Abstract

A profiling system for on-line and noncontact measurement of superfine surfaces is described. The system uses the principle of a differential interferometer with coaxial interference arms. The measuring head (optical part) of this system is separable and can be installed on machine tools or in existing measuring instruments. It has excellent resistance to vibration and air turbulence; therefore it needs no damper or cover. This system scans sample surfaces to measure a microprofile with a vertical resolution of 0.08 nm rms.

© 2002 Optical Society of America

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References

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  1. H. Ooki, J. Iwasaki, “Differential interferometer contrast microscope with differential detection for optimizing image contrast,” Appl. Opt. 35, 2230–2234 (1996).
    [CrossRef] [PubMed]
  2. J. F. Song, T. V. Vorburger, “Stylus profiling at high resolution and low force,” Appl. Opt. 30, 42–49 (1991).
    [CrossRef] [PubMed]
  3. G. Meyer, N. M. Amer, “Novel optical approach to atomic force microscopy,” Appl. Phys. Lett. 53, 1045–1047 (1988).
    [CrossRef]
  4. Z. F. Zhou, “Microprofilometer system for measuring the profiles of fine structure,” in Proceedings of the 11th Triennial World Congress of the International Measurementation Confederation (Instrument Society of America, Research Triangle Park, N.C., 1988), pp. 49–59.
  5. Z. F. Zhou, “Untersuchungen über ein Fotoelektrisches Interferenz-Messmicroskop mit Zweifrequenzlaser zum Messen von Feistrukturen,” PTB-Mitteilungen 94(1), 15–22 (1984).
  6. W. D. Zhou, Z. F. Zhou, G. C. Chi, “Investigation of common-path interferometry,” Opt. Eng. 36, 3172–3175 (1997).
    [CrossRef]
  7. M. J. Downs, W. H. McGivern, H. J. Fergusen, “Optical system for measuring the profile of super smooth surface,” Precision Eng. 7(4), 211–215 (1985).
  8. C. C. Huang, “Optical heterodyne profilometer,” Opt. Eng. 23, 365–370 (1984).
    [CrossRef]
  9. J. M. Bennett, J. H. Dancy, “Stylus profiling instrument measuring statistical properties of smooth optical surface,” Appl. Opt. 20, 1785–1802 (1981).
    [CrossRef] [PubMed]

1997 (1)

W. D. Zhou, Z. F. Zhou, G. C. Chi, “Investigation of common-path interferometry,” Opt. Eng. 36, 3172–3175 (1997).
[CrossRef]

1996 (1)

1991 (1)

1988 (1)

G. Meyer, N. M. Amer, “Novel optical approach to atomic force microscopy,” Appl. Phys. Lett. 53, 1045–1047 (1988).
[CrossRef]

1985 (1)

M. J. Downs, W. H. McGivern, H. J. Fergusen, “Optical system for measuring the profile of super smooth surface,” Precision Eng. 7(4), 211–215 (1985).

1984 (2)

C. C. Huang, “Optical heterodyne profilometer,” Opt. Eng. 23, 365–370 (1984).
[CrossRef]

Z. F. Zhou, “Untersuchungen über ein Fotoelektrisches Interferenz-Messmicroskop mit Zweifrequenzlaser zum Messen von Feistrukturen,” PTB-Mitteilungen 94(1), 15–22 (1984).

1981 (1)

Amer, N. M.

G. Meyer, N. M. Amer, “Novel optical approach to atomic force microscopy,” Appl. Phys. Lett. 53, 1045–1047 (1988).
[CrossRef]

Bennett, J. M.

Chi, G. C.

W. D. Zhou, Z. F. Zhou, G. C. Chi, “Investigation of common-path interferometry,” Opt. Eng. 36, 3172–3175 (1997).
[CrossRef]

Dancy, J. H.

Downs, M. J.

M. J. Downs, W. H. McGivern, H. J. Fergusen, “Optical system for measuring the profile of super smooth surface,” Precision Eng. 7(4), 211–215 (1985).

Fergusen, H. J.

M. J. Downs, W. H. McGivern, H. J. Fergusen, “Optical system for measuring the profile of super smooth surface,” Precision Eng. 7(4), 211–215 (1985).

Huang, C. C.

C. C. Huang, “Optical heterodyne profilometer,” Opt. Eng. 23, 365–370 (1984).
[CrossRef]

Iwasaki, J.

McGivern, W. H.

