Abstract

Multilayer coatings for the extreme ultraviolet with high reflectance at a spectral band of interest and zero reflectance at another band to be suppressed have been designed and prepared. Multilayer coatings were designed to maximize normal-incidence reflectance at the O+ 83.4-nm spectral line and to suppress at the same time radiation at the 121.6-nm hydrogen Lyman α line. Fresh Al/MgF2/Mo multilayer coatings resulted in high reflection/suppression ratios at the above wavelengths. The coatings also exhibited a dip in reflectance at 102.6-nm Lyman β. The coatings showed some slow but steady degradation over time that could be partially eliminated by sample cleaning. Al/MgF2/Mo multilayer coatings protected with a thin ion-beam-deposited C film were found to give a high reflection/suppression ratio with lower degradation over time.

© 2001 Optical Society of America

Full Article  |  PDF Article

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (4)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Tables (3)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (5)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription