Abstract
An advanced interferometer was built for surface metrology in
environments with severe vibration. This instrument uses active
control to compensate for effects of vibration to allow surface
measurement with high-resolution phase-shifting interferometry. A
digital signal processor and high-speed phase control from an
electro-optic modulator allows phase measurements at 4000 Hz. These
measurements are fed back into a real-time servo in the digital signal
processor that provides a vibration-corrected phase ramp for the
surface measurements taken at video rates. Unlike fringe locking,
which compensates vibration to keep the phase constant, we show a true
phase servo that allows the phase to be stabilized while it is ramped,
enabling surface measurements using phase-shifting interferometry that
requires multiple images with controlled phase shifts.
© 2001 Optical Society of America
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