Abstract

Planar silicon dioxide optical waveguides were deposited by use of a plasma-activated reactive evaporation system, at a low deposition temperature and with reduced hydrogen contamination, on thermally oxidized silicon wafers. The deposited films show a refractive-index inhomogeneity of less than 0.1%, a thickness nonuniformity of less than 5%, and a material birefringence of approximately 5 × 10-4. Rib-type channel waveguides were formed on the deposited films by means of hydrofluoric acid etching. The transmission loss of the rib waveguides is determined to be as low as 0.3 dB/cm at a wavelength of 1310 nm for TE polarization, after subtraction of the calculated leakage and scattering losses. Owing to the presence of the OH vibrational overtone band, an additional loss peak of 1 dB/cm is found near the 1385-nm wavelength. The experimental results of transmission loss at wavelengths of 1310 and 1550 nm are compared with analytic expressions for interface scattering and leakage loss.

© 2004 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Si-CMOS-compatible lift-off fabrication of low-loss planar chalcogenide waveguides

Juejun Hu, Vladimir Tarasov, Nathan Carlie, Ning-Ning Feng, Laeticia Petit, Anu Agarwal, Kathleen Richardson, and Lionel Kimerling
Opt. Express 15(19) 11798-11807 (2007)

Low-loss chalcogenide waveguides for chemical sensing in the mid-infrared

Pan Ma, Duk-Yong Choi, Yi Yu, Xin Gai, Zhiyong Yang, Sukanta Debbarma, Steve Madden, and Barry Luther-Davies
Opt. Express 21(24) 29927-29937 (2013)

Fabrication of ultralow-loss Si/SiO2 waveguides by roughness reduction

Kevin K. Lee, Desmond R. Lim, Lionel C. Kimerling, Jangho Shin, and Franco Cerrina
Opt. Lett. 26(23) 1888-1890 (2001)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (7)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Tables (2)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (8)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription