Abstract

A technique for developing recording gratings in situ in Photoresist Shipley S-1822 is described. The developing process is accomplished by use of a spray without removing the sample from the optical setup. The results for the diffraction efficiency show that there is not a large difference between gratings achieved with the traditional wet development process and those obtained with the in situ developing technique. The potential of this in situ developing technique is shown with a moiré interferometric experimental setup used for displacement showing.

© 2003 Optical Society of America

Full Article  |  PDF Article

References

  • View by:
  • |
  • |
  • |

  1. P. Hariharan, “Optical holography,” in Holographic Interferometry (Cambridge University Press, Cambridge, UK, 1984), Chap. 14, pp. 207–210.
  2. W. van Deelen, P. Nisenson, “Mirror blank testing by real-time holographic interferometry,” Appl. Opt. 8, 951–955 (1969).
    [CrossRef] [PubMed]
  3. P. Hariharan, B. S. Ramprasad, “Rapid in Situ processing for real-time holographic interferometry,” J. Phys. E. 6, 699–701 (1973).
    [CrossRef]
  4. D. Post, B. Han, P. Ifju, “High sensitivity moiré,” in Moiré Interferometry (Springer-Verlag, New York, 1994), Chap. 4, pp. 135–226.
  5. J. A. Britten, R. D. Boyd, B. W. Shore, “In situ end-point detection during development of submicrometer grating structures in photoresist,” Opt. Eng. 34, 474–479 (1995).
    [CrossRef]
  6. C. Pérez López, F. Mendoza Santoyo, J. A. Guerrero, “Decoupling the x, y and z displacement components in a rotating disc using three-dimensional pulsed digital holography,” Meas. Sci. Technol. 14, 97–100 (2003).
    [CrossRef]
  7. A. Martínez, R. Rodríguez-Vera, J. A. Rayas, H. J. Puga, “Fracture detection by grating moiré and in-plane ESPI techniques,” Opt. Lasers Eng. 39, 525–536 (2003).
    [CrossRef]
  8. R. A. Bartolini, “Holographic recording material,” in Photoresist, H. M. Smith ed. (Springer-Verlag, New York, 1977), Chap. 7, pp. 217–221.
  9. F. Iwata, J. Tsujiuchi, “Characteristics of a photoresist hologram and its replica,” Appl. Opt. 13, 1327–1336 (1974).
    [CrossRef] [PubMed]
  10. J. F. Cárdenas-García, B. Han, R. Rodríguez-Vera, J. A. Rayas, “The interferometric moiré circular disc,” presented at Proceedings of the 2002 Society for Experimental Mechanics, Annual Conference and Exposition on Experimental and Applied Mechanics, electronic version Paper 232, Milwaukee, Wisconsin, 10–12 June 2002.
  11. K. M. Hung, C. C. Ma, “Theoretical analysis and digital photoelastic measurement of circular disks subjected to partially distributed compressions,” Exp. Mech. 43, 216–224 (2003).

2003 (3)

C. Pérez López, F. Mendoza Santoyo, J. A. Guerrero, “Decoupling the x, y and z displacement components in a rotating disc using three-dimensional pulsed digital holography,” Meas. Sci. Technol. 14, 97–100 (2003).
[CrossRef]

A. Martínez, R. Rodríguez-Vera, J. A. Rayas, H. J. Puga, “Fracture detection by grating moiré and in-plane ESPI techniques,” Opt. Lasers Eng. 39, 525–536 (2003).
[CrossRef]

K. M. Hung, C. C. Ma, “Theoretical analysis and digital photoelastic measurement of circular disks subjected to partially distributed compressions,” Exp. Mech. 43, 216–224 (2003).

1995 (1)

J. A. Britten, R. D. Boyd, B. W. Shore, “In situ end-point detection during development of submicrometer grating structures in photoresist,” Opt. Eng. 34, 474–479 (1995).
[CrossRef]

1974 (1)

1973 (1)

P. Hariharan, B. S. Ramprasad, “Rapid in Situ processing for real-time holographic interferometry,” J. Phys. E. 6, 699–701 (1973).
[CrossRef]

1969 (1)

Bartolini, R. A.

R. A. Bartolini, “Holographic recording material,” in Photoresist, H. M. Smith ed. (Springer-Verlag, New York, 1977), Chap. 7, pp. 217–221.

Boyd, R. D.

