Abstract

A new method for total surface measurement based on reflection ellipsometry is presented. By scanning the surface of the target under test with a focused laser beam, one can measure the surface topography and its material distribution simultaneously with high lateral resolution. Target topography is determined by ellipsometric measurement of local gradient angles γx and γy of the target’s scanned surface elements. To identify the material, one measures the local complex refractive index n, too. The influence of beam focusing on the measurement results is discussed. We describe successful tests with various dielectric and metallic surfaces by use of He-Ne (632-nm) and He-Cd (442-nm) lasers.

© 2002 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
High-precision surface measurement with an automated multiangle low coherence interferometer

Yinan Li, Markus Kästner, and Eduard Reithmeier
Appl. Opt. 54(6) 1232-1240 (2015)

Comprehensive nanostructure and defect analysis using a simple 3D light-scatter sensor

Tobias Herffurth, Sven Schröder, Marcus Trost, Angela Duparré, and Andreas Tünnermann
Appl. Opt. 52(14) 3279-3287 (2013)

Ellipsometry of rough surfaces

T. V. Vorburger and K. C. Ludema
Appl. Opt. 19(4) 561-573 (1980)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (13)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (28)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription