Abstract

A novel six-degrees-of-freedom (six-DOFs) alignment technique for assembling two-dimensional array components is presented. The technique uses off-axis linear Fresnel zone plates on one component that are combined with alignment targets on the other. The technique is compact and sensitive to all six DOFs; it was used to package an array of microlenses with a 32 × 32 array of GaAs multiple-quantum-well modulators flip-chip bonded to a 9 mm × 9 mm complementary-metal-oxide-semiconductor chip. By use of interference fringes to control the tilt misalignment, the worst-case misalignment of the microlenses relative to the chip is calculated to be as follows: lateral = 3.0 µm, rotational = 0.023°, longitudinal = 13 µm, and tilt = 0.022°. We also propose alternative implementations of the technique, including one that uses on-chip photodetectors to automate this six-DOF alignment technique.

© 2001 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Six-degrees-of-freedom alignment technique that provides diagnostic misalignment information

Marc Châteauneuf and Andrew G. Kirk
Appl. Opt. 43(13) 2689-2694 (2004)

512-channel vertical-cavity surface-emitting laser based free-space optical link

Marc Châteauneuf, Andrew G. Kirk, David V. Plant, Tsuyoshi Yamamoto, and John D. Ahearn
Appl. Opt. 41(26) 5552-5561 (2002)

Three-dimensional optoelectronic stacked processor by use of free-space optical interconnection and three-dimensional VLSI chip stacks

Guoqiang Li, Dawei Huang, Emel Yuceturk, Philippe J. Marchand, Sadik C. Esener, Volkan H. Ozguz, and Yue Liu
Appl. Opt. 41(2) 348-360 (2002)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (12)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Tables (1)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (12)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription