Abstract

We report on a way to shape surfaces with fluid jet polishing by adjusting the influence function (the shape of the footprint of the nozzle) instead of changing the dwell time of the nozzle on the surface. In that way, the surface is processed homogeneously, and no dip is generated in the center of the workpiece. As a proof of this approach, a λ/10 flat surface has been generated in our laboratory.

© 2004 Optical Society of America

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References

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  1. D. F. Horne, Optical Production Technology (Adam Hilger, London, 1972).
  2. P. M. Shanbhag, M. R. Feinberg, G. Sandri, M. N. Horenstein, T. G. Bifano, “Ion-beam machining of millimeter scale optics,” Appl. Opt. 39, 599–611 (2000).
    [Crossref]
  3. O. W. Fähnle, H. van Brug, H. J. Frankena, “Fluid jet polishing of optical surfaces,” Appl. Opt. 37, 6771–6773 (1998).
    [Crossref]

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Figures (3)

Fig. 1
Fig. 1

(a) Rotating sample with the footprint translating over the entire surface. (b) The resulting surface shape when the velocity of translation is constant. (c) Cross section through the center of the rotationally symmetric resulting surface.

Fig. 2
Fig. 2

(a) Rotating sample with the rectangularly shaped nozzle that is translated over the surface. The indicated cross (x) will reach every part of the sample. (b) The indicated cross (x) will reach only the gray part of the sample. (c) A cross section through the resulting surface for a constant radial scan velocity.

Fig. 3
Fig. 3

(a) Footprint that was used in the fluid jet polishing setup. (b) A cross section through the resulting λ/10 flat surface. (c) An optical interferogram of the resulting surface.

Equations (3)

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qx, y=t0t1 fx-x0t, y-y0tdt.
qr=C/rv,
v=-CrR-1+R2-r2R21/2=CRr31+1-r2R21/2.

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