Transmission two-modulator generalized ellipsometry measurements

Abstract

The two-modulator generalized ellipsometer has been used to measure samples in transmission. In this configuration, the instrument can completely characterize a linear diattenuator and retarder, measuring birefringence, diattenuation, the angle of the principal axis, and the sample depolarization simultaneously and accurately. This instrument can be operated in two modes: (1) spectroscopic, in which measurements are made through the entire sample aperture as a function of wavelength, and (2) spatially resolved, in which measurements are made at a single wavelength and a birefringence picture is made of the sample. Current spatially resolved measurements have been made at a resolution of ∼40 µm. Four samples have been examined with this instrument: (1) a mica plate, (2) a Polaroid polarizer, and (3) two quartz plates.

© 2002 Optical Society of America

Determination of the components of the gyration tensor of quartz by oblique incidence transmission two-modulator generalized ellipsometry

Oriol Arteaga, Adolf Canillas, and Gerald E. Jellison, Jr.
Appl. Opt. 48(28) 5307-5317 (2009)

Normal-incidence generalized ellipsometry using the two-modulator generalized ellipsometry microscope

Gerald E. Jellison Jr., John D. Hunn, and Christopher M. Rouleau
Appl. Opt. 45(22) 5479-5488 (2006)

Two-modulator generalized ellipsometry: theory

G. E. Jellison and F. A. Modine
Appl. Opt. 36(31) 8190-8198 (1997)

Determination of optical birefringence by using off-axis transmission ellipsometry

Gerald E. Jellison and Christopher M. Rouleau
Appl. Opt. 44(16) 3153-3159 (2005)

Two-modulator generalized ellipsometry: experiment and calibration

G. E. Jellison and F. A. Modine
Appl. Opt. 36(31) 8184-8189 (1997)