Abstract

Laser-induced coalescence of silver nanoparticles embedded in thin plasma polymer films has been used to generate permanent submicrometer structures in the films, which exhibit unusual optical properties. Scanning-electron-microscope images and spatially resolved optical transmission spectra reveal the changes in the nanostructure of the films that are due to the irradiation. The structural modifications result from thermally induced coalescence of the irradiated nanoparticles and are accompanied by significant changes in the optical transmission spectra. A planar micro-optical element has been generated in this way, and its optical properties have been characterized by means of the depth resolution of a confocal microscope.

© 2001 Optical Society of America

Full Article  |  PDF Article

References

  • View by:
  • |
  • |
  • |

  1. U. Ch. Fischer and H. P. Zingsheim, “Submicroscopic pattern replication with visible light,” J. Vac. Sci. Technol. 19, 881–885 (1981).
    [CrossRef]
  2. U. C. Fischer, A. Naber, T. Dziomba, J. Koglin, W. Gohde, O. Panzer, H. Fuchs, “Near-field optical tools to read, write and copy information at the 100–10 nm scale,” in Laser Techniques for Surface Science III, H. Dai, H. Freund, eds., Proc. SPIE3272, 2–6 (1998).
    [CrossRef]
  3. M. Tang, S. M. Cai, Z. F. Liu, “Direct-nanolithography on gelatin film using scanning near-field optical microscopy,” Opt. Commun. 146, 21–24 (1998).
    [CrossRef]
  4. V. V. Polonski, Y. Yamamoto, M. Kourogi, H. Fukuda, M. Ohtsu, “Nanometric patterning of zinc by optical near-field photochemical vapour deposition,” J. Microsc. (Oxford) 194, 545–551 (1999).
    [CrossRef]
  5. K. Lieberman, Y. Shani, I. Melnik, S. Yoffe, Y. Sharon, “Near-field optical photomask repair with a femtosecond laser,” J. Microsc. (Oxford) 194, 537–541 (1999).
    [CrossRef]
  6. P. B. Comita, E. Kay, R. Zhang, W. Jacob, “Laser-induced coalescence of gold clusters in fluorocarbon composite thin films,” Appl. Surf. Sci. 79/80, 196–202 (1994).
  7. K. Miura, J. Qiu, H. Inouye, T. Mitsuyu, K. Hirao, “Photowritten optical waveguides in various glasses with ultrashort pulse laser,” Appl. Phys. Lett. 71, 3329–3331 (1997).
    [CrossRef]
  8. J. Werner, A. Heilmann, V. Hopfe, F. Homilius, B. Steiger, O. Stenzel, “Changes of the optical properties of plasma polymer silver composite films caused by laser annealing,” Thin Solid Films 237, 193–199 (1994).
    [CrossRef]
  9. T. L. Morkved, P. Wiltzius, H. M. Jaeger, D. G. Grier, T. A. Witten, “Mesoscopic self-assembly of gold islands on diblock-copolymer films,” Appl. Phys. Lett. 64, 422–424 (1994).
    [CrossRef]
  10. A. B. R. Mayer, W. Grebner, R. Wannemacher, “Preparation of silver–latex composites,” J. Phys. Chem. B 104, 7278–7285 (2000).
    [CrossRef]
  11. R. H. Magruder, Li Yang, R. F. Haglund, C. W. White, L. Yang, R. Dorsinville, R. R. Alfano, “Optical properties of gold nanocluster composites formed by deep ion implantation in silica,” Appl. Phys. Lett. 62, 1730–1732 (1993).
    [CrossRef]
  12. E. Kay, “Synthesis and properties of metal clusters in polymeric matrices,” Z. Phys. D 3, 251–262 (1986).
    [CrossRef]
  13. A. Heilmann, J. Werner, “In situ observation of microstructural changes of embedded silver particles,” Thin Solid Films 317, 21–26 (1998), and references therein.
  14. M. B. Stern, “Pattern transfer for diffractive and refractive microoptics,” Microelectron. Eng. 34, 299–319 (1997).
    [CrossRef]
  15. L. Weber, W. Ehrfeld, H. Freimuth, M. Lacher, H. Lehr, B. Pech, “Micro molding—a powerful tool for the large scale production of precise microstructures,” in Micromachining and Microfabrication Process Technology II, S. W. Pang, S. Chang, eds., Proc. SPIE2879, 156–167 (1996).
    [CrossRef]
  16. A. Heilmann, M. Quinten, J. Werner, “Optical response of thin plasma-polymer films with non-spherical silver nanoparticles,” Eur. J. Phys. B 3, 455–461 (1998).
    [CrossRef]
  17. A. Heilmann, G. Kampfrath, V. Hopfe, “Optical properties of plasma-polymer–silver composite films and their simulation by means of effective medium theories,” in Linear Optical Composite Materials, A. Lakhtakia, ed., Vol. 120 of SPIE Milestone Series (Society for Photo-Optical Instrumentation Engineers, Bellingham, Wash., 1996), pp. 429–437.
  18. D. Ngoc Uan, A. Heilmann, “Determination of thermally induced microstructural changes of embedded metal nanoparticles by lateral and cross-sectional transmission electron microscopy,” Vacuum 49, 51–57 (1998).
    [CrossRef]
  19. J. Werner, A. Heilmann, F. Müller, “Electron beam induced coalescence in plasma polymer silver composite films,” Appl. Phys. Lett. 66, 3436–3438 (1995).
    [CrossRef]
  20. V. P. Safonov, V. M. Shalaev, V. A. Markel, Yu. E. Danilova, N. N. Lepeshkin, W. Kim, S. G. Rautian, R. L. Armstrong, “Spectral dependence of selective photomodification in fractal aggregates of colloidal particles,” Phys. Rev. Lett. 80, 1102–1105 (1998).
    [CrossRef]

