Abstract

Angle-resolved ellipsometry of light scattering is an original technique developed at the Fresnel Institute to identify scattering processes in substrates and multilayers. We extend the investigation because numerous experimental results proved that the technique can be of major interest for analysis of microcomponents and their scattering origins. Surface and bulk effects can be separated in most situations, as well as the oblique growth of materials and the presence of first-order contaminants.

© 2002 Optical Society of America

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