Abstract

An analytical method has been developed for directly calculating the principal angle θ_p at which the phase difference between the two reflection coefficients is equal to 90° and at which the ratio of |r _p| to |r _s| is equal or close to a minimum. The equations given here can be used in many optical applications. For example, ellipsometric data measured at an incidence angle θ_p will have higher precision than data measured at other incidence angles. θ_p is the principal angle. Instead of three principal angles, there is only one principal angle, which can be found in the region of 0 ≤ θ_p ≤ 90° for most metallic materials used in applications. Results show good agreement between the measured and the calculated spectra of Δ_p and ρ_po.

© 2002 Optical Society of America

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