Abstract

With the aim of realizing a Michelson interferometer working at 13.9 nm, we have developed a symmetrical beam splitter with multilayers deposited on the front and back sides of a silicon nitride membrane. On the basis of the experimental optical properties of the membrane, simulations have been performed to define the multilayer structure that provides the highest reflectivity-transmission product. Optimized Mo-Si multilayers have been successfully deposited on both sides of the membrane by use of the ion-beam sputtering technique, with a thickness-period reproducibility of 0.1 nm. Measurements by means of synchrotron radiation at 13.9 nm and at an angle of 45° provide a reflectivity of 14.2% and a transmission of 15.2% for a 60% s-polarized light, close to the simulated values. Such a beam splitter has been used for x-ray laser Michelson interferometry at 13.9 nm. The first interferogram is discussed.

© 2002 Optical Society of America

Full Article  |  PDF Article

References

  • View by:
  • |
  • |
  • |

  1. G. Charatis, G. E. Busch, C. L. Shepard, P. M. Campbell, M. D. Rosen, “Hydrodynamic aspects of selenium x-ray laser targets,” J. Phys. C 6, 89–98 (1986).
  2. M. K. Prasad, K. G. Estabrook, J. A. Harte, R. S. Craxton, R. A. Bosch, G. E. Busch, J. S. Kollin, “Holographic interferograms from laser fusion code simulations,” Phys. Fluids B 4, 1569–1575 (1992).
    [CrossRef]
  3. S. Chakrabarti, D. M. Cotton, J. S. Vickers, B. C. Bush, “Self-compensating, all-reflection interferometer,” Appl. Opt. 33, 2596–2602 (1994).
    [CrossRef] [PubMed]
  4. J. Svatos, D. Joyeux, D. Phalippou, F. Polack, “Soft-x-ray interferometer for measuring the refractive index of materials,” Opt. Lett. 18, 1367–1369 (1993).
    [CrossRef] [PubMed]
  5. L. B. Da Silva, T. W. Barbee, R. Cauble, P. Celliers, D. Ciarlo, S. Libby, R. A. London, D. Matthews, S. Mrowka, J. C. Moreno, D. Ress, J. E. Trebes, A. S. Wan, F. Weber, “Electron density measurements of high density plasmas using soft X-ray laser interferometry,” Phys. Rev. Lett. 74, 3991–3994 (1995).
    [CrossRef] [PubMed]
  6. P. Celliers, F. Weber, L. B. Da Silva, T. W. Barbee, R. Cauble, A. S. Wan, J. C. Moreno, “Fringe formation and coherence of a soft-x-ray laser beam illuminating a Mach-Zehnder interferometer,” Opt. Lett. 20, 1907–1909 (1995).
    [CrossRef] [PubMed]
  7. D. G. Stearns, N. M. Ceglio, A. M. Hawryluk, M. B. Stearns, A. K. Petford-Long, C. H. Chang, K. Danzmann, M. Kuhne, P. Muller, B. Wende, “TEM and X-ray analysis of multilayer mirrors and beamsplitters,” in Multilayer Structures and Laboratory X-Ray Laser Research, N. M. Ceglio, P. Dhez, eds., Proc. SPIE688, 91–98 (1987).
    [CrossRef]
  8. N. M. Ceglio, “Revolution in X-ray optics,” J. X-Ray Sci. Technol. 1, 7–78 (1989).
    [CrossRef]
  9. T. Haga, M. C. K. Tinene, A. Ozawa, Y. Utsumi, S. Itabashi, T. Ohkubo, M. Shimada, “Fabrication of semitransparent multilayer polarizer and its application to soft x-ray ellipsometer,” in Ultraviolet and X-Ray Detection, Spectroscopy, and Polarimetry III, S. Fineschi, B. E. Woodgate, R. A. Kimble, eds., Proc. SPIE3764, 13–27 (1999).
    [CrossRef]
  10. F. Bridou, B. Pardo, “Automatic characterization of layers stacks from reflectivity measurements. Application to the study of the validity conditions of the grazing X-rays reflectometry,” J. Opt. (Paris) 21, 183–191 (1990).
    [CrossRef]
  11. B. L. Henke, E. M. Gullikson, J. C. Davis, “X-ray interactions: photoabsorption, scattering, transmission, and reflection at E = 50-30000 eV, Z = 1-92,” At. Data Nucl. Data Tables 54, 181–342 (1993) or http://www-cxro.lbl.gov .
  12. S. Ogura, M. Niibe, Y. Watanabe, M. Hayashida, T. Iizuka, “Comparison among multilayer soft X-ray mirrors fabricated by electron beam, DC-, RF-magnetron sputtering and ion beam sputtering deposition,” in X-Ray Multilayers for Diffractometers, Monochromators, and Spectrometers, F. E. Christensen, ed., Proc. SPIE984, 140–148 (1988).
    [CrossRef]
  13. T. W. Barbee, J. C. Rife, W. R. Hunter, M. P. Kowalski, R. G. Cruddace, J. F. Seely, “Long-term stability of a Mo/Si multilayer structure,” Appl. Opt. 32, 4852–4854 (1993).
    [CrossRef] [PubMed]
  14. K. Holloway, K. Ba Do, R. Sinclair, “Interfacial reactions on annealing molybdenum-silicon multilayers,” J. Appl. Phys. 65, 474–80 (1989).
    [CrossRef]
  15. D. G. Steams, R. S. Rosen, S. P. Vernon, “Fabrication of high-reflectance Mo-Si multilayer mirrors by planar-magnetron sputtering,” J. Vac. Sci. Technol. A 9, 2662–2669 (1991).
    [CrossRef]
  16. C. Khan-Malek, J. Susini, A. Madouri, M. Ouahabi, R. Rivoira, F. R. Ladan, Y. Lepetre, R. Barchewitz, “Semitransparent soft X-ray multilayer mirrors,” Opt. Eng. 29, 597–602 (1990).
    [CrossRef]
  17. S. Hubert, Ph. Zeitoun, É. Béchir, D. Benredjem, F. Bridou, A. Calisti, F. Delmotte, M. Idir, G. de Lachèze-Murel, S. Le Pape, M. F. Ravet, D. Ros, L. Vanbostal, S. Hubert, “Line shape measurement of a Ni-like silver X-ray laser by mean of soft X-ray Fourier-transform spectroscopy,” submitted to Phys. Rev. A.

1995 (2)

L. B. Da Silva, T. W. Barbee, R. Cauble, P. Celliers, D. Ciarlo, S. Libby, R. A. London, D. Matthews, S. Mrowka, J. C. Moreno, D. Ress, J. E. Trebes, A. S. Wan, F. Weber, “Electron density measurements of high density plasmas using soft X-ray laser interferometry,” Phys. Rev. Lett. 74, 3991–3994 (1995).
[CrossRef] [PubMed]

P. Celliers, F. Weber, L. B. Da Silva, T. W. Barbee, R. Cauble, A. S. Wan, J. C. Moreno, “Fringe formation and coherence of a soft-x-ray laser beam illuminating a Mach-Zehnder interferometer,” Opt. Lett. 20, 1907–1909 (1995).
[CrossRef] [PubMed]

1994 (1)

1993 (3)

1992 (1)

M. K. Prasad, K. G. Estabrook, J. A. Harte, R. S. Craxton, R. A. Bosch, G. E. Busch, J. S. Kollin, “Holographic interferograms from laser fusion code simulations,” Phys. Fluids B 4, 1569–1575 (1992).
[CrossRef]

1991 (1)

D. G. Steams, R. S. Rosen, S. P. Vernon, “Fabrication of high-reflectance Mo-Si multilayer mirrors by planar-magnetron sputtering,” J. Vac. Sci. Technol. A 9, 2662–2669 (1991).
[CrossRef]

1990 (2)

C. Khan-Malek, J. Susini, A. Madouri, M. Ouahabi, R. Rivoira, F. R. Ladan, Y. Lepetre, R. Barchewitz, “Semitransparent soft X-ray multilayer mirrors,” Opt. Eng. 29, 597–602 (1990).
[CrossRef]

F. Bridou, B. Pardo, “Automatic characterization of layers stacks from reflectivity measurements. Application to the study of the validity conditions of the grazing X-rays reflectometry,” J. Opt. (Paris) 21, 183–191 (1990).
[CrossRef]

1989 (2)

K. Holloway, K. Ba Do, R. Sinclair, “Interfacial reactions on annealing molybdenum-silicon multilayers,” J. Appl. Phys. 65, 474–80 (1989).
[CrossRef]

N. M. Ceglio, “Revolution in X-ray optics,” J. X-Ray Sci. Technol. 1, 7–78 (1989).
[CrossRef]

1986 (1)

G. Charatis, G. E. Busch, C. L. Shepard, P. M. Campbell, M. D. Rosen, “Hydrodynamic aspects of selenium x-ray laser targets,” J. Phys. C 6, 89–98 (1986).

Ba Do, K.

K. Holloway, K. Ba Do, R. Sinclair, “Interfacial reactions on annealing molybdenum-silicon multilayers,” J. Appl. Phys. 65, 474–80 (1989).
[CrossRef]

Barbee, T. W.

L. B. Da Silva, T. W. Barbee, R. Cauble, P. Celliers, D. Ciarlo, S. Libby, R. A. London, D. Matthews, S. Mrowka, J. C. Moreno, D. Ress, J. E. Trebes, A. S. Wan, F. Weber, “Electron density measurements of high density plasmas using soft X-ray laser interferometry,” Phys. Rev. Lett. 74, 3991–3994 (1995).
[CrossRef] [PubMed]

P. Celliers, F. Weber, L. B. Da Silva, T. W. Barbee, R. Cauble, A. S. Wan, J. C. Moreno, “Fringe formation and coherence of a soft-x-ray laser beam illuminating a Mach-Zehnder interferometer,” Opt. Lett. 20, 1907–1909 (1995).
[CrossRef] [PubMed]

T. W. Barbee, J. C. Rife, W. R. Hunter, M. P. Kowalski, R. G. Cruddace, J. F. Seely, “Long-term stability of a Mo/Si multilayer structure,” Appl. Opt. 32, 4852–4854 (1993).
[CrossRef] [PubMed]

Barchewitz, R.

C. Khan-Malek, J. Susini, A. Madouri, M. Ouahabi, R. Rivoira, F. R. Ladan, Y. Lepetre, R. Barchewitz, “Semitransparent soft X-ray multilayer mirrors,” Opt. Eng. 29, 597–602 (1990).
[CrossRef]

Béchir, É.

S. Hubert, Ph. Zeitoun, É. Béchir, D. Benredjem, F. Bridou, A. Calisti, F. Delmotte, M. Idir, G. de Lachèze-Murel, S. Le Pape, M. F. Ravet, D. Ros, L. Vanbostal, S. Hubert, “Line shape measurement of a Ni-like silver X-ray laser by mean of soft X-ray Fourier-transform spectroscopy,” submitted to Phys. Rev. A.

Benredjem, D.

S. Hubert, Ph. Zeitoun, É. Béchir, D. Benredjem, F. Bridou, A. Calisti, F. Delmotte, M. Idir, G. de Lachèze-Murel, S. Le Pape, M. F. Ravet, D. Ros, L. Vanbostal, S. Hubert, “Line shape measurement of a Ni-like silver X-ray laser by mean of soft X-ray Fourier-transform spectroscopy,” submitted to Phys. Rev. A.

Bosch, R. A.

M. K. Prasad, K. G. Estabrook, J. A. Harte, R. S. Craxton, R. A. Bosch, G. E. Busch, J. S. Kollin, “Holographic interferograms from laser fusion code simulations,” Phys. Fluids B 4, 1569–1575 (1992).
[CrossRef]

Bridou, F.

F. Bridou, B. Pardo, “Automatic characterization of layers stacks from reflectivity measurements. Application to the study of the validity conditions of the grazing X-rays reflectometry,” J. Opt. (Paris) 21, 183–191 (1990).
[CrossRef]

S. Hubert, Ph. Zeitoun, É. Béchir, D. Benredjem, F. Bridou, A. Calisti, F. Delmotte, M. Idir, G. de Lachèze-Murel, S. Le Pape, M. F. Ravet, D. Ros, L. Vanbostal, S. Hubert, “Line shape measurement of a Ni-like silver X-ray laser by mean of soft X-ray Fourier-transform spectroscopy,” submitted to Phys. Rev. A.

Busch, G. E.

M. K. Prasad, K. G. Estabrook, J. A. Harte, R. S. Craxton, R. A. Bosch, G. E. Busch, J. S. Kollin, “Holographic interferograms from laser fusion code simulations,” Phys. Fluids B 4, 1569–1575 (1992).
[CrossRef]

G. Charatis, G. E. Busch, C. L. Shepard, P. M. Campbell, M. D. Rosen, “Hydrodynamic aspects of selenium x-ray laser targets,” J. Phys. C 6, 89–98 (1986).

Bush, B. C.

Calisti, A.

S. Hubert, Ph. Zeitoun, É. Béchir, D. Benredjem, F. Bridou, A. Calisti, F. Delmotte, M. Idir, G. de Lachèze-Murel, S. Le Pape, M. F. Ravet, D. Ros, L. Vanbostal, S. Hubert, “Line shape measurement of a Ni-like silver X-ray laser by mean of soft X-ray Fourier-transform spectroscopy,” submitted to Phys. Rev. A.

Campbell, P. M.

G. Charatis, G. E. Busch, C. L. Shepard, P. M. Campbell, M. D. Rosen, “Hydrodynamic aspects of selenium x-ray laser targets,” J. Phys. C 6, 89–98 (1986).

Cauble, R.

P. Celliers, F. Weber, L. B. Da Silva, T. W. Barbee, R. Cauble, A. S. Wan, J. C. Moreno, “Fringe formation and coherence of a soft-x-ray laser beam illuminating a Mach-Zehnder interferometer,” Opt. Lett. 20, 1907–1909 (1995).
[CrossRef] [PubMed]

L. B. Da Silva, T. W. Barbee, R. Cauble, P. Celliers, D. Ciarlo, S. Libby, R. A. London, D. Matthews, S. Mrowka, J. C. Moreno, D. Ress, J. E. Trebes, A. S. Wan, F. Weber, “Electron density measurements of high density plasmas using soft X-ray laser interferometry,” Phys. Rev. Lett. 74, 3991–3994 (1995).
[CrossRef] [PubMed]

Ceglio, N. M.

N. M. Ceglio, “Revolution in X-ray optics,” J. X-Ray Sci. Technol. 1, 7–78 (1989).
[CrossRef]

D. G. Stearns, N. M. Ceglio, A. M. Hawryluk, M. B. Stearns, A. K. Petford-Long, C. H. Chang, K. Danzmann, M. Kuhne, P. Muller, B. Wende, “TEM and X-ray analysis of multilayer mirrors and beamsplitters,” in Multilayer Structures and Laboratory X-Ray Laser Research, N. M. Ceglio, P. Dhez, eds., Proc. SPIE688, 91–98 (1987).
[CrossRef]

Celliers, P.

L. B. Da Silva, T. W. Barbee, R. Cauble, P. Celliers, D. Ciarlo, S. Libby, R. A. London, D. Matthews, S. Mrowka, J. C. Moreno, D. Ress, J. E. Trebes, A. S. Wan, F. Weber, “Electron density measurements of high density plasmas using soft X-ray laser interferometry,” Phys. Rev. Lett. 74, 3991–3994 (1995).
[CrossRef] [PubMed]

P. Celliers, F. Weber, L. B. Da Silva, T. W. Barbee, R. Cauble, A. S. Wan, J. C. Moreno, “Fringe formation and coherence of a soft-x-ray laser beam illuminating a Mach-Zehnder interferometer,” Opt. Lett. 20, 1907–1909 (1995).
[CrossRef] [PubMed]

Chakrabarti, S.

Chang, C. H.

D. G. Stearns, N. M. Ceglio, A. M. Hawryluk, M. B. Stearns, A. K. Petford-Long, C. H. Chang, K. Danzmann, M. Kuhne, P. Muller, B. Wende, “TEM and X-ray analysis of multilayer mirrors and beamsplitters,” in Multilayer Structures and Laboratory X-Ray Laser Research, N. M. Ceglio, P. Dhez, eds., Proc. SPIE688, 91–98 (1987).
[CrossRef]

Charatis, G.

G. Charatis, G. E. Busch, C. L. Shepard, P. M. Campbell, M. D. Rosen, “Hydrodynamic aspects of selenium x-ray laser targets,” J. Phys. C 6, 89–98 (1986).

Ciarlo, D.

L. B. Da Silva, T. W. Barbee, R. Cauble, P. Celliers, D. Ciarlo, S. Libby, R. A. London, D. Matthews, S. Mrowka, J. C. Moreno, D. Ress, J. E. Trebes, A. S. Wan, F. Weber, “Electron density measurements of high density plasmas using soft X-ray laser interferometry,” Phys. Rev. Lett. 74, 3991–3994 (1995).
[CrossRef] [PubMed]

Cotton, D. M.

Craxton, R. S.

M. K. Prasad, K. G. Estabrook, J. A. Harte, R. S. Craxton, R. A. Bosch, G. E. Busch, J. S. Kollin, “Holographic interferograms from laser fusion code simulations,” Phys. Fluids B 4, 1569–1575 (1992).
[CrossRef]

Cruddace, R. G.

Da Silva, L. B.

L. B. Da Silva, T. W. Barbee, R. Cauble, P. Celliers, D. Ciarlo, S. Libby, R. A. London, D. Matthews, S. Mrowka, J. C. Moreno, D. Ress, J. E. Trebes, A. S. Wan, F. Weber, “Electron density measurements of high density plasmas using soft X-ray laser interferometry,” Phys. Rev. Lett. 74, 3991–3994 (1995).
[CrossRef] [PubMed]

P. Celliers, F. Weber, L. B. Da Silva, T. W. Barbee, R. Cauble, A. S. Wan, J. C. Moreno, “Fringe formation and coherence of a soft-x-ray laser beam illuminating a Mach-Zehnder interferometer,” Opt. Lett. 20, 1907–1909 (1995).
[CrossRef] [PubMed]

Danzmann, K.

D. G. Stearns, N. M. Ceglio, A. M. Hawryluk, M. B. Stearns, A. K. Petford-Long, C. H. Chang, K. Danzmann, M. Kuhne, P. Muller, B. Wende, “TEM and X-ray analysis of multilayer mirrors and beamsplitters,” in Multilayer Structures and Laboratory X-Ray Laser Research, N. M. Ceglio, P. Dhez, eds., Proc. SPIE688, 91–98 (1987).
[CrossRef]

Davis, J. C.

B. L. Henke, E. M. Gullikson, J. C. Davis, “X-ray interactions: photoabsorption, scattering, transmission, and reflection at E = 50-30000 eV, Z = 1-92,” At. Data Nucl. Data Tables 54, 181–342 (1993) or http://www-cxro.lbl.gov .

de Lachèze-Murel, G.

S. Hubert, Ph. Zeitoun, É. Béchir, D. Benredjem, F. Bridou, A. Calisti, F. Delmotte, M. Idir, G. de Lachèze-Murel, S. Le Pape, M. F. Ravet, D. Ros, L. Vanbostal, S. Hubert, “Line shape measurement of a Ni-like silver X-ray laser by mean of soft X-ray Fourier-transform spectroscopy,” submitted to Phys. Rev. A.

Delmotte, F.

S. Hubert, Ph. Zeitoun, É. Béchir, D. Benredjem, F. Bridou, A. Calisti, F. Delmotte, M. Idir, G. de Lachèze-Murel, S. Le Pape, M. F. Ravet, D. Ros, L. Vanbostal, S. Hubert, “Line shape measurement of a Ni-like silver X-ray laser by mean of soft X-ray Fourier-transform spectroscopy,” submitted to Phys. Rev. A.

Estabrook, K. G.

M. K. Prasad, K. G. Estabrook, J. A. Harte, R. S. Craxton, R. A. Bosch, G. E. Busch, J. S. Kollin, “Holographic interferograms from laser fusion code simulations,” Phys. Fluids B 4, 1569–1575 (1992).
[CrossRef]

Gullikson, E. M.

B. L. Henke, E. M. Gullikson, J. C. Davis, “X-ray interactions: photoabsorption, scattering, transmission, and reflection at E = 50-30000 eV, Z = 1-92,” At. Data Nucl. Data Tables 54, 181–342 (1993) or http://www-cxro.lbl.gov .

Haga, T.

T. Haga, M. C. K. Tinene, A. Ozawa, Y. Utsumi, S. Itabashi, T. Ohkubo, M. Shimada, “Fabrication of semitransparent multilayer polarizer and its application to soft x-ray ellipsometer,” in Ultraviolet and X-Ray Detection, Spectroscopy, and Polarimetry III, S. Fineschi, B. E. Woodgate, R. A. Kimble, eds., Proc. SPIE3764, 13–27 (1999).
[CrossRef]

Harte, J. A.

M. K. Prasad, K. G. Estabrook, J. A. Harte, R. S. Craxton, R. A. Bosch, G. E. Busch, J. S. Kollin, “Holographic interferograms from laser fusion code simulations,” Phys. Fluids B 4, 1569–1575 (1992).
[CrossRef]

Hawryluk, A. M.

D. G. Stearns, N. M. Ceglio, A. M. Hawryluk, M. B. Stearns, A. K. Petford-Long, C. H. Chang, K. Danzmann, M. Kuhne, P. Muller, B. Wende, “TEM and X-ray analysis of multilayer mirrors and beamsplitters,” in Multilayer Structures and Laboratory X-Ray Laser Research, N. M. Ceglio, P. Dhez, eds., Proc. SPIE688, 91–98 (1987).
[CrossRef]

Hayashida, M.

S. Ogura, M. Niibe, Y. Watanabe, M. Hayashida, T. Iizuka, “Comparison among multilayer soft X-ray mirrors fabricated by electron beam, DC-, RF-magnetron sputtering and ion beam sputtering deposition,” in X-Ray Multilayers for Diffractometers, Monochromators, and Spectrometers, F. E. Christensen, ed., Proc. SPIE984, 140–148 (1988).
[CrossRef]

Henke, B. L.

B. L. Henke, E. M. Gullikson, J. C. Davis, “X-ray interactions: photoabsorption, scattering, transmission, and reflection at E = 50-30000 eV, Z = 1-92,” At. Data Nucl. Data Tables 54, 181–342 (1993) or http://www-cxro.lbl.gov .

Holloway, K.

K. Holloway, K. Ba Do, R. Sinclair, “Interfacial reactions on annealing molybdenum-silicon multilayers,” J. Appl. Phys. 65, 474–80 (1989).
[CrossRef]

Hubert, S.

S. Hubert, Ph. Zeitoun, É. Béchir, D. Benredjem, F. Bridou, A. Calisti, F. Delmotte, M. Idir, G. de Lachèze-Murel, S. Le Pape, M. F. Ravet, D. Ros, L. Vanbostal, S. Hubert, “Line shape measurement of a Ni-like silver X-ray laser by mean of soft X-ray Fourier-transform spectroscopy,” submitted to Phys. Rev. A.

S. Hubert, Ph. Zeitoun, É. Béchir, D. Benredjem, F. Bridou, A. Calisti, F. Delmotte, M. Idir, G. de Lachèze-Murel, S. Le Pape, M. F. Ravet, D. Ros, L. Vanbostal, S. Hubert, “Line shape measurement of a Ni-like silver X-ray laser by mean of soft X-ray Fourier-transform spectroscopy,” submitted to Phys. Rev. A.

Hunter, W. R.

Idir, M.

S. Hubert, Ph. Zeitoun, É. Béchir, D. Benredjem, F. Bridou, A. Calisti, F. Delmotte, M. Idir, G. de Lachèze-Murel, S. Le Pape, M. F. Ravet, D. Ros, L. Vanbostal, S. Hubert, “Line shape measurement of a Ni-like silver X-ray laser by mean of soft X-ray Fourier-transform spectroscopy,” submitted to Phys. Rev. A.

Iizuka, T.

S. Ogura, M. Niibe, Y. Watanabe, M. Hayashida, T. Iizuka, “Comparison among multilayer soft X-ray mirrors fabricated by electron beam, DC-, RF-magnetron sputtering and ion beam sputtering deposition,” in X-Ray Multilayers for Diffractometers, Monochromators, and Spectrometers, F. E. Christensen, ed., Proc. SPIE984, 140–148 (1988).
[CrossRef]

Itabashi, S.

T. Haga, M. C. K. Tinene, A. Ozawa, Y. Utsumi, S. Itabashi, T. Ohkubo, M. Shimada, “Fabrication of semitransparent multilayer polarizer and its application to soft x-ray ellipsometer,” in Ultraviolet and X-Ray Detection, Spectroscopy, and Polarimetry III, S. Fineschi, B. E. Woodgate, R. A. Kimble, eds., Proc. SPIE3764, 13–27 (1999).
[CrossRef]

Joyeux, D.

Khan-Malek, C.

C. Khan-Malek, J. Susini, A. Madouri, M. Ouahabi, R. Rivoira, F. R. Ladan, Y. Lepetre, R. Barchewitz, “Semitransparent soft X-ray multilayer mirrors,” Opt. Eng. 29, 597–602 (1990).
[CrossRef]

Kollin, J. S.

M. K. Prasad, K. G. Estabrook, J. A. Harte, R. S. Craxton, R. A. Bosch, G. E. Busch, J. S. Kollin, “Holographic interferograms from laser fusion code simulations,” Phys. Fluids B 4, 1569–1575 (1992).
[CrossRef]

Kowalski, M. P.

Kuhne, M.

