Abstract

Multilayer coatings for the extreme ultraviolet with high reflectance at a spectral band of interest and zero reflectance at another band to be suppressed have been designed and prepared. Multilayer coatings were designed to maximize normal-incidence reflectance at the O+ 83.4-nm spectral line and to suppress at the same time radiation at the 121.6-nm hydrogen Lyman α line. Fresh Al/MgF2/Mo multilayer coatings resulted in high reflection/suppression ratios at the above wavelengths. The coatings also exhibited a dip in reflectance at 102.6-nm Lyman β. The coatings showed some slow but steady degradation over time that could be partially eliminated by sample cleaning. Al/MgF2/Mo multilayer coatings protected with a thin ion-beam-deposited C film were found to give a high reflection/suppression ratio with lower degradation over time.

© 2001 Optical Society of America

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References

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  1. J. Edelstein, “Reflection/suppression coatings for the 900–1200 radiation,” in X-ray/EUV Optics for Astronomy and Microscopy,” R. B. Hoover, ed., Proc. SPIE1160, 19–25 (1989).
  2. J. F. Seely, W. R. Hunter, “Thin film interference optics for imaging the O ii 834-Å airglow,” Appl. Opt. 30, 2788–2794 (1991).
    [CrossRef] [PubMed]
  3. S. Chakrabarti, J. Edelstein, R. A. M. Keski-Kuha, F. T. Threat, “Reflective coating of 834 Å for imaging O+ ions,” Opt. Eng. 33, 409–413 (1994).
    [CrossRef]
  4. See, for instance, E. Spiller, Soft X-Ray Optics (Society for Photo-Optical Instrumentation Engineering, Bellingham, Wash., 1994), p. 184.
  5. J. H. Weaver, C. Krafka, D. W. Lynch, E. E. Koch, Physik Daten- Optical Properties of Metals (Fachinformationszentrum, Karlsruhe, 1981), Vol. 18–1.
  6. J. I. Larruquert, R. A. M. Keski-Kuha, unpublished data.
  7. E. D. Palik, Handbook of Optical Constants of Solids (Academic, San Diego, Calif., 1985).
  8. J. I. Larruquert, R. A. M. Keski-Kuha, “Reflectance measurements and optical constants in the extreme ultraviolet for thin films of ion-beam-deposited SiC, Mo, Mg2Si, and InSb and evaporated Cr,” Appl. Opt. 39, 2772–2781 (2000).
    [CrossRef]
  9. J. F. Osantowski, “Reflectance and optical constants for Cer-Vit from 250 to 1050 Å,” J. Opt. Soc. Am. 64, 834–838 (1974).
    [CrossRef]
  10. J. I. Larruquert, R. A. M. Keski-Kuha, “Reflectance measurements and optical constants in the extreme ultraviolet of thin films of ion-beam-deposited carbon,” Opt. Commun. 183, 437–443 (2000).
    [CrossRef]

2000 (2)

J. I. Larruquert, R. A. M. Keski-Kuha, “Reflectance measurements and optical constants in the extreme ultraviolet for thin films of ion-beam-deposited SiC, Mo, Mg2Si, and InSb and evaporated Cr,” Appl. Opt. 39, 2772–2781 (2000).
[CrossRef]

J. I. Larruquert, R. A. M. Keski-Kuha, “Reflectance measurements and optical constants in the extreme ultraviolet of thin films of ion-beam-deposited carbon,” Opt. Commun. 183, 437–443 (2000).
[CrossRef]

1994 (1)

S. Chakrabarti, J. Edelstein, R. A. M. Keski-Kuha, F. T. Threat, “Reflective coating of 834 Å for imaging O+ ions,” Opt. Eng. 33, 409–413 (1994).
[CrossRef]

1991 (1)

1974 (1)

Chakrabarti, S.

S. Chakrabarti, J. Edelstein, R. A. M. Keski-Kuha, F. T. Threat, “Reflective coating of 834 Å for imaging O+ ions,” Opt. Eng. 33, 409–413 (1994).
[CrossRef]

Edelstein, J.

S. Chakrabarti, J. Edelstein, R. A. M. Keski-Kuha, F. T. Threat, “Reflective coating of 834 Å for imaging O+ ions,” Opt. Eng. 33, 409–413 (1994).
[CrossRef]

J. Edelstein, “Reflection/suppression coatings for the 900–1200 radiation,” in X-ray/EUV Optics for Astronomy and Microscopy,” R. B. Hoover, ed., Proc. SPIE1160, 19–25 (1989).

Hunter, W. R.

Keski-Kuha, R. A. M.

J. I. Larruquert, R. A. M. Keski-Kuha, “Reflectance measurements and optical constants in the extreme ultraviolet for thin films of ion-beam-deposited SiC, Mo, Mg2Si, and InSb and evaporated Cr,” Appl. Opt. 39, 2772–2781 (2000).
[CrossRef]

J. I. Larruquert, R. A. M. Keski-Kuha, “Reflectance measurements and optical constants in the extreme ultraviolet of thin films of ion-beam-deposited carbon,” Opt. Commun. 183, 437–443 (2000).
[CrossRef]

S. Chakrabarti, J. Edelstein, R. A. M. Keski-Kuha, F. T. Threat, “Reflective coating of 834 Å for imaging O+ ions,” Opt. Eng. 33, 409–413 (1994).
[CrossRef]

J. I. Larruquert, R. A. M. Keski-Kuha, unpublished data.

Koch, E. E.

J. H. Weaver, C. Krafka, D. W. Lynch, E. E. Koch, Physik Daten- Optical Properties of Metals (Fachinformationszentrum, Karlsruhe, 1981), Vol. 18–1.

Krafka, C.

J. H. Weaver, C. Krafka, D. W. Lynch, E. E. Koch, Physik Daten- Optical Properties of Metals (Fachinformationszentrum, Karlsruhe, 1981), Vol. 18–1.

Larruquert, J. I.

J. I. Larruquert, R. A. M. Keski-Kuha, “Reflectance measurements and optical constants in the extreme ultraviolet for thin films of ion-beam-deposited SiC, Mo, Mg2Si, and InSb and evaporated Cr,” Appl. Opt. 39, 2772–2781 (2000).
[CrossRef]

J. I. Larruquert, R. A. M. Keski-Kuha, “Reflectance measurements and optical constants in the extreme ultraviolet of thin films of ion-beam-deposited carbon,” Opt. Commun. 183, 437–443 (2000).
[CrossRef]

J. I. Larruquert, R. A. M. Keski-Kuha, unpublished data.

Lynch, D. W.

J. H. Weaver, C. Krafka, D. W. Lynch, E. E. Koch, Physik Daten- Optical Properties of Metals (Fachinformationszentrum, Karlsruhe, 1981), Vol. 18–1.

Osantowski, J. F.

Palik, E. D.

E. D. Palik, Handbook of Optical Constants of Solids (Academic, San Diego, Calif., 1985).

Seely, J. F.

Spiller, E.

See, for instance, E. Spiller, Soft X-Ray Optics (Society for Photo-Optical Instrumentation Engineering, Bellingham, Wash., 1994), p. 184.

Threat, F. T.

S. Chakrabarti, J. Edelstein, R. A. M. Keski-Kuha, F. T. Threat, “Reflective coating of 834 Å for imaging O+ ions,” Opt. Eng. 33, 409–413 (1994).
[CrossRef]

Weaver, J. H.

J. H. Weaver, C. Krafka, D. W. Lynch, E. E. Koch, Physik Daten- Optical Properties of Metals (Fachinformationszentrum, Karlsruhe, 1981), Vol. 18–1.

Appl. Opt. (2)

J. Opt. Soc. Am. (1)

Opt. Commun. (1)

J. I. Larruquert, R. A. M. Keski-Kuha, “Reflectance measurements and optical constants in the extreme ultraviolet of thin films of ion-beam-deposited carbon,” Opt. Commun. 183, 437–443 (2000).
[CrossRef]

Opt. Eng. (1)

S. Chakrabarti, J. Edelstein, R. A. M. Keski-Kuha, F. T. Threat, “Reflective coating of 834 Å for imaging O+ ions,” Opt. Eng. 33, 409–413 (1994).
[CrossRef]

Other (5)

See, for instance, E. Spiller, Soft X-Ray Optics (Society for Photo-Optical Instrumentation Engineering, Bellingham, Wash., 1994), p. 184.

J. H. Weaver, C. Krafka, D. W. Lynch, E. E. Koch, Physik Daten- Optical Properties of Metals (Fachinformationszentrum, Karlsruhe, 1981), Vol. 18–1.

J. I. Larruquert, R. A. M. Keski-Kuha, unpublished data.

E. D. Palik, Handbook of Optical Constants of Solids (Academic, San Diego, Calif., 1985).

J. Edelstein, “Reflection/suppression coatings for the 900–1200 radiation,” in X-ray/EUV Optics for Astronomy and Microscopy,” R. B. Hoover, ed., Proc. SPIE1160, 19–25 (1989).

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Figures (4)

Fig. 1
Fig. 1

Near-normal incidence reflectance of two fresh Al/MgF2/Mo multilayer coatings as a function of wavelength.

Fig. 2
Fig. 2

Reflectance of a fresh Al/MgF2/Mo multilayer coating at 121.6 nm as a function of the angle of incidence for unpolarized radiation. Calculated reflectance for the multilayer with zero reflectance at 83.4 nm is also shown.

Fig. 3
Fig. 3

Near-normal incidence reflectance of an Al/MgF2/Mo multilayer coating, both fresh and aged 4 months, as a function of wavelength.

Fig. 4
Fig. 4

Near-normal incidence reflectance of an Al/MgF2/Mo/C multilayer coating, both fresh and aged 2 months, as a function of wavelength. Wavelength for the fresh multilayer was shifted 2 nm toward shorter wavelength for clarity.

Tables (3)

Tables Icon

Table 1 Optical Constants of Thin Films of Materials Used in the Multilayer Designs

Tables Icon

Table 2 Reflectance of an Al/MgF2/Multilayer Coating over Time Before and After Two Cleaning Processes

Tables Icon

Table 3 Reflectance of Al/MgF2/Mo/C and Al/MgF2/Mo Multilayer Coatings when Fresh and upon Aging

Equations (5)

Equations on this page are rendered with MathJax. Learn more.

r=r01+r12 exp2iϕ11+r01r12 exp2iϕ1,
ϕ1=2π/λ d1n1 cos θ1,
R=1-p2 |rs|2+1+p2 |rp|2,
p=Ip-IsIp+Is.
r=r01+r12 exp 2iϕ1+r23 exp 2iϕ1+ϕ2+r01r12r23 exp 2iϕ21+r01r12 exp 2iϕ1+r01r23 exp 2iϕ1+ϕ2+r12r23 exp 2iϕ2.

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