2000 (1)

A. B. R. Mayer, W. Grebner, R. Wannemacher, “Preparation of silver–latex composites,” J. Phys. Chem. B 104, 7278–7285 (2000).
[CrossRef]

1999 (2)

V. V. Polonski, Y. Yamamoto, M. Kourogi, H. Fukuda, M. Ohtsu, “Nanometric patterning of zinc by optical near-field photochemical vapour deposition,” J. Microsc. (Oxford) 194, 545–551 (1999).
[CrossRef]

K. Lieberman, Y. Shani, I. Melnik, S. Yoffe, Y. Sharon, “Near-field optical photomask repair with a femtosecond laser,” J. Microsc. (Oxford) 194, 537–541 (1999).
[CrossRef]

1998 (5)

M. Tang, S. M. Cai, Z. F. Liu, “Direct-nanolithography on gelatin film using scanning near-field optical microscopy,” Opt. Commun. 146, 21–24 (1998).
[CrossRef]

A. Heilmann, J. Werner, “In situ observation of microstructural changes of embedded silver particles,” Thin Solid Films 317, 21–26 (1998), and references therein.

A. Heilmann, M. Quinten, J. Werner, “Optical response of thin plasma-polymer films with non-spherical silver nanoparticles,” Eur. J. Phys. B 3, 455–461 (1998).
[CrossRef]

D. Ngoc Uan, A. Heilmann, “Determination of thermally induced microstructural changes of embedded metal nanoparticles by lateral and cross-sectional transmission electron microscopy,” Vacuum 49, 51–57 (1998).
[CrossRef]

V. P. Safonov, V. M. Shalaev, V. A. Markel, Yu. E. Danilova, N. N. Lepeshkin, W. Kim, S. G. Rautian, R. L. Armstrong, “Spectral dependence of selective photomodification in fractal aggregates of colloidal particles,” Phys. Rev. Lett. 80, 1102–1105 (1998).
[CrossRef]

1997 (2)

M. B. Stern, “Pattern transfer for diffractive and refractive microoptics,” Microelectron. Eng. 34, 299–319 (1997).
[CrossRef]

K. Miura, J. Qiu, H. Inouye, T. Mitsuyu, K. Hirao, “Photowritten optical waveguides in various glasses with ultrashort pulse laser,” Appl. Phys. Lett. 71, 3329–3331 (1997).
[CrossRef]

1995 (1)

J. Werner, A. Heilmann, F. Müller, “Electron beam induced coalescence in plasma polymer silver composite films,” Appl. Phys. Lett. 66, 3436–3438 (1995).
[CrossRef]

1994 (3)

J. Werner, A. Heilmann, V. Hopfe, F. Homilius, B. Steiger, O. Stenzel, “Changes of the optical properties of plasma polymer silver composite films caused by laser annealing,” Thin Solid Films 237, 193–199 (1994).
[CrossRef]

T. L. Morkved, P. Wiltzius, H. M. Jaeger, D. G. Grier, T. A. Witten, “Mesoscopic self-assembly of gold islands on diblock-copolymer films,” Appl. Phys. Lett. 64, 422–424 (1994).
[CrossRef]

P. B. Comita, E. Kay, R. Zhang, W. Jacob, “Laser-induced coalescence of gold clusters in fluorocarbon composite thin films,” Appl. Surf. Sci. 79/80, 196–202 (1994).

