Abstract

We introduce two parameters, large-scale and small-scale rms roughness, to take into account the interface properties of thin films and multilayers in the calculation of their specular reflectance and transmittance. A theoretical motivation for the introduction of these two parameters instead of a standard single rms roughness is provided. Experimental power spectral density functions of several samples are used to illustrate ways in which the parameters introduced can be evaluated.

© 2003 Optical Society of America

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Figures (9)

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