin, “Optimized amplitude filtering for superresolution over a restricted field—I. Achievement of maximum central irradiance under an energy constraint,” Opt. Acta 27, 587–610 (1980).
[CrossRef]

Opt. Commun.

T. R. M. Sales, G. M. Morris, “Axial superresolution with phase-only pupil filters,” Opt. Commun. 156, 227–230 (1998).
[CrossRef]

Opt. Lett.

Optik

C. J. R. Sheppard, “The use of lenses with annular aperture in scanning optical microscopy,” Optik 48, 329–334 (1977).

Other

K. Zhao, X. Zhong, Optics, 2nd ed. (Peking University Press, Peking, 1996), pp. 165–179.

M. Gu, Principles of Three-Dimensional Imaging in Confocal Microscopes (World Scientific, Singapore, 1996).

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