M. J. Downs, W. H. McGivern, H. J. Fergusen, “Optical system for measuring the profile of super smooth surface,” Precision Eng. 7(4), 211–215 (1985).

Meyer, G.

G. Meyer, N. M. Amer, “Novel optical approach to atomic force microscopy,” Appl. Phys. Lett. 53, 1045–1047 (1988).
[CrossRef]

Ooki, H.

Song, J. F.

Vorburger, T. V.

Zhou, W. D.

W. D. Zhou, Z. F. Zhou, G. C. Chi, “Investigation of common-path interferometry,” Opt. Eng. 36, 3172–3175 (1997).
[CrossRef]

Zhou, Z. F.

W. D. Zhou, Z. F. Zhou, G. C. Chi, “Investigation of common-path interferometry,” Opt. Eng. 36, 3172–3175 (1997).
[CrossRef]

Z. F. Zhou, “Untersuchungen über ein Fotoelektrisches Interferenz-Messmicroskop mit Zweifrequenzlaser zum Messen von Feistrukturen,” PTB-Mitteilungen 94(1), 15–22 (1984).

Z. F. Zhou, “Microprofilometer system for measuring the profiles of fine structure,” in Proceedings of the 11th Triennial World Congress of the International Measurementation Confederation (Instrument Society of America, Research Triangle Park, N.C., 1988), pp. 49–59.

Appl. Opt. (3)

Appl. Phys. Lett. (1)

G. Meyer, N. M. Amer, “Novel optical approach to atomic force microscopy,” Appl. Phys. Lett. 53, 1045–1047 (1988).
[CrossRef]

Opt. Eng. (2)

W. D. Zhou, Z. F. Zhou, G. C. Chi, “Investigation of common-path interferometry,” Opt. Eng. 36, 3172–3175 (1997).
[CrossRef]

C. C. Huang, “Optical heterodyne profilometer,” Opt. Eng. 23, 365–370 (1984).
[CrossRef]

Precision Eng. (1)

M. J. Downs, W. H. McGivern, H. J. Fergusen, “Optical system for measuring the profile of super smooth surface,” Precision Eng. 7(4), 211–215 (1985).

PTB-Mitteilungen (1)

Z. F. Zhou, “Untersuchungen über ein Fotoelektrisches Interferenz-Messmicroskop mit Zweifrequenzlaser zum Messen von Feistrukturen,” PTB-Mitteilungen 94(1), 15–22 (1984).

Other (1)

Z. F. Zhou, “Microprofilometer system for measuring the profiles of fine structure,” in Proceedings of the 11th Triennial World Congress of the International Measurementation Confederation (Instrument Society of America, Research Triangle Park, N.C., 1988), pp. 49–59.

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Figures (6)

Fig. 1
Fig. 1

Schematic diagram of our profiling system for on-line measurement.

Fig. 2
Fig. 2

Flow chart of the relevant filter.

Fig. 3
Fig. 3

Instrument noise, measured at the best sensitivity of this profiling system.

Fig. 4
Fig. 4

Repeatability test for a 500-µm scan on an ultramachining surface.

Fig. 5
Fig. 5

Measuring results from (top) our profiling system and (bottom) the Zygo New View 200 system.

Fig. 6
Fig. 6

Test of resistance to vibration: upper trace, measured by our profiling system; lower trace, measured by a monomeasuring arm profilometer.

Equations (11)

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I|E1+E2|2=I+cosk1z1+ρ12/2RZ1-k2Z1+ρ22/2RZ2+ϕZ1-ϕZ2.
Sr=1+cosk1-k2zr+ρr2/2Rzr.
Sm=1+cos(k1z1+ρm2/2Rz1-k2z2+ρm2/2Rz2+ϕz1-ϕz2).
θ=k1z1-k2z2-k1-k2zr+12k1ρm2/Rz1-k2ρm2/RZ2-k1-k2ρr2/Rzr+ϕz1-ϕz2.
θ=2π/cν0Δz+ΔνΔz¯+Δθ,
δθ=2π/cν0δΔz=2π/λ0δΔz,
Δh=λ0/4πδθ,
Rt=AR sin ω0t,St=AS sinω0t+ϕ+Nt.
Sτ=limT1T0T RtSt+τdt=limT1T0T AR sin ω0tS sinω0t+τ+ϕdt+limT1T0T AR sin ω0tNt+τdt,
limT1T0T AR sin ω0tNt+τdt=0,
Sτ=1T00T0 AR sin ω0tAS sinω0t+τ+ϕdt=12 ARAS cosω0τ+ϕ.

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