Abstract

We describe an interferometer system that uses two separate wavelengths to measure step height. The overlapping interference images detected by a CCD camera are easily separated by an ordinary integrating-bucket method and time-sharing sinusoidal phase modulation, in which two laser diodes are alternately modulated with a sinusoidal signal. A phase map is obtained only for the laser diode into which the modulation signal is injected. In this instance, a 1-µm step height was accurately detected.

© 2002 Optical Society of America

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