Abstract

The results of the development of a much simpler optical configuration for the long-trace profiler (LTP) are presented. The current technique employs a cyclic optical configuration to achieve zero optical path difference for the closely spaced, laterally separated laser beams. The accuracy of measurement is found to remain as good as that in the case of the widely used LTP, although the geometrical alignment problem is simplified significantly.

© 2002 Optical Society of America

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