J. A. Britten, R. D. Boyd, B. W. Shore, “In situ end-point detection during development of submicrometer grating structures in photoresist,” Opt. Eng. 34, 474–479 (1995).
[CrossRef]

Britten, J. A.

J. A. Britten, R. D. Boyd, B. W. Shore, “In situ end-point detection during development of submicrometer grating structures in photoresist,” Opt. Eng. 34, 474–479 (1995).
[CrossRef]

Cárdenas-García, J. F.

J. F. Cárdenas-García, B. Han, R. Rodríguez-Vera, J. A. Rayas, “The interferometric moiré circular disc,” presented at Proceedings of the 2002 Society for Experimental Mechanics, Annual Conference and Exposition on Experimental and Applied Mechanics, electronic version Paper 232, Milwaukee, Wisconsin, 10–12 June 2002.

Guerrero, J. A.

C. Pérez López, F. Mendoza Santoyo, J. A. Guerrero, “Decoupling the x, y and z displacement components in a rotating disc using three-dimensional pulsed digital holography,” Meas. Sci. Technol. 14, 97–100 (2003).
[CrossRef]

Han, B.

J. F. Cárdenas-García, B. Han, R. Rodríguez-Vera, J. A. Rayas, “The interferometric moiré circular disc,” presented at Proceedings of the 2002 Society for Experimental Mechanics, Annual Conference and Exposition on Experimental and Applied Mechanics, electronic version Paper 232, Milwaukee, Wisconsin, 10–12 June 2002.

D. Post, B. Han, P. Ifju, “High sensitivity moiré,” in Moiré Interferometry (Springer-Verlag, New York, 1994), Chap. 4, pp. 135–226.

Hariharan, P.

P. Hariharan, B. S. Ramprasad, “Rapid in Situ processing for real-time holographic interferometry,” J. Phys. E. 6, 699–701 (1973).
[CrossRef]

P. Hariharan, “Optical holography,” in Holographic Interferometry (Cambridge University Press, Cambridge, UK, 1984), Chap. 14, pp. 207–210.

Hung, K. M.

K. M. Hung, C. C. Ma, “Theoretical analysis and digital photoelastic measurement of circular disks subjected to partially distributed compressions,” Exp. Mech. 43, 216–224 (2003).

Ifju, P.

D. Post, B. Han, P. Ifju, “High sensitivity moiré,” in Moiré Interferometry (Springer-Verlag, New York, 1994), Chap. 4, pp. 135–226.

Iwata, F.

Ma, C. C.

K. M. Hung, C. C. Ma, “Theoretical analysis and digital photoelastic measurement of circular disks subjected to partially distributed compressions,” Exp. Mech. 43, 216–224 (2003).

Martínez, A.

A. Martínez, R. Rodríguez-Vera, J. A. Rayas, H. J. Puga, “Fracture detection by grating moiré and in-plane ESPI techniques,” Opt. Lasers Eng. 39, 525–536 (2003).
[CrossRef]

Mendoza Santoyo, F.

C. Pérez López, F. Mendoza Santoyo, J. A. Guerrero, “Decoupling the x, y and z displacement components in a rotating disc using three-dimensional pulsed digital holography,” Meas. Sci. Technol. 14, 97–100 (2003).
[CrossRef]

Nisenson, P.

Pérez López, C.

C. Pérez López, F. Mendoza Santoyo, J. A. Guerrero, “Decoupling the x, y and z displacement components in a rotating disc using three-dimensional pulsed digital holography,” Meas. Sci. Technol. 14, 97–100 (2003).
[CrossRef]

Post, D.

D. Post, B. Han, P. Ifju, “High sensitivity moiré,” in Moiré Interferometry (Springer-Verlag, New York, 1994), Chap. 4, pp. 135–226.

Puga, H. J.

A. Martínez, R. Rodríguez-Vera, J. A. Rayas, H. J. Puga, “Fracture detection by grating moiré and in-plane ESPI techniques,” Opt. Lasers Eng. 39, 525–536 (2003).
[CrossRef]

Ramprasad, B. S.

P. Hariharan, B. S. Ramprasad, “Rapid in Situ processing for real-time holographic interferometry,” J. Phys. E. 6, 699–701 (1973).
[CrossRef]

Rayas, J. A.