D. G. Stearns, N. M. Ceglio, A. M. Hawryluk, M. B. Stearns, A. K. Petford-Long, C. H. Chang, K. Danzmann, M. Kuhne, P. Muller, B. Wende, “TEM and X-ray analysis of multilayer mirrors and beamsplitters,” in Multilayer Structures and Laboratory X-Ray Laser Research, N. M. Ceglio, P. Dhez, eds., Proc. SPIE688, 91–98 (1987).
[CrossRef]

Ladan, F. R.

C. Khan-Malek, J. Susini, A. Madouri, M. Ouahabi, R. Rivoira, F. R. Ladan, Y. Lepetre, R. Barchewitz, “Semitransparent soft X-ray multilayer mirrors,” Opt. Eng. 29, 597–602 (1990).
[CrossRef]

Le Pape, S.

S. Hubert, Ph. Zeitoun, É. Béchir, D. Benredjem, F. Bridou, A. Calisti, F. Delmotte, M. Idir, G. de Lachèze-Murel, S. Le Pape, M. F. Ravet, D. Ros, L. Vanbostal, S. Hubert, “Line shape measurement of a Ni-like silver X-ray laser by mean of soft X-ray Fourier-transform spectroscopy,” submitted to Phys. Rev. A.

Lepetre, Y.

C. Khan-Malek, J. Susini, A. Madouri, M. Ouahabi, R. Rivoira, F. R. Ladan, Y. Lepetre, R. Barchewitz, “Semitransparent soft X-ray multilayer mirrors,” Opt. Eng. 29, 597–602 (1990).
[CrossRef]

Libby, S.

L. B. Da Silva, T. W. Barbee, R. Cauble, P. Celliers, D. Ciarlo, S. Libby, R. A. London, D. Matthews, S. Mrowka, J. C. Moreno, D. Ress, J. E. Trebes, A. S. Wan, F. Weber, “Electron density measurements of high density plasmas using soft X-ray laser interferometry,” Phys. Rev. Lett. 74, 3991–3994 (1995).
[CrossRef] [PubMed]

London, R. A.

L. B. Da Silva, T. W. Barbee, R. Cauble, P. Celliers, D. Ciarlo, S. Libby, R. A. London, D. Matthews, S. Mrowka, J. C. Moreno, D. Ress, J. E. Trebes, A. S. Wan, F. Weber, “Electron density measurements of high density plasmas using soft X-ray laser interferometry,” Phys. Rev. Lett. 74, 3991–3994 (1995).
[CrossRef] [PubMed]

Madouri, A.

C. Khan-Malek, J. Susini, A. Madouri, M. Ouahabi, R. Rivoira, F. R. Ladan, Y. Lepetre, R. Barchewitz, “Semitransparent soft X-ray multilayer mirrors,” Opt. Eng. 29, 597–602 (1990).
[CrossRef]

Matthews, D.

L. B. Da Silva, T. W. Barbee, R. Cauble, P. Celliers, D. Ciarlo, S. Libby, R. A. London, D. Matthews, S. Mrowka, J. C. Moreno, D. Ress, J. E. Trebes, A. S. Wan, F. Weber, “Electron density measurements of high density plasmas using soft X-ray laser interferometry,” Phys. Rev. Lett. 74, 3991–3994 (1995).
[CrossRef] [PubMed]

Moreno, J. C.

L. B. Da Silva, T. W. Barbee, R. Cauble, P. Celliers, D. Ciarlo, S. Libby, R. A. London, D. Matthews, S. Mrowka, J. C. Moreno, D. Ress, J. E. Trebes, A. S. Wan, F. Weber, “Electron density measurements of high density plasmas using soft X-ray laser interferometry,” Phys. Rev. Lett. 74, 3991–3994 (1995).
[CrossRef] [PubMed]

P. Celliers, F. Weber, L. B. Da Silva, T. W. Barbee, R. Cauble, A. S. Wan, J. C. Moreno, “Fringe formation and coherence of a soft-x-ray laser beam illuminating a Mach-Zehnder interferometer,” Opt. Lett. 20, 1907–1909 (1995).
[CrossRef] [PubMed]

Mrowka, S.

L. B. Da Silva, T. W. Barbee, R. Cauble, P. Celliers, D. Ciarlo, S. Libby, R. A. London, D. Matthews, S. Mrowka, J. C. Moreno, D. Ress, J. E. Trebes, A. S. Wan, F. Weber, “Electron density measurements of high density plasmas using soft X-ray laser interferometry,” Phys. Rev. Lett. 74, 3991–3994 (1995).
[CrossRef] [PubMed]

Muller, P.

D. G. Stearns, N. M. Ceglio, A. M. Hawryluk, M. B. Stearns, A. K. Petford-Long, C. H. Chang, K. Danzmann, M. Kuhne, P. Muller, B. Wende, “TEM and X-ray analysis of multilayer mirrors and beamsplitters,” in Multilayer Structures and Laboratory X-Ray Laser Research, N. M. Ceglio, P. Dhez, eds., Proc. SPIE688, 91–98 (1987).
[CrossRef]

Niibe, M.

S. Ogura, M. Niibe, Y. Watanabe, M. Hayashida, T. Iizuka, “Comparison among multilayer soft X-ray mirrors fabricated by electron beam, DC-, RF-magnetron sputtering and ion beam sputtering deposition,” in X-Ray Multilayers for Diffractometers, Monochromators, and Spectrometers, F. E. Christensen, ed., Proc. SPIE984, 140–148 (1988).
[CrossRef]

Ogura, S.

S. Ogura, M. Niibe, Y. Watanabe, M. Hayashida, T. Iizuka, “Comparison among multilayer soft X-ray mirrors fabricated by electron beam, DC-, RF-magnetron sputtering and ion beam sputtering deposition,” in X-Ray Multilayers for Diffractometers, Monochromators, and Spectrometers, F. E. Christensen, ed., Proc. SPIE984, 140–148 (1988).
[CrossRef]

Ohkubo, T.

T. Haga, M. C. K. Tinene, A. Ozawa, Y. Utsumi, S. Itabashi, T. Ohkubo, M. Shimada, “Fabrication of semitransparent multilayer polarizer and its application to soft x-ray ellipsometer,” in Ultraviolet and X-Ray Detection, Spectroscopy, and Polarimetry III, S. Fineschi, B. E. Woodgate, R. A. Kimble, eds., Proc. SPIE3764, 13–27 (1999).
[CrossRef]

Ouahabi, M.

C. Khan-Malek, J. Susini, A. Madouri, M. Ouahabi, R. Rivoira, F. R. Ladan, Y. Lepetre, R. Barchewitz, “Semitransparent soft X-ray multilayer mirrors,” Opt. Eng. 29, 597–602 (1990).
[CrossRef]

Ozawa, A.

