Abstract

We realized what we believe is a new phase-shifting scatterplate interferometer by exploiting the polarization characteristics of a birefringent scatterplate. The common-path design of the interferometer reduces its sensitivity to environmental effects, and phase shifting allows quick and accurate quantitative measurements of the test surface. A major feature of the birefringent scatterplate approach for phase shifting is that no high-quality optical components are required in the test setup. The theory of the interferometer is presented, the procedure for the fabrication of the birefringent scatterplate is described, and experimental results are shown.

© 2002 Optical Society of America

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1998 (1)

J. T. Rässänen, K. Peiponen, K. M. Abedin, K. Tenjimbayashi, T. Eiju, K. Matsuda, “Integrated scatter plate and projection lens for scatter plate interferometer,” Rev. Sci. Instrum. 69, 1587–1590 (1998).
[CrossRef]

1996 (1)

1991 (1)

D.-C. Su, L.-H. Shyu, “Phase-shifting scatter plate interferometer using a polarization technique,” J. Mod. Opt. 38, 951–959 (1991).
[CrossRef]

1988 (1)

J. Huang, T. Honda, N. Ohyama, J. Tsuiiuchi, “Fringe scanning scatter plate interferometer using a polarized light,” Opt. Commun. 68, 235–238 (1988).
[CrossRef]

1984 (1)

1980 (1)

L. Rubin, “Scatterplate interferometry,” Opt. Eng. 19, 815–824 (1980).
[CrossRef]

1975 (1)

1974 (1)

1969 (2)

R. M. Scott, “Scatterplate interferometry,”Appl. Opt. 8, 531–537 (1969).

R. Crane, “Interference phase measurement,” Appl. Opt. 8, 538–542 (1969).

1966 (1)

P. Carré, “Installation et Utilisation du Comparateur Photoelectrique et Interferentiel du Bureau International des Poids de Mesures,” Metrologia 2, 13–16 (1966).
[CrossRef]

1953 (1)

J. M. Burch, “Scatter fringes of equal thickness,” Nature (London) 171, 889 (1953).
[CrossRef]

Abedin, K. M.

J. T. Rässänen, K. Peiponen, K. M. Abedin, K. Tenjimbayashi, T. Eiju, K. Matsuda, “Integrated scatter plate and projection lens for scatter plate interferometer,” Rev. Sci. Instrum. 69, 1587–1590 (1998).
[CrossRef]

Bokor, J.

Brangaccio, D. J.

Bruning, J. H.

Burch, J. M.

J. M. Burch, “Scatter fringes of equal thickness,” Nature (London) 171, 889 (1953).
[CrossRef]

J. M. Burch, “Interferometry in scattered light,” in Optical Instruments and Techniques, J. H. Dickson, ed. (Oriel, London, 1970), pp. 220–229.

Carré, P.

P. Carré, “Installation et Utilisation du Comparateur Photoelectrique et Interferentiel du Bureau International des Poids de Mesures,” Metrologia 2, 13–16 (1966).
[CrossRef]

Crane, R.

R. Crane, “Interference phase measurement,” Appl. Opt. 8, 538–542 (1969).

Creath, K.

C. R. Mercer, K. Creath, N. Rashidnia, “A phase-stepped point diffraction interferometer using liquid crystals,” in Interferometry VII: Techniques and Analysis, M. Kujawinska, R. J. Pryputniewicz, M. Takeda, eds., Proc. SPIE2544, 87–93 (1995).

Eiju, T.

J. T. Rässänen, K. Peiponen, K. M. Abedin, K. Tenjimbayashi, T. Eiju, K. Matsuda, “Integrated scatter plate and projection lens for scatter plate interferometer,” Rev. Sci. Instrum. 69, 1587–1590 (1998).
[CrossRef]

Gallagher, J. E.

Goldberg, K. A.

Harris, T. J.

W. J. Tropf, M. E. Thomas, T. J. Harris, “Properties of crystals and glasses,” in Handbook of Optics, M. Bass, ed. (McGraw-Hill, New York, 1995), Vol. 2, pp. 33.1–33.101.

Herriott, D. R.

Honda, T.

J. Huang, T. Honda, N. Ohyama, J. Tsuiiuchi, “Fringe scanning scatter plate interferometer using a polarized light,” Opt. Commun. 68, 235–238 (1988).
[CrossRef]

Huang, J.

J. Huang, T. Honda, N. Ohyama, J. Tsuiiuchi, “Fringe scanning scatter plate interferometer using a polarized light,” Opt. Commun. 68, 235–238 (1988).
[CrossRef]

Kwon, O. K.

Matsuda, K.

J. T. Rässänen, K. Peiponen, K. M. Abedin, K. Tenjimbayashi, T. Eiju, K. Matsuda, “Integrated scatter plate and projection lens for scatter plate interferometer,” Rev. Sci. Instrum. 69, 1587–1590 (1998).
[CrossRef]

Medecki, H.

Mercer, C. R.

C. R. Mercer, K. Creath, N. Rashidnia, “A phase-stepped point diffraction interferometer using liquid crystals,” in Interferometry VII: Techniques and Analysis, M. Kujawinska, R. J. Pryputniewicz, M. Takeda, eds., Proc. SPIE2544, 87–93 (1995).