A. Martínez, R. Rodríguez-Vera, J. A. Rayas, H. J. Puga, “Fracture detection by grating moiré and in-plane ESPI techniques,” Opt. Lasers Eng. 39, 525–536 (2003).
[CrossRef]

J. F. Cárdenas-García, B. Han, R. Rodríguez-Vera, J. A. Rayas, “The interferometric moiré circular disc,” presented at Proceedings of the 2002 Society for Experimental Mechanics, Annual Conference and Exposition on Experimental and Applied Mechanics, electronic version Paper 232, Milwaukee, Wisconsin, 10–12 June 2002.

Rodríguez-Vera, R.

A. Martínez, R. Rodríguez-Vera, J. A. Rayas, H. J. Puga, “Fracture detection by grating moiré and in-plane ESPI techniques,” Opt. Lasers Eng. 39, 525–536 (2003).
[CrossRef]

J. F. Cárdenas-García, B. Han, R. Rodríguez-Vera, J. A. Rayas, “The interferometric moiré circular disc,” presented at Proceedings of the 2002 Society for Experimental Mechanics, Annual Conference and Exposition on Experimental and Applied Mechanics, electronic version Paper 232, Milwaukee, Wisconsin, 10–12 June 2002.

Shore, B. W.

J. A. Britten, R. D. Boyd, B. W. Shore, “In situ end-point detection during development of submicrometer grating structures in photoresist,” Opt. Eng. 34, 474–479 (1995).
[CrossRef]

Tsujiuchi, J.

van Deelen, W.

Appl. Opt. (2)

Exp. Mech. (1)

K. M. Hung, C. C. Ma, “Theoretical analysis and digital photoelastic measurement of circular disks subjected to partially distributed compressions,” Exp. Mech. 43, 216–224 (2003).

J. Phys. E. (1)

P. Hariharan, B. S. Ramprasad, “Rapid in Situ processing for real-time holographic interferometry,” J. Phys. E. 6, 699–701 (1973).
[CrossRef]

Meas. Sci. Technol. (1)

C. Pérez López, F. Mendoza Santoyo, J. A. Guerrero, “Decoupling the x, y and z displacement components in a rotating disc using three-dimensional pulsed digital holography,” Meas. Sci. Technol. 14, 97–100 (2003).
[CrossRef]

Opt. Eng. (1)

J. A. Britten, R. D. Boyd, B. W. Shore, “In situ end-point detection during development of submicrometer grating structures in photoresist,” Opt. Eng. 34, 474–479 (1995).
[CrossRef]

Opt. Lasers Eng. (1)

A. Martínez, R. Rodríguez-Vera, J. A. Rayas, H. J. Puga, “Fracture detection by grating moiré and in-plane ESPI techniques,” Opt. Lasers Eng. 39, 525–536 (2003).
[CrossRef]

Other (4)

R. A. Bartolini, “Holographic recording material,” in Photoresist, H. M. Smith ed. (Springer-Verlag, New York, 1977), Chap. 7, pp. 217–221.

P. Hariharan, “Optical holography,” in Holographic Interferometry (Cambridge University Press, Cambridge, UK, 1984), Chap. 14, pp. 207–210.

J. F. Cárdenas-García, B. Han, R. Rodríguez-Vera, J. A. Rayas, “The interferometric moiré circular disc,” presented at Proceedings of the 2002 Society for Experimental Mechanics, Annual Conference and Exposition on Experimental and Applied Mechanics, electronic version Paper 232, Milwaukee, Wisconsin, 10–12 June 2002.

D. Post, B. Han, P. Ifju, “High sensitivity moiré,” in Moiré Interferometry (Springer-Verlag, New York, 1994), Chap. 4, pp. 135–226.

Cited By

OSA participates in CrossRef's Cited-By Linking service. Citing articles from OSA journals and other participating publishers are listed here.

Alert me when this article is cited.


Figures (4)

Fig. 1
Fig. 1

(a) Experimental setup. (b) In situ development process.

Fig. 2
Fig. 2

Comparison of experimental diffraction efficiency between recorded gratings by traditional technique and by in situ development. The light was incident normal to the grating.

Fig. 3
Fig. 3

Grating modulation profiles obtained with using an atomic force microscope. (a) Specimen grating is removed for the developed process. (b) Specimen grating is developed in situ.

Fig. 4
Fig. 4

Moiré pattern for horizontal displacements of an acrylic disc loaded diametrically in y. (a) Specimen grating is removed for the developed process. (b) Specimen grating is developed in situ.

Metrics