Abstract

High-reflectivity dense multilayer coatings were produced for the ultraviolet spectral region. Thin-film single layers and UV mirrors were deposited by ion plating and plasma ion-assisted deposition high- energetic technologies. Optical characterizations of HfO2 and SiO2 single layers are made. The optical constants obtained for these two materials are presented. HfO2 and SiO2 mirrors with a reflectance of ∼99% near 250 nm are reported.

© 2002 Optical Society of America

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    [CrossRef]
  2. M. Alvisi, S. Scaglione, S. Martelli, A. Rizzo, L. Vasanelli, “Structural and optical modification in HfO2 films related to the momentum parameter transferred by IAD,” Thin Solid Films 354, 19–23 (1999).
    [CrossRef]
  3. A. Zöller, S. Beisswenger, R. Götzelmann, K. Matl, “Plasma ion-assisted deposition: a novel technique for the production of optical coatings,” in Optical Interference Coatings, F. Abeles, ed., Proc. SPIE2253, 394–402 (1994).
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  5. B. J. Pond, R. A. Schmell, C. K. Carniglia, T. Raj, “Comparison of the optical properties of some high-index oxide films prepared by IBS deposition with those of EBD films,” in Laser Induced Damage Optical Materials, H. E. Bennett, D. Milam, A. H. Guenther, B. E. Newman, eds., Natl. Bur. Stand (U.S.) Spec. Publ.752, 410–418 (1987).
  6. A. Bodeman, N. Kaiser, M. R. Kozlowski, E. Pierce, C. J. Stolz, “Comparison between 355-nm and 1064-nm damage of high-grade dielectric mirror coatings,” in 27th Annual Boulder Damage Symposium: Laser-Induced Damage in Optical Materials: 1995, H. E. Bennett, A. H. Guenther, M. R. Kozlowski, B. E. Newnam, E. Brian, M. J. Soilen, eds., Proc. SPIE2714, 395–404 (1995).
  7. A. Gatto, R. Thielsch, J. Heber, N. Kaiser, D. Ristau, S. Günster, J. Kohlass, M. Marsi, M. Truvo, R. Walker, D. Garzella, M. E. Couprie, P. Torchio, M. Alvisi, C. Amra, “High-performance DUV optics for free electron laser,” in Optical Interference Coatings, Vol. 63 of OSA Trends in Optics and Photonics Series (Optical Society of America, Washington, D.C., 2001), pp. ThA7–1–ThA7–3.
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    [CrossRef] [PubMed]
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    [CrossRef]
  17. A. Zöller, R. Götzelmann, K. Matl, “PIAD: investigation of film stress,” in Developments in Optical Component Coatings, I. Reid, ed., SPIE2776, 207–211 (1996).

1999 (1)

M. Alvisi, S. Scaglione, S. Martelli, A. Rizzo, L. Vasanelli, “Structural and optical modification in HfO2 films related to the momentum parameter transferred by IAD,” Thin Solid Films 354, 19–23 (1999).
[CrossRef]

1993 (1)

1991 (1)

J. P. Lehan, Y. Mao, B. G. Bovard, H. A. Macleod, “Optical and microstructural properties of HfO2 thin films,” Thin Solid Films 203, 227–250 (1991).
[CrossRef]

1990 (1)

D. L. Wood, K. Nassau, T. Y. Kometai, D. L. Nash, “Optical properties of cubic hafnia stabilized with yttrium,” Appl. Opt. 21, 604–607 (1990).
[CrossRef]

1985 (1)

1982 (1)

1977 (1)

A. Schmell, R.

B. J. Pond, R. A. Schmell, C. K. Carniglia, T. Raj, “Comparison of the optical properties of some high-index oxide films prepared by IBS deposition with those of EBD films,” in Laser Induced Damage Optical Materials, H. E. Bennett, D. Milam, A. H. Guenther, B. E. Newman, eds., Natl. Bur. Stand (U.S.) Spec. Publ.752, 410–418 (1987).

Albrand, G.