Ohyama, N.

J. Huang, T. Honda, N. Ohyama, J. Tsuiiuchi, “Fringe scanning scatter plate interferometer using a polarized light,” Opt. Commun. 68, 235–238 (1988).
[CrossRef]

Peiponen, K.

J. T. Rässänen, K. Peiponen, K. M. Abedin, K. Tenjimbayashi, T. Eiju, K. Matsuda, “Integrated scatter plate and projection lens for scatter plate interferometer,” Rev. Sci. Instrum. 69, 1587–1590 (1998).
[CrossRef]

Rashidnia, N.

C. R. Mercer, K. Creath, N. Rashidnia, “A phase-stepped point diffraction interferometer using liquid crystals,” in Interferometry VII: Techniques and Analysis, M. Kujawinska, R. J. Pryputniewicz, M. Takeda, eds., Proc. SPIE2544, 87–93 (1995).

Rässänen, J. T.

J. T. Rässänen, K. Peiponen, K. M. Abedin, K. Tenjimbayashi, T. Eiju, K. Matsuda, “Integrated scatter plate and projection lens for scatter plate interferometer,” Rev. Sci. Instrum. 69, 1587–1590 (1998).
[CrossRef]

Rosenfeld, D. P.

Rubin, L.

L. Rubin, “Scatterplate interferometry,” Opt. Eng. 19, 815–824 (1980).
[CrossRef]

Scott, R. M.

R. M. Scott, “Scatterplate interferometry,”Appl. Opt. 8, 531–537 (1969).

Shyu, L.-H.

D.-C. Su, L.-H. Shyu, “Phase-shifting scatter plate interferometer using a polarization technique,” J. Mod. Opt. 38, 951–959 (1991).
[CrossRef]

Su, D.-C.

D.-C. Su, L.-H. Shyu, “Phase-shifting scatter plate interferometer using a polarization technique,” J. Mod. Opt. 38, 951–959 (1991).
[CrossRef]

Tejnil, E.

Tenjimbayashi, K.

J. T. Rässänen, K. Peiponen, K. M. Abedin, K. Tenjimbayashi, T. Eiju, K. Matsuda, “Integrated scatter plate and projection lens for scatter plate interferometer,” Rev. Sci. Instrum. 69, 1587–1590 (1998).
[CrossRef]

Thomas, M. E.

W. J. Tropf, M. E. Thomas, T. J. Harris, “Properties of crystals and glasses,” in Handbook of Optics, M. Bass, ed. (McGraw-Hill, New York, 1995), Vol. 2, pp. 33.1–33.101.

Tropf, W. J.

W. J. Tropf, M. E. Thomas, T. J. Harris, “Properties of crystals and glasses,” in Handbook of Optics, M. Bass, ed. (McGraw-Hill, New York, 1995), Vol. 2, pp. 33.1–33.101.

Tsuiiuchi, J.

J. Huang, T. Honda, N. Ohyama, J. Tsuiiuchi, “Fringe scanning scatter plate interferometer using a polarized light,” Opt. Commun. 68, 235–238 (1988).
[CrossRef]

White, A. D.

Wyant, J. C.

Appl. Opt. (4)

J. Mod. Opt. (1)

D.-C. Su, L.-H. Shyu, “Phase-shifting scatter plate interferometer using a polarization technique,” J. Mod. Opt. 38, 951–959 (1991).
[CrossRef]

Metrologia (1)

P. Carré, “Installation et Utilisation du Comparateur Photoelectrique et Interferentiel du Bureau International des Poids de Mesures,” Metrologia 2, 13–16 (1966).
[CrossRef]

Nature (London) (1)

J. M. Burch, “Scatter fringes of equal thickness,” Nature (London) 171, 889 (1953).
[CrossRef]

Opt. Commun. (1)

J. Huang, T. Honda, N. Ohyama, J. Tsuiiuchi, “Fringe scanning scatter plate interferometer using a polarized light,” Opt. Commun. 68, 235–238 (1988).
[CrossRef]

Opt. Eng. (1)

L. Rubin, “Scatterplate interferometry,” Opt. Eng. 19, 815–824 (1980).
[CrossRef]

Opt. Lett. (2)

Rev. Sci. Instrum. (1)

J. T. Rässänen, K. Peiponen, K. M. Abedin, K. Tenjimbayashi, T. Eiju, K. Matsuda, “Integrated scatter plate and projection lens for scatter plate interferometer,” Rev. Sci. Instrum. 69, 1587–1590 (1998).
[CrossRef]

Other (3)

W. J. Tropf, M. E. Thomas, T. J. Harris, “Properties of crystals and glasses,” in Handbook of Optics, M. Bass, ed. (McGraw-Hill, New York, 1995), Vol. 2, pp. 33.1–33.101.

J. M. Burch, “Interferometry in scattered light,” in Optical Instruments and Techniques, J. H. Dickson, ed. (Oriel, London, 1970), pp. 220–229.

C. R. Mercer, K. Creath, N. Rashidnia, “A phase-stepped point diffraction interferometer using liquid crystals,” in Interferometry VII: Techniques and Analysis, M. Kujawinska, R. J. Pryputniewicz, M. Takeda, eds., Proc. SPIE2544, 87–93 (1995).

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