Abstract

Multilayer lifetime has emerged as one of the major issues for the commercialization of extreme-ultraviolet lithography (EUVL). We describe the performance of an oxidation-resistant capping layer of Ru atop multilayers that results in a reflectivity above 69% at 13.2 nm, which is suitable for EUVL projection optics and has been tested with accelerated electron-beam and extreme-ultraviolet (EUV) light in a water-vapor environment. Based on accelerated exposure results, we calculated multilayer lifetimes for all reflective mirrors in a typical commercial EUVL tool and concluded that Ru-capped multilayers have ∼40× longer lifetimes than Si-capped multilayers, which translates to 3 months to many years, depending on the mirror dose.

© 2003 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Aperiodic multilayers with enhanced reflectivity for extreme ultraviolet lithography

Michele Suman, Maria-Guglielmina Pelizzo, Piergiorgio Nicolosi, and David L. Windt
Appl. Opt. 47(16) 2906-2914 (2008)

Design of multilayer extreme-ultraviolet mirrors for enhanced reflectivity

Mandeep Singh and Joseph J. M. Braat
Appl. Opt. 39(13) 2189-2197 (2000)

High performance EUV multilayer structures insensitive to capping layer optical parameters

Maria Guglielmina Pelizzo, Michele Suman, Gianni Monaco, Piergiorgio Nicolosi, and David L. Windt
Opt. Express 16(19) 15228-15237 (2008)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (8)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Tables (1)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (2)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription