Abstract

The first experimental investigation of a normal-incidence Mo–Y multilayer-coated diffraction grating operating at a 9-nm wavelength is reported. The substrate is a replica of a concave holographic ion-etched blazed grating with 2400 grooves/mm and a 2-m radius of curvature. The measured peak efficiency in the −3 order is 2.7% at a wavelength of 8.79 nm. To our knowledge, this is the highest normal-incidence grating efficiency ever obtained in this wavelength region.

© 2002 Optical Society of America

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