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Form assessment of hollow cylindrical specimens

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Abstract

Grazing-incidence interferometry that makes use of diffractive axicons for the measurement of cylindrical mantle surfaces has already been reported. However, measurement of concave rod structures poses a severe problem because these structures are subject to spurious fringes caused by parasitic diffraction orders of the diffractive axicons. By breaking the symmetry of the interferometric setup it is possible to obtain unique interferograms of the inner mantle surfaces of hollow cylinders as cages for roller bearings or other workpieces produced on lathe machines that have a suitable surface finish. Special design issues for the computer-generated holograms and the interferometric setup are discussed, and test examples are given.

© 2002 Optical Society of America

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