1993 (1)

R. H. Magruder, Li Yang, R. F. Haglund, C. W. White, L. Yang, R. Dorsinville, R. R. Alfano, “Optical properties of gold nanocluster composites formed by deep ion implantation in silica,” Appl. Phys. Lett. 62, 1730–1732 (1993).
[CrossRef]

1986 (1)

E. Kay, “Synthesis and properties of metal clusters in polymeric matrices,” Z. Phys. D 3, 251–262 (1986).
[CrossRef]

1981 (1)

U. Ch. Fischer and H. P. Zingsheim, “Submicroscopic pattern replication with visible light,” J. Vac. Sci. Technol. 19, 881–885 (1981).
[CrossRef]

Alfano, R. R.

R. H. Magruder, Li Yang, R. F. Haglund, C. W. White, L. Yang, R. Dorsinville, R. R. Alfano, “Optical properties of gold nanocluster composites formed by deep ion implantation in silica,” Appl. Phys. Lett. 62, 1730–1732 (1993).
[CrossRef]

Armstrong, R. L.

V. P. Safonov, V. M. Shalaev, V. A. Markel, Yu. E. Danilova, N. N. Lepeshkin, W. Kim, S. G. Rautian, R. L. Armstrong, “Spectral dependence of selective photomodification in fractal aggregates of colloidal particles,” Phys. Rev. Lett. 80, 1102–1105 (1998).
[CrossRef]

Cai, S. M.

M. Tang, S. M. Cai, Z. F. Liu, “Direct-nanolithography on gelatin film using scanning near-field optical microscopy,” Opt. Commun. 146, 21–24 (1998).
[CrossRef]

Comita, P. B.

P. B. Comita, E. Kay, R. Zhang, W. Jacob, “Laser-induced coalescence of gold clusters in fluorocarbon composite thin films,” Appl. Surf. Sci. 79/80, 196–202 (1994).

Danilova, Yu. E.

V. P. Safonov, V. M. Shalaev, V. A. Markel, Yu. E. Danilova, N. N. Lepeshkin, W. Kim, S. G. Rautian, R. L. Armstrong, “Spectral dependence of selective photomodification in fractal aggregates of colloidal particles,” Phys. Rev. Lett. 80, 1102–1105 (1998).
[CrossRef]

Dorsinville, R.

R. H. Magruder, Li Yang, R. F. Haglund, C. W. White, L. Yang, R. Dorsinville, R. R. Alfano, “Optical properties of gold nanocluster composites formed by deep ion implantation in silica,” Appl. Phys. Lett. 62, 1730–1732 (1993).
[CrossRef]

Dziomba, T.

U. C. Fischer, A. Naber, T. Dziomba, J. Koglin, W. Gohde, O. Panzer, H. Fuchs, “Near-field optical tools to read, write and copy information at the 100–10 nm scale,” in Laser Techniques for Surface Science III, H. Dai, H. Freund, eds., Proc. SPIE3272, 2–6 (1998).
[CrossRef]

Ehrfeld, W.

L. Weber, W. Ehrfeld, H. Freimuth, M. Lacher, H. Lehr, B. Pech, “Micro molding—a powerful tool for the large scale production of precise microstructures,” in Micromachining and Microfabrication Process Technology II, S. W. Pang, S. Chang, eds., Proc. SPIE2879, 156–167 (1996).
[CrossRef]

Fischer, U. C.

U. C. Fischer, A. Naber, T. Dziomba, J. Koglin, W. Gohde, O. Panzer, H. Fuchs, “Near-field optical tools to read, write and copy information at the 100–10 nm scale,” in Laser Techniques for Surface Science III, H. Dai, H. Freund, eds., Proc. SPIE3272, 2–6 (1998).
[CrossRef]

Fischer and H. P. Zingsheim, U. Ch.

U. Ch. Fischer and H. P. Zingsheim, “Submicroscopic pattern replication with visible light,” J. Vac. Sci. Technol. 19, 881–885 (1981).
[CrossRef]

Freimuth, H.

L. Weber, W. Ehrfeld, H. Freimuth, M. Lacher, H. Lehr, B. Pech, “Micro molding—a powerful tool for the large scale production of precise microstructures,” in Micromachining and Microfabrication Process Technology II, S. W. Pang, S. Chang, eds., Proc. SPIE2879, 156–167 (1996).
[CrossRef]

Fuchs, H.

U. C. Fischer, A. Naber, T. Dziomba, J. Koglin, W. Gohde, O. Panzer, H. Fuchs, “Near-field optical tools to read, write and copy information at the 100–10 nm scale,” in Laser Techniques for Surface Science III, H. Dai, H. Freund, eds., Proc. SPIE3272, 2–6 (1998).
[CrossRef]

Fukuda, H.

V. V. Polonski, Y. Yamamoto, M. Kourogi, H. Fukuda, M. Ohtsu, “Nanometric patterning of zinc by optical near-field photochemical vapour deposition,” J. Microsc. (Oxford) 194, 545–551 (1999).
[CrossRef]

Gohde, W.

U. C. Fischer, A. Naber, T. Dziomba, J. Koglin, W. Gohde, O. Panzer, H. Fuchs, “Near-field optical tools to read, write and copy information at the 100–10 nm scale,” in Laser Techniques for Surface Science III, H. Dai, H. Freund, eds., Proc. SPIE3272, 2–6 (1998).
[CrossRef]

Grebner, W.

A. B. R. Mayer, W. Grebner, R. Wannemacher, “Preparation of silver–latex composites,” J. Phys. Chem. B 104, 7278–7285 (2000).
[CrossRef]

Grier, D. G.

T. L. Morkved, P. Wiltzius, H. M. Jaeger, D. G. Grier, T. A. Witten, “Mesoscopic self-assembly of gold islands on diblock-copolymer films,” Appl. Phys. Lett. 64, 422–424 (1994).
[CrossRef]

Haglund, R. F.

R. H. Magruder, Li Yang, R. F. Haglund, C. W. White, L. Yang, R. Dorsinville, R. R. Alfano, “Optical properties of gold nanocluster composites formed by deep ion implantation in silica,” Appl. Phys. Lett. 62, 1730–1732 (1993).
[CrossRef]

Heilmann, A.

D. Ngoc Uan, A. Heilmann, “Determination of thermally induced microstructural changes of embedded metal nanoparticles by lateral and cross-sectional transmission electron microscopy,” Vacuum 49, 51–57 (1998).
[CrossRef]

A. Heilmann, M. Quinten, J. Werner, “Optical response of thin plasma-polymer films with non-spherical silver nanoparticles,” Eur. J. Phys. B 3, 455–461 (1998).
[CrossRef]

A. Heilmann, J. Werner, “In situ observation of microstructural changes of embedded silver particles,” Thin Solid Films 317, 21–26 (1998), and references therein.

J. Werner, A. Heilmann, F. Müller, “Electron beam induced coalescence in plasma polymer silver composite films,” Appl. Phys. Lett. 66, 3436–3438 (1995).
[CrossRef]

J. Werner, A. Heilmann, V. Hopfe, F. Homilius, B. Steiger, O. Stenzel, “Changes of the optical properties of plasma polymer silver composite films caused by laser annealing,” Thin Solid Films 237, 193–199 (1994).
[CrossRef]

A. Heilmann, G. Kampfrath, V. Hopfe, “Optical properties of plasma-polymer–silver composite films and their simulation by means of effective medium theories,” in Linear Optical Composite Materials, A. Lakhtakia, ed., Vol. 120 of SPIE Milestone Series (Society for Photo-Optical Instrumentation Engineers, Bellingham, Wash., 1996), pp. 429–437.

Hirao, K.

K. Miura, J. Qiu, H. Inouye, T. Mitsuyu, K. Hirao, “Photowritten optical waveguides in various glasses with ultrashort pulse laser,” Appl. Phys. Lett. 71, 3329–3331 (1997).
[CrossRef]

Homilius, F.

J. Werner, A. Heilmann, V. Hopfe, F. Homilius, B. Steiger, O. Stenzel, “Changes of the optical properties of plasma polymer silver composite films caused by laser annealing,” Thin Solid Films 237, 193–199 (1994).
[CrossRef]

Hopfe, V.