P. Torchio, G. Albrand, M. Alvisi, C. Amra, H. Rauf, B. Cousin, G. Otrio, “Thin film optical coatings for the ultraviolet spectral region,” presented at the International Conference on Space Optics, Toulouse, France, 5–7 December 2000.

Alvisi, M.

M. Alvisi, S. Scaglione, S. Martelli, A. Rizzo, L. Vasanelli, “Structural and optical modification in HfO2 films related to the momentum parameter transferred by IAD,” Thin Solid Films 354, 19–23 (1999).
[CrossRef]

A. Gatto, R. Thielsch, J. Heber, N. Kaiser, D. Ristau, S. Günster, J. Kohlass, M. Marsi, M. Truvo, R. Walker, D. Garzella, M. E. Couprie, P. Torchio, M. Alvisi, C. Amra, “High-performance DUV optics for free electron laser,” in Optical Interference Coatings, Vol. 63 of OSA Trends in Optics and Photonics Series (Optical Society of America, Washington, D.C., 2001), pp. ThA7–1–ThA7–3.

P. Torchio, G. Albrand, M. Alvisi, C. Amra, H. Rauf, B. Cousin, G. Otrio, “Thin film optical coatings for the ultraviolet spectral region,” presented at the International Conference on Space Optics, Toulouse, France, 5–7 December 2000.

R. Thielsch, T. Feigl, N. Kaiser, S. Martin, S. Scaglione, F. Sarto, M. Alvisi, A. Rizzo, “Comparison of the optical properties and UV radiation resistance of HfO2 single layers deposited by RE, IAD, and PIAD,” in Laser-Induced Damage in Optical Materials: 1999, G. J. Exarhos, A. H. Guenther, M. R. Kozlowski, K. L. Lewis, M. J. Soileau, eds., Proc. SPIE3902, 182–183 (2000).

Amra, C.

P. Torchio, G. Albrand, M. Alvisi, C. Amra, H. Rauf, B. Cousin, G. Otrio, “Thin film optical coatings for the ultraviolet spectral region,” presented at the International Conference on Space Optics, Toulouse, France, 5–7 December 2000.

A. Gatto, R. Thielsch, J. Heber, N. Kaiser, D. Ristau, S. Günster, J. Kohlass, M. Marsi, M. Truvo, R. Walker, D. Garzella, M. E. Couprie, P. Torchio, M. Alvisi, C. Amra, “High-performance DUV optics for free electron laser,” in Optical Interference Coatings, Vol. 63 of OSA Trends in Optics and Photonics Series (Optical Society of America, Washington, D.C., 2001), pp. ThA7–1–ThA7–3.

Arnon, O.

Baumeister, P.

Beisswenger, S.

A. Zöller, S. Beisswenger, R. Götzelmann, K. Matl, “Plasma ion-assisted deposition: a novel technique for the production of optical coatings,” in Optical Interference Coatings, F. Abeles, ed., Proc. SPIE2253, 394–402 (1994).

Bodeman, A.

A. Bodeman, N. Kaiser, M. R. Kozlowski, E. Pierce, C. J. Stolz, “Comparison between 355-nm and 1064-nm damage of high-grade dielectric mirror coatings,” in 27th Annual Boulder Damage Symposium: Laser-Induced Damage in Optical Materials: 1995, H. E. Bennett, A. H. Guenther, M. R. Kozlowski, B. E. Newnam, E. Brian, M. J. Soilen, eds., Proc. SPIE2714, 395–404 (1995).

Borgogno, J. P.

Bovard, B. G.

J. P. Lehan, Y. Mao, B. G. Bovard, H. A. Macleod, “Optical and microstructural properties of HfO2 thin films,” Thin Solid Films 203, 227–250 (1991).
[CrossRef]

Carniglia, C. K.

Couprie, M. E.

M. E. Couprie, “SRFEL Source at 200 nm,” rep. for contract ERB-FMRX-CT98–0245 (Université de Paris-Sud, Orsay, France, 1998), http://www.drecam.cea.fr/spam/reseaux/mec.htm .

Cousin, B.

P. Torchio, G. Albrand, M. Alvisi, C. Amra, H. Rauf, B. Cousin, G. Otrio, “Thin film optical coatings for the ultraviolet spectral region,” presented at the International Conference on Space Optics, Toulouse, France, 5–7 December 2000.

Dobrowolski, J. A.

E. Couprie, M.

A. Gatto, R. Thielsch, J. Heber, N. Kaiser, D. Ristau, S. Günster, J. Kohlass, M. Marsi, M. Truvo, R. Walker, D. Garzella, M. E. Couprie, P. Torchio, M. Alvisi, C. Amra, “High-performance DUV optics for free electron laser,” in Optical Interference Coatings, Vol. 63 of OSA Trends in Optics and Photonics Series (Optical Society of America, Washington, D.C., 2001), pp. ThA7–1–ThA7–3.

Feigl, T.

R. Thielsch, T. Feigl, N. Kaiser, S. Martin, S. Scaglione, F. Sarto, M. Alvisi, A. Rizzo, “Comparison of the optical properties and UV radiation resistance of HfO2 single layers deposited by RE, IAD, and PIAD,” in Laser-Induced Damage in Optical Materials: 1999, G. J. Exarhos, A. H. Guenther, M. R. Kozlowski, K. L. Lewis, M. J. Soileau, eds., Proc. SPIE3902, 182–183 (2000).

Garzella, D.

A. Gatto, R. Thielsch, J. Heber, N. Kaiser, D. Ristau, S. Günster, J. Kohlass, M. Marsi, M. Truvo, R. Walker, D. Garzella, M. E. Couprie, P. Torchio, M. Alvisi, C. Amra, “High-performance DUV optics for free electron laser,” in Optical Interference Coatings, Vol. 63 of OSA Trends in Optics and Photonics Series (Optical Society of America, Washington, D.C., 2001), pp. ThA7–1–ThA7–3.

Gatto, A.

A. Gatto, R. Thielsch, J. Heber, N. Kaiser, D. Ristau, S. Günster, J. Kohlass, M. Marsi, M. Truvo, R. Walker, D. Garzella, M. E. Couprie, P. Torchio, M. Alvisi, C. Amra, “High-performance DUV optics for free electron laser,” in Optical Interference Coatings, Vol. 63 of OSA Trends in Optics and Photonics Series (Optical Society of America, Washington, D.C., 2001), pp. ThA7–1–ThA7–3.

Götzelmann, R.

A. Zöller, S. Beisswenger, R. Götzelmann, K. Matl, “Plasma ion-assisted deposition: a novel technique for the production of optical coatings,” in Optical Interference Coatings, F. Abeles, ed., Proc. SPIE2253, 394–402 (1994).

A. Zöller, R. Götzelmann, K. Matl, “PIAD: investigation of film stress,” in Developments in Optical Component Coatings, I. Reid, ed., SPIE2776, 207–211 (1996).

Günster, S.

A. Gatto, R. Thielsch, J. Heber, N. Kaiser, D. Ristau, S. Günster, J. Kohlass, M. Marsi, M. Truvo, R. Walker, D. Garzella, M. E. Couprie, P. Torchio, M. Alvisi, C. Amra, “High-performance DUV optics for free electron laser,” in Optical Interference Coatings, Vol. 63 of OSA Trends in Optics and Photonics Series (Optical Society of America, Washington, D.C., 2001), pp. ThA7–1–ThA7–3.

Günther, H.

H. Günther, “Structure and related properties of thin-film optical coatings,” in Optical Thin Films II: New Developments, R. I. Seddon, ed., Proc. SPIE678, 2–11 (1986).

Heber, J.

A. Gatto, R. Thielsch, J. Heber, N. Kaiser, D. Ristau, S. Günster, J. Kohlass, M. Marsi, M. Truvo, R. Walker, D. Garzella, M. E. Couprie, P. Torchio, M. Alvisi, C. Amra, “High-performance DUV optics for free electron laser,” in Optical Interference Coatings, Vol. 63 of OSA Trends in Optics and Photonics Series (Optical Society of America, Washington, D.C., 2001), pp. ThA7–1–ThA7–3.

J. Pond, B.

B. J. Pond, R. A. Schmell, C. K. Carniglia, T. Raj, “Comparison of the optical properties of some high-index oxide films prepared by IBS deposition with those of EBD films,” in Laser Induced Damage Optical Materials, H. E. Bennett, D. Milam, A. H. Guenther, B. E. Newman, eds., Natl. Bur. Stand (U.S.) Spec. Publ.752, 410–418 (1987).

K. Carniglia, C.

B. J. Pond, R. A. Schmell, C. K. Carniglia, T. Raj, “Comparison of the optical properties of some high-index oxide films prepared by IBS deposition with those of EBD films,” in Laser Induced Damage Optical Materials, H. E. Bennett, D. Milam, A. H. Guenther, B. E. Newman, eds., Natl. Bur. Stand (U.S.) Spec. Publ.752, 410–418 (1987).

Kaiser, N.

A. Bodeman, N. Kaiser, M. R. Kozlowski, E. Pierce, C. J. Stolz, “Comparison between 355-nm and 1064-nm damage of high-grade dielectric mirror coatings,” in 27th Annual Boulder Damage Symposium: Laser-Induced Damage in Optical Materials: 1995, H. E. Bennett, A. H. Guenther, M. R. Kozlowski, B. E. Newnam, E. Brian, M. J. Soilen, eds., Proc. SPIE2714, 395–404 (1995).

A. Gatto, R. Thielsch, J. Heber, N. Kaiser, D. Ristau, S. Günster, J. Kohlass, M. Marsi, M. Truvo, R. Walker, D. Garzella, M. E. Couprie, P. Torchio, M. Alvisi, C. Amra, “High-performance DUV optics for free electron laser,” in Optical Interference Coatings, Vol. 63 of OSA Trends in Optics and Photonics Series (Optical Society of America, Washington, D.C., 2001), pp. ThA7–1–ThA7–3.

R. Thielsch, T. Feigl, N. Kaiser, S. Martin, S. Scaglione, F. Sarto, M. Alvisi, A. Rizzo, “Comparison of the optical properties and UV radiation resistance of HfO2 single layers deposited by RE, IAD, and PIAD,” in Laser-Induced Damage in Optical Materials: 1999, G. J. Exarhos, A. H. Guenther, M. R. Kozlowski, K. L. Lewis, M. J. Soileau, eds., Proc. SPIE3902, 182–183 (2000).

Kohlass, J.

A. Gatto, R. Thielsch, J. Heber, N. Kaiser, D. Ristau, S. Günster, J. Kohlass, M. Marsi, M. Truvo, R. Walker, D. Garzella, M. E. Couprie, P. Torchio, M. Alvisi, C. Amra, “High-performance DUV optics for free electron laser,” in Optical Interference Coatings, Vol. 63 of OSA Trends in Optics and Photonics Series (Optical Society of America, Washington, D.C., 2001), pp. ThA7–1–ThA7–3.

Kometai, T. Y.

D. L. Wood, K. Nassau, T. Y. Kometai, D. L. Nash, “Optical properties of cubic hafnia stabilized with yttrium,” Appl. Opt. 21, 604–607 (1990).
[CrossRef]

Lazarides, B.

Lehan, J. P.

J. P. Lehan, Y. Mao, B. G. Bovard, H. A. Macleod, “Optical and microstructural properties of HfO2 thin films,” Thin Solid Films 203, 227–250 (1991).
[CrossRef]

Lichtenstein, T. L.

Lowdermilk, H. W.

Macleod, H. A.

J. P. Lehan, Y. Mao, B. G. Bovard, H. A. Macleod, “Optical and microstructural properties of HfO2 thin films,” Thin Solid Films 203, 227–250 (1991).
[CrossRef]

Mao, Y.

J. P. Lehan, Y. Mao, B. G. Bovard, H. A. Macleod, “Optical and microstructural properties of HfO2 thin films,” Thin Solid Films 203, 227–250 (1991).
[CrossRef]

Marsi, M.

A. Gatto, R. Thielsch, J. Heber, N. Kaiser, D. Ristau, S. Günster, J. Kohlass, M. Marsi, M. Truvo, R. Walker, D. Garzella, M. E. Couprie, P. Torchio, M. Alvisi, C. Amra, “High-performance DUV optics for free electron laser,” in Optical Interference Coatings, Vol. 63 of OSA Trends in Optics and Photonics Series (Optical Society of America, Washington, D.C., 2001), pp. ThA7–1–ThA7–3.

Martelli, S.

M. Alvisi, S. Scaglione, S. Martelli, A. Rizzo, L. Vasanelli, “Structural and optical modification in HfO2 films related to the momentum parameter transferred by IAD,” Thin Solid Films 354, 19–23 (1999).
[CrossRef]

Martin, S.

R. Thielsch, T. Feigl, N. Kaiser, S. Martin, S. Scaglione, F. Sarto, M. Alvisi, A. Rizzo, “Comparison of the optical properties and UV radiation resistance of HfO2 single layers deposited by RE, IAD, and PIAD,” in Laser-Induced Damage in Optical Materials: 1999, G. J. Exarhos, A. H. Guenther, M. R. Kozlowski, K. L. Lewis, M. J. Soileau, eds., Proc. SPIE3902, 182–183 (2000).

Matl, K.

A. Zöller, S. Beisswenger, R. Götzelmann, K. Matl, “Plasma ion-assisted deposition: a novel technique for the production of optical coatings,” in Optical Interference Coatings, F. Abeles, ed., Proc. SPIE2253, 394–402 (1994).

A. Zöller, R. Götzelmann, K. Matl, “PIAD: investigation of film stress,” in Developments in Optical Component Coatings, I. Reid, ed., SPIE2776, 207–211 (1996).

Milam, D.

Nash, D. L.

D. L. Wood, K. Nassau, T. Y. Kometai, D. L. Nash, “Optical properties of cubic hafnia stabilized with yttrium,” Appl. Opt. 21, 604–607 (1990).
[CrossRef]

Nassau, K.

D. L. Wood, K. Nassau, T. Y. Kometai, D. L. Nash, “Optical properties of cubic hafnia stabilized with yttrium,” Appl. Opt. 21, 604–607 (1990).
[CrossRef]

Otrio, G.

P. Torchio, G. Albrand, M. Alvisi, C. Amra, H. Rauf, B. Cousin, G. Otrio, “Thin film optical coatings for the ultraviolet spectral region,” presented at the International Conference on Space Optics, Toulouse, France, 5–7 December 2000.

Pelletier, E.

Pierce, E.

A. Bodeman, N. Kaiser, M. R. Kozlowski, E. Pierce, C. J. Stolz, “Comparison between 355-nm and 1064-nm damage of high-grade dielectric mirror coatings,” in 27th Annual Boulder Damage Symposium: Laser-Induced Damage in Optical Materials: 1995, H. E. Bennett, A. H. Guenther, M. R. Kozlowski, B. E. Newnam, E. Brian, M. J. Soilen, eds., Proc. SPIE2714, 395–404 (1995).

Plante, L. M.

R. Kozlowski, M.

A. Bodeman, N. Kaiser, M. R. Kozlowski, E. Pierce, C. J. Stolz, “Comparison between 355-nm and 1064-nm damage of high-grade dielectric mirror coatings,” in 27th Annual Boulder Damage Symposium: Laser-Induced Damage in Optical Materials: 1995, H. E. Bennett, A. H. Guenther, M. R. Kozlowski, B. E. Newnam, E. Brian, M. J. Soilen, eds., Proc. SPIE2714, 395–404 (1995).

Rainer, F.

Raj, T.

B. J. Pond, R. A. Schmell, C. K. Carniglia, T. Raj, “Comparison of the optical properties of some high-index oxide films prepared by IBS deposition with those of EBD films,” in Laser Induced Damage Optical Materials, H. E. Bennett, D. Milam, A. H. Guenther, B. E. Newman, eds., Natl. Bur. Stand (U.S.) Spec. Publ.752, 410–418 (1987).

Rauf, H.

P. Torchio, G. Albrand, M. Alvisi, C. Amra, H. Rauf, B. Cousin, G. Otrio, “Thin film optical coatings for the ultraviolet spectral region,” presented at the International Conference on Space Optics, Toulouse, France, 5–7 December 2000.

Ristau, D.

A. Gatto, R. Thielsch, J. Heber, N. Kaiser, D. Ristau, S. Günster, J. Kohlass, M. Marsi, M. Truvo, R. Walker, D. Garzella, M. E. Couprie, P. Torchio, M. Alvisi, C. Amra, “High-performance DUV optics for free electron laser,” in Optical Interference Coatings, Vol. 63 of OSA Trends in Optics and Photonics Series (Optical Society of America, Washington, D.C., 2001), pp. ThA7–1–ThA7–3.

Rizzo, A.

M. Alvisi, S. Scaglione, S. Martelli, A. Rizzo, L. Vasanelli, “Structural and optical modification in HfO2 films related to the momentum parameter transferred by IAD,” Thin Solid Films 354, 19–23 (1999).
[CrossRef]

R. Thielsch, T. Feigl, N. Kaiser, S. Martin, S. Scaglione, F. Sarto, M. Alvisi, A. Rizzo, “Comparison of the optical properties and UV radiation resistance of HfO2 single layers deposited by RE, IAD, and PIAD,” in Laser-Induced Damage in Optical Materials: 1999, G. J. Exarhos, A. H. Guenther, M. R. Kozlowski, K. L. Lewis, M. J. Soileau, eds., Proc. SPIE3902, 182–183 (2000).

Sarto, F.

R. Thielsch, T. Feigl, N. Kaiser, S. Martin, S. Scaglione, F. Sarto, M. Alvisi, A. Rizzo, “Comparison of the optical properties and UV radiation resistance of HfO2 single layers deposited by RE, IAD, and PIAD,” in Laser-Induced Damage in Optical Materials: 1999, G. J. Exarhos, A. H. Guenther, M. R. Kozlowski, K. L. Lewis, M. J. Soileau, eds., Proc. SPIE3902, 182–183 (2000).

Scaglione, S.

M. Alvisi, S. Scaglione, S. Martelli, A. Rizzo, L. Vasanelli, “Structural and optical modification in HfO2 films related to the momentum parameter transferred by IAD,” Thin Solid Films 354, 19–23 (1999).
[CrossRef]

R. Thielsch, T. Feigl, N. Kaiser, S. Martin, S. Scaglione, F. Sarto, M. Alvisi, A. Rizzo, “Comparison of the optical properties and UV radiation resistance of HfO2 single layers deposited by RE, IAD, and PIAD,” in Laser-Induced Damage in Optical Materials: 1999, G. J. Exarhos, A. H. Guenther, M. R. Kozlowski, K. L. Lewis, M. J. Soileau, eds., Proc. SPIE3902, 182–183 (2000).

Stolz, C. J.

A. Bodeman, N. Kaiser, M. R. Kozlowski, E. Pierce, C. J. Stolz, “Comparison between 355-nm and 1064-nm damage of high-grade dielectric mirror coatings,” in 27th Annual Boulder Damage Symposium: Laser-Induced Damage in Optical Materials: 1995, H. E. Bennett, A. H. Guenther, M. R. Kozlowski, B. E. Newnam, E. Brian, M. J. Soilen, eds., Proc. SPIE2714, 395–404 (1995).

Sullivan, B. T.

Thielsch, R.

R. Thielsch, T. Feigl, N. Kaiser, S. Martin, S. Scaglione, F. Sarto, M. Alvisi, A. Rizzo, “Comparison of the optical properties and UV radiation resistance of HfO2 single layers deposited by RE, IAD, and PIAD,” in Laser-Induced Damage in Optical Materials: 1999, G. J. Exarhos, A. H. Guenther, M. R. Kozlowski, K. L. Lewis, M. J. Soileau, eds., Proc. SPIE3902, 182–183 (2000).

A. Gatto, R. Thielsch, J. Heber, N. Kaiser, D. Ristau, S. Günster, J. Kohlass, M. Marsi, M. Truvo, R. Walker, D. Garzella, M. E. Couprie, P. Torchio, M. Alvisi, C. Amra, “High-performance DUV optics for free electron laser,” in Optical Interference Coatings, Vol. 63 of OSA Trends in Optics and Photonics Series (Optical Society of America, Washington, D.C., 2001), pp. ThA7–1–ThA7–3.

Torchio, P.

A. Gatto, R. Thielsch, J. Heber, N. Kaiser, D. Ristau, S. Günster, J. Kohlass, M. Marsi, M. Truvo, R. Walker, D. Garzella, M. E. Couprie, P. Torchio, M. Alvisi, C. Amra, “High-performance DUV optics for free electron laser,” in Optical Interference Coatings, Vol. 63 of OSA Trends in Optics and Photonics Series (Optical Society of America, Washington, D.C., 2001), pp. ThA7–1–ThA7–3.

P. Torchio, G. Albrand, M. Alvisi, C. Amra, H. Rauf, B. Cousin, G. Otrio, “Thin film optical coatings for the ultraviolet spectral region,” presented at the International Conference on Space Optics, Toulouse, France, 5–7 December 2000.

Truvo, M.

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A. Gatto, R. Thielsch, J. Heber, N. Kaiser, D. Ristau, S. Günster, J. Kohlass, M. Marsi, M. Truvo, R. Walker, D. Garzella, M. E. Couprie, P. Torchio, M. Alvisi, C. Amra, “High-performance DUV optics for free electron laser,” in Optical Interference Coatings, Vol. 63 of OSA Trends in Optics and Photonics Series (Optical Society of America, Washington, D.C., 2001), pp. ThA7–1–ThA7–3.

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A. Zöller, R. Götzelmann, K. Matl, “PIAD: investigation of film stress,” in Developments in Optical Component Coatings, I. Reid, ed., SPIE2776, 207–211 (1996).

R. Thielsch, T. Feigl, N. Kaiser, S. Martin, S. Scaglione, F. Sarto, M. Alvisi, A. Rizzo, “Comparison of the optical properties and UV radiation resistance of HfO2 single layers deposited by RE, IAD, and PIAD,” in Laser-Induced Damage in Optical Materials: 1999, G. J. Exarhos, A. H. Guenther, M. R. Kozlowski, K. L. Lewis, M. J. Soileau, eds., Proc. SPIE3902, 182–183 (2000).

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P. Torchio, G. Albrand, M. Alvisi, C. Amra, H. Rauf, B. Cousin, G. Otrio, “Thin film optical coatings for the ultraviolet spectral region,” presented at the International Conference on Space Optics, Toulouse, France, 5–7 December 2000.

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Figures (11)

Fig. 1
Fig. 1

Experimental IP setup with its optical monitoring.

Fig. 2
Fig. 2

Experimental PIAD setup.

Fig. 3
Fig. 3

Transmittance, reflectance, and losses of a 350-nm SiO2 single layer deposited by IP and of a 50-nm SiO2 single layer deposited by PIAD upon a fused-silica substrate.

Fig. 4
Fig. 4

Transmittance, reflectance, and losses of a 200-nm HfO2 single layer deposited by IP, and transmittance and reflectance of a 50-nm HfO2 single layer deposited by PIAD, upon a fused-silica substrate.

Fig. 5
Fig. 5

Refractive indices of HfO2 films deposited by IP and PIAD.

Fig. 6
Fig. 6

Extinction coefficients of HfO2 films deposited by IP and PIAD.

Fig. 7
Fig. 7

Refractive indices of SiO2 films deposited by IP and PIAD.

Fig. 8
Fig. 8

Extinction coefficients of SiO2 films deposited by IP and PIAD.

Fig. 9
Fig. 9

Measured reflectance R, transmittance T, and deduced losses L from a 23-layer HfO2/SiO2 IP mirror centered at 300 nm.

Fig. 10
Fig. 10

Measured reflectance R, transmittance T, and deduced losses L from a 23-layer HfO2/SiO2 PIAD mirror centered at 250 nm.

Fig. 11
Fig. 11

Measured and calculated reflectance from a 23-layer HfO2/SiO2 IP mirror centered at 300 nm.

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