The differences in the curves of the zeroth-order cross-polarization reflection coefficients (p → s and s → p) versus angle of incidence have remarkable potential for application in scatterometry because, if the differences are larger than the measurement error, they could contribute to a reliable nondestructive technique for detecting asymmetries in grating profiles. The cross-polarization efficiencies of highly conducting metallic gratings with asymmetric trapezoidal profiles are investigated theoretically by means of a rigorous electromagnetic code. The results show that the differences between p → s and s → p conversion tend to be undetectable for highly conducting materials, a fact that limits, in principle, the application of this potential detection technique.
© 2003 Optical Society of AmericaFull Article | PDF Article
OSA Recommended Articles
L. B. Mashev, E. K. Popov, and Erwin G. Loewen
Appl. Opt. 26(14) 2864-2866 (1987)
J. Opt. Soc. Am. A 17(5) 881-887 (2000)
Lin Yang, Lijiang Zeng, and Lifeng Li
Appl. Opt. 53(6) 1143-1150 (2014)