T. Haga, M. C. K. Tinene, A. Ozawa, Y. Utsumi, S. Itabashi, T. Ohkubo, M. Shimada, “Fabrication of semitransparent multilayer polarizer and its application to soft x-ray ellipsometer,” in Ultraviolet and X-Ray Detection, Spectroscopy, and Polarimetry III, S. Fineschi, B. E. Woodgate, R. A. Kimble, eds., Proc. SPIE3764, 13–27 (1999).
[CrossRef]

Pardo, B.

F. Bridou, B. Pardo, “Automatic characterization of layers stacks from reflectivity measurements. Application to the study of the validity conditions of the grazing X-rays reflectometry,” J. Opt. (Paris) 21, 183–191 (1990).
[CrossRef]

Petford-Long, A. K.

D. G. Stearns, N. M. Ceglio, A. M. Hawryluk, M. B. Stearns, A. K. Petford-Long, C. H. Chang, K. Danzmann, M. Kuhne, P. Muller, B. Wende, “TEM and X-ray analysis of multilayer mirrors and beamsplitters,” in Multilayer Structures and Laboratory X-Ray Laser Research, N. M. Ceglio, P. Dhez, eds., Proc. SPIE688, 91–98 (1987).
[CrossRef]

Phalippou, D.

Polack, F.

Prasad, M. K.

M. K. Prasad, K. G. Estabrook, J. A. Harte, R. S. Craxton, R. A. Bosch, G. E. Busch, J. S. Kollin, “Holographic interferograms from laser fusion code simulations,” Phys. Fluids B 4, 1569–1575 (1992).
[CrossRef]

Ravet, M. F.

S. Hubert, Ph. Zeitoun, É. Béchir, D. Benredjem, F. Bridou, A. Calisti, F. Delmotte, M. Idir, G. de Lachèze-Murel, S. Le Pape, M. F. Ravet, D. Ros, L. Vanbostal, S. Hubert, “Line shape measurement of a Ni-like silver X-ray laser by mean of soft X-ray Fourier-transform spectroscopy,” submitted to Phys. Rev. A.

Ress, D.

L. B. Da Silva, T. W. Barbee, R. Cauble, P. Celliers, D. Ciarlo, S. Libby, R. A. London, D. Matthews, S. Mrowka, J. C. Moreno, D. Ress, J. E. Trebes, A. S. Wan, F. Weber, “Electron density measurements of high density plasmas using soft X-ray laser interferometry,” Phys. Rev. Lett. 74, 3991–3994 (1995).
[CrossRef] [PubMed]

Rife, J. C.

Rivoira, R.

C. Khan-Malek, J. Susini, A. Madouri, M. Ouahabi, R. Rivoira, F. R. Ladan, Y. Lepetre, R. Barchewitz, “Semitransparent soft X-ray multilayer mirrors,” Opt. Eng. 29, 597–602 (1990).
[CrossRef]

Ros, D.

S. Hubert, Ph. Zeitoun, É. Béchir, D. Benredjem, F. Bridou, A. Calisti, F. Delmotte, M. Idir, G. de Lachèze-Murel, S. Le Pape, M. F. Ravet, D. Ros, L. Vanbostal, S. Hubert, “Line shape measurement of a Ni-like silver X-ray laser by mean of soft X-ray Fourier-transform spectroscopy,” submitted to Phys. Rev. A.

Rosen, M. D.

G. Charatis, G. E. Busch, C. L. Shepard, P. M. Campbell, M. D. Rosen, “Hydrodynamic aspects of selenium x-ray laser targets,” J. Phys. C 6, 89–98 (1986).

Rosen, R. S.

D. G. Steams, R. S. Rosen, S. P. Vernon, “Fabrication of high-reflectance Mo-Si multilayer mirrors by planar-magnetron sputtering,” J. Vac. Sci. Technol. A 9, 2662–2669 (1991).
[CrossRef]

Seely, J. F.

Shepard, C. L.

G. Charatis, G. E. Busch, C. L. Shepard, P. M. Campbell, M. D. Rosen, “Hydrodynamic aspects of selenium x-ray laser targets,” J. Phys. C 6, 89–98 (1986).

Shimada, M.

T. Haga, M. C. K. Tinene, A. Ozawa, Y. Utsumi, S. Itabashi, T. Ohkubo, M. Shimada, “Fabrication of semitransparent multilayer polarizer and its application to soft x-ray ellipsometer,” in Ultraviolet and X-Ray Detection, Spectroscopy, and Polarimetry III, S. Fineschi, B. E. Woodgate, R. A. Kimble, eds., Proc. SPIE3764, 13–27 (1999).
[CrossRef]

Sinclair, R.

K. Holloway, K. Ba Do, R. Sinclair, “Interfacial reactions on annealing molybdenum-silicon multilayers,” J. Appl. Phys. 65, 474–80 (1989).
[CrossRef]

Steams, D. G.

D. G. Steams, R. S. Rosen, S. P. Vernon, “Fabrication of high-reflectance Mo-Si multilayer mirrors by planar-magnetron sputtering,” J. Vac. Sci. Technol. A 9, 2662–2669 (1991).
[CrossRef]

Stearns, D. G.

D. G. Stearns, N. M. Ceglio, A. M. Hawryluk, M. B. Stearns, A. K. Petford-Long, C. H. Chang, K. Danzmann, M. Kuhne, P. Muller, B. Wende, “TEM and X-ray analysis of multilayer mirrors and beamsplitters,” in Multilayer Structures and Laboratory X-Ray Laser Research, N. M. Ceglio, P. Dhez, eds., Proc. SPIE688, 91–98 (1987).
[CrossRef]

Stearns, M. B.

D. G. Stearns, N. M. Ceglio, A. M. Hawryluk, M. B. Stearns, A. K. Petford-Long, C. H. Chang, K. Danzmann, M. Kuhne, P. Muller, B. Wende, “TEM and X-ray analysis of multilayer mirrors and beamsplitters,” in Multilayer Structures and Laboratory X-Ray Laser Research, N. M. Ceglio, P. Dhez, eds., Proc. SPIE688, 91–98 (1987).
[CrossRef]

Susini, J.

C. Khan-Malek, J. Susini, A. Madouri, M. Ouahabi, R. Rivoira, F. R. Ladan, Y. Lepetre, R. Barchewitz, “Semitransparent soft X-ray multilayer mirrors,” Opt. Eng. 29, 597–602 (1990).
[CrossRef]

Svatos, J.

Tinene, M. C. K.

