Abstract

The differences in the curves of the zeroth-order cross-polarization reflection coefficients (ps and sp) versus angle of incidence have remarkable potential for application in scatterometry because, if the differences are larger than the measurement error, they could contribute to a reliable nondestructive technique for detecting asymmetries in grating profiles. The cross-polarization efficiencies of highly conducting metallic gratings with asymmetric trapezoidal profiles are investigated theoretically by means of a rigorous electromagnetic code. The results show that the differences between ps and sp conversion tend to be undetectable for highly conducting materials, a fact that limits, in principle, the application of this potential detection technique.

© 2003 Optical Society of America

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