T. Haga, M. C. K. Tinene, A. Ozawa, Y. Utsumi, S. Itabashi, T. Ohkubo, M. Shimada, “Fabrication of semitransparent multilayer polarizer and its application to soft x-ray ellipsometer,” in Ultraviolet and X-Ray Detection, Spectroscopy, and Polarimetry III, S. Fineschi, B. E. Woodgate, R. A. Kimble, eds., Proc. SPIE3764, 13–27 (1999).
[CrossRef]

Trebes, J. E.

L. B. Da Silva, T. W. Barbee, R. Cauble, P. Celliers, D. Ciarlo, S. Libby, R. A. London, D. Matthews, S. Mrowka, J. C. Moreno, D. Ress, J. E. Trebes, A. S. Wan, F. Weber, “Electron density measurements of high density plasmas using soft X-ray laser interferometry,” Phys. Rev. Lett. 74, 3991–3994 (1995).
[CrossRef] [PubMed]

Utsumi, Y.

T. Haga, M. C. K. Tinene, A. Ozawa, Y. Utsumi, S. Itabashi, T. Ohkubo, M. Shimada, “Fabrication of semitransparent multilayer polarizer and its application to soft x-ray ellipsometer,” in Ultraviolet and X-Ray Detection, Spectroscopy, and Polarimetry III, S. Fineschi, B. E. Woodgate, R. A. Kimble, eds., Proc. SPIE3764, 13–27 (1999).
[CrossRef]

Vanbostal, L.

S. Hubert, Ph. Zeitoun, É. Béchir, D. Benredjem, F. Bridou, A. Calisti, F. Delmotte, M. Idir, G. de Lachèze-Murel, S. Le Pape, M. F. Ravet, D. Ros, L. Vanbostal, S. Hubert, “Line shape measurement of a Ni-like silver X-ray laser by mean of soft X-ray Fourier-transform spectroscopy,” submitted to Phys. Rev. A.

Vernon, S. P.

D. G. Steams, R. S. Rosen, S. P. Vernon, “Fabrication of high-reflectance Mo-Si multilayer mirrors by planar-magnetron sputtering,” J. Vac. Sci. Technol. A 9, 2662–2669 (1991).
[CrossRef]

Vickers, J. S.

Wan, A. S.

L. B. Da Silva, T. W. Barbee, R. Cauble, P. Celliers, D. Ciarlo, S. Libby, R. A. London, D. Matthews, S. Mrowka, J. C. Moreno, D. Ress, J. E. Trebes, A. S. Wan, F. Weber, “Electron density measurements of high density plasmas using soft X-ray laser interferometry,” Phys. Rev. Lett. 74, 3991–3994 (1995).
[CrossRef] [PubMed]

P. Celliers, F. Weber, L. B. Da Silva, T. W. Barbee, R. Cauble, A. S. Wan, J. C. Moreno, “Fringe formation and coherence of a soft-x-ray laser beam illuminating a Mach-Zehnder interferometer,” Opt. Lett. 20, 1907–1909 (1995).
[CrossRef] [PubMed]

Watanabe, Y.

S. Ogura, M. Niibe, Y. Watanabe, M. Hayashida, T. Iizuka, “Comparison among multilayer soft X-ray mirrors fabricated by electron beam, DC-, RF-magnetron sputtering and ion beam sputtering deposition,” in X-Ray Multilayers for Diffractometers, Monochromators, and Spectrometers, F. E. Christensen, ed., Proc. SPIE984, 140–148 (1988).
[CrossRef]

Weber, F.

P. Celliers, F. Weber, L. B. Da Silva, T. W. Barbee, R. Cauble, A. S. Wan, J. C. Moreno, “Fringe formation and coherence of a soft-x-ray laser beam illuminating a Mach-Zehnder interferometer,” Opt. Lett. 20, 1907–1909 (1995).
[CrossRef] [PubMed]

L. B. Da Silva, T. W. Barbee, R. Cauble, P. Celliers, D. Ciarlo, S. Libby, R. A. London, D. Matthews, S. Mrowka, J. C. Moreno, D. Ress, J. E. Trebes, A. S. Wan, F. Weber, “Electron density measurements of high density plasmas using soft X-ray laser interferometry,” Phys. Rev. Lett. 74, 3991–3994 (1995).
[CrossRef] [PubMed]

Wende, B.

D. G. Stearns, N. M. Ceglio, A. M. Hawryluk, M. B. Stearns, A. K. Petford-Long, C. H. Chang, K. Danzmann, M. Kuhne, P. Muller, B. Wende, “TEM and X-ray analysis of multilayer mirrors and beamsplitters,” in Multilayer Structures and Laboratory X-Ray Laser Research, N. M. Ceglio, P. Dhez, eds., Proc. SPIE688, 91–98 (1987).
[CrossRef]

Zeitoun, Ph.

S. Hubert, Ph. Zeitoun, É. Béchir, D. Benredjem, F. Bridou, A. Calisti, F. Delmotte, M. Idir, G. de Lachèze-Murel, S. Le Pape, M. F. Ravet, D. Ros, L. Vanbostal, S. Hubert, “Line shape measurement of a Ni-like silver X-ray laser by mean of soft X-ray Fourier-transform spectroscopy,” submitted to Phys. Rev. A.

Appl. Opt. (2)

At. Data Nucl. Data Tables (1)

B. L. Henke, E. M. Gullikson, J. C. Davis, “X-ray interactions: photoabsorption, scattering, transmission, and reflection at E = 50-30000 eV, Z = 1-92,” At. Data Nucl. Data Tables 54, 181–342 (1993) or http://www-cxro.lbl.gov .

J. Appl. Phys. (1)

K. Holloway, K. Ba Do, R. Sinclair, “Interfacial reactions on annealing molybdenum-silicon multilayers,” J. Appl. Phys. 65, 474–80 (1989).
[CrossRef]

J. Opt. (Paris) (1)

F. Bridou, B. Pardo, “Automatic characterization of layers stacks from reflectivity measurements. Application to the study of the validity conditions of the grazing X-rays reflectometry,” J. Opt. (Paris) 21, 183–191 (1990).
[CrossRef]

J. Phys. C (1)

G. Charatis, G. E. Busch, C. L. Shepard, P. M. Campbell, M. D. Rosen, “Hydrodynamic aspects of selenium x-ray laser targets,” J. Phys. C 6, 89–98 (1986).

J. Vac. Sci. Technol. A (1)

D. G. Steams, R. S. Rosen, S. P. Vernon, “Fabrication of high-reflectance Mo-Si multilayer mirrors by planar-magnetron sputtering,” J. Vac. Sci. Technol. A 9, 2662–2669 (1991).
[CrossRef]

J. X-Ray Sci. Technol. (1)

N. M. Ceglio, “Revolution in X-ray optics,” J. X-Ray Sci. Technol. 1, 7–78 (1989).
[CrossRef]

Opt. Eng. (1)

C. Khan-Malek, J. Susini, A. Madouri, M. Ouahabi, R. Rivoira, F. R. Ladan, Y. Lepetre, R. Barchewitz, “Semitransparent soft X-ray multilayer mirrors,” Opt. Eng. 29, 597–602 (1990).
[CrossRef]

Opt. Lett. (2)

Phys. Fluids B (1)

M. K. Prasad, K. G. Estabrook, J. A. Harte, R. S. Craxton, R. A. Bosch, G. E. Busch, J. S. Kollin, “Holographic interferograms from laser fusion code simulations,” Phys. Fluids B 4, 1569–1575 (1992).
[CrossRef]

Phys. Rev. Lett. (1)

L. B. Da Silva, T. W. Barbee, R. Cauble, P. Celliers, D. Ciarlo, S. Libby, R. A. London, D. Matthews, S. Mrowka, J. C. Moreno, D. Ress, J. E. Trebes, A. S. Wan, F. Weber, “Electron density measurements of high density plasmas using soft X-ray laser interferometry,” Phys. Rev. Lett. 74, 3991–3994 (1995).
[CrossRef] [PubMed]

Other (4)

S. Ogura, M. Niibe, Y. Watanabe, M. Hayashida, T. Iizuka, “Comparison among multilayer soft X-ray mirrors fabricated by electron beam, DC-, RF-magnetron sputtering and ion beam sputtering deposition,” in X-Ray Multilayers for Diffractometers, Monochromators, and Spectrometers, F. E. Christensen, ed., Proc. SPIE984, 140–148 (1988).
[CrossRef]

D. G. Stearns, N. M. Ceglio, A. M. Hawryluk, M. B. Stearns, A. K. Petford-Long, C. H. Chang, K. Danzmann, M. Kuhne, P. Muller, B. Wende, “TEM and X-ray analysis of multilayer mirrors and beamsplitters,” in Multilayer Structures and Laboratory X-Ray Laser Research, N. M. Ceglio, P. Dhez, eds., Proc. SPIE688, 91–98 (1987).
[CrossRef]

T. Haga, M. C. K. Tinene, A. Ozawa, Y. Utsumi, S. Itabashi, T. Ohkubo, M. Shimada, “Fabrication of semitransparent multilayer polarizer and its application to soft x-ray ellipsometer,” in Ultraviolet and X-Ray Detection, Spectroscopy, and Polarimetry III, S. Fineschi, B. E. Woodgate, R. A. Kimble, eds., Proc. SPIE3764, 13–27 (1999).
[CrossRef]

S. Hubert, Ph. Zeitoun, É. Béchir, D. Benredjem, F. Bridou, A. Calisti, F. Delmotte, M. Idir, G. de Lachèze-Murel, S. Le Pape, M. F. Ravet, D. Ros, L. Vanbostal, S. Hubert, “Line shape measurement of a Ni-like silver X-ray laser by mean of soft X-ray Fourier-transform spectroscopy,” submitted to Phys. Rev. A.

Cited By

OSA participates in CrossRef's Cited-By Linking service. Citing articles from OSA journals and other participating publishers are listed here.

Alert me when this article is cited.


Figures (12)

Fig. 1
Fig. 1

Schematic diagram of the ultrahigh-vacuum deposition system.

Fig. 2
Fig. 2

X-ray grazing-angle reflectometry curve measured at 0.154 nm on a silicon nitride membrane (circles) and fitted curve (solid curve) obtained with a thickness of 88.5 nm and an index δ of 9.6 × 10-6 for the silicon nitride. cps, counts per second.

Fig. 3
Fig. 3

Transmission of the Si3N4 membrane at 45° in the 65–150-eV energy range: Circles represent the experimental values, and the solid curve is the simulated curve for a silicon nitride film with a 88.5-nm thickness and a density of 2.92 g/cm3.

Fig. 4
Fig. 4

Schematic diagram of a both-sides-coated silicon nitride membrane.

Fig. 5
Fig. 5

Variation of the reflectivity-transmission product as a function of the number of Mo-Si periods on each side of the membrane. The relative thickness of Mo in the period (γ) was fixed at 0.25.

Fig. 6
Fig. 6

Simulated reflectivities for a both-sides-coated Si3N4 membrane (curve a) and for a one-side-coated Si3N4 membrane with light coming on the coated side (curve b) or on the uncoated side (curve c).

Fig. 7
Fig. 7

X-ray grazing-angle reflectometry curves: Experimental data measured at 0.154 nm on multilayer-coated float glass sample (circles) and fitted curve (solid curve). (a) and (b) correspond to two different samples deposited in the same condition but not at the same time.

Fig. 8
Fig. 8

TEM and high-resolution TEM pictures of a Mo-Si multilayer.

Fig. 9
Fig. 9

X-ray grazing-angle reflectivity curves: experimental data measured on a both-sides-coated membrane at 0.154 nm (circles) and fitted curve (solid curve).

Fig. 10
Fig. 10

Experimental transmission (a) and reflectivity (b) measured on a both-sides-coated membrane versus x-ray energy. X rays were coming on the front side. The angle of incidence was 45° and the degree of s polarization was approximately 60%. The multilayers have four periods and a period thickness of 10.7 nm.

Fig. 11
Fig. 11

Experimental reflectivities measured on two both-sides-coated membranes versus x-ray energy, with x rays coming on the front side (circles) and on the back side (triangles). The angle of incidence was 45°, and the degree of s polarization was approximately 60%. The multilayers have five periods and a period thickness of 10 nm.

Fig. 12
Fig. 12

Interferogram (screen shot) recorded at 13.9 nm with the Michelson interferometer with a zero-difference path difference.

Tables (3)

Tables Icon

Table 1 Results of the Fit of an X-Ray Grazing-Angle Reflectometry Curve Measured on a Multilayer-Coated Float Glass Samplea

Tables Icon

Table 2 Results of the Fit of an X-Ray Grazing-Angle Reflectometry Curve Measured on a Multilayer-Coated Float Glass Sampleb

Tables Icon

Table 3 Results of the Fit of an X-Ray Grazing-Angle Reflectometry Curve Measured on a Both-Side-Coated Silicon Nitride Membranea, b

Equations (1)

Equations on this page are rendered with MathJax. Learn more.

δSi=7.6×10-6, δMo=28.6×10-6, βSi=0.17×10-6, βMo=1.87×10-6.

Metrics