J. Werner, A. Heilmann, V. Hopfe, F. Homilius, B. Steiger, O. Stenzel, “Changes of the optical properties of plasma polymer silver composite films caused by laser annealing,” Thin Solid Films 237, 193–199 (1994).
[CrossRef]

A. Heilmann, G. Kampfrath, V. Hopfe, “Optical properties of plasma-polymer–silver composite films and their simulation by means of effective medium theories,” in Linear Optical Composite Materials, A. Lakhtakia, ed., Vol. 120 of SPIE Milestone Series (Society for Photo-Optical Instrumentation Engineers, Bellingham, Wash., 1996), pp. 429–437.

Inouye, H.

K. Miura, J. Qiu, H. Inouye, T. Mitsuyu, K. Hirao, “Photowritten optical waveguides in various glasses with ultrashort pulse laser,” Appl. Phys. Lett. 71, 3329–3331 (1997).
[CrossRef]

Jacob, W.

P. B. Comita, E. Kay, R. Zhang, W. Jacob, “Laser-induced coalescence of gold clusters in fluorocarbon composite thin films,” Appl. Surf. Sci. 79/80, 196–202 (1994).

Jaeger, H. M.

T. L. Morkved, P. Wiltzius, H. M. Jaeger, D. G. Grier, T. A. Witten, “Mesoscopic self-assembly of gold islands on diblock-copolymer films,” Appl. Phys. Lett. 64, 422–424 (1994).
[CrossRef]

Kampfrath, G.

A. Heilmann, G. Kampfrath, V. Hopfe, “Optical properties of plasma-polymer–silver composite films and their simulation by means of effective medium theories,” in Linear Optical Composite Materials, A. Lakhtakia, ed., Vol. 120 of SPIE Milestone Series (Society for Photo-Optical Instrumentation Engineers, Bellingham, Wash., 1996), pp. 429–437.

Kay, E.

P. B. Comita, E. Kay, R. Zhang, W. Jacob, “Laser-induced coalescence of gold clusters in fluorocarbon composite thin films,” Appl. Surf. Sci. 79/80, 196–202 (1994).

E. Kay, “Synthesis and properties of metal clusters in polymeric matrices,” Z. Phys. D 3, 251–262 (1986).
[CrossRef]

Kim, W.

V. P. Safonov, V. M. Shalaev, V. A. Markel, Yu. E. Danilova, N. N. Lepeshkin, W. Kim, S. G. Rautian, R. L. Armstrong, “Spectral dependence of selective photomodification in fractal aggregates of colloidal particles,” Phys. Rev. Lett. 80, 1102–1105 (1998).
[CrossRef]

Koglin, J.

U. C. Fischer, A. Naber, T. Dziomba, J. Koglin, W. Gohde, O. Panzer, H. Fuchs, “Near-field optical tools to read, write and copy information at the 100–10 nm scale,” in Laser Techniques for Surface Science III, H. Dai, H. Freund, eds., Proc. SPIE3272, 2–6 (1998).
[CrossRef]

Kourogi, M.

V. V. Polonski, Y. Yamamoto, M. Kourogi, H. Fukuda, M. Ohtsu, “Nanometric patterning of zinc by optical near-field photochemical vapour deposition,” J. Microsc. (Oxford) 194, 545–551 (1999).
[CrossRef]

Lacher, M.

L. Weber, W. Ehrfeld, H. Freimuth, M. Lacher, H. Lehr, B. Pech, “Micro molding—a powerful tool for the large scale production of precise microstructures,” in Micromachining and Microfabrication Process Technology II, S. W. Pang, S. Chang, eds., Proc. SPIE2879, 156–167 (1996).
[CrossRef]

Lehr, H.

L. Weber, W. Ehrfeld, H. Freimuth, M. Lacher, H. Lehr, B. Pech, “Micro molding—a powerful tool for the large scale production of precise microstructures,” in Micromachining and Microfabrication Process Technology II, S. W. Pang, S. Chang, eds., Proc. SPIE2879, 156–167 (1996).
[CrossRef]

Lepeshkin, N. N.

V. P. Safonov, V. M. Shalaev, V. A. Markel, Yu. E. Danilova, N. N. Lepeshkin, W. Kim, S. G. Rautian, R. L. Armstrong, “Spectral dependence of selective photomodification in fractal aggregates of colloidal particles,” Phys. Rev. Lett. 80, 1102–1105 (1998).
[CrossRef]

Lieberman, K.

K. Lieberman, Y. Shani, I. Melnik, S. Yoffe, Y. Sharon, “Near-field optical photomask repair with a femtosecond laser,” J. Microsc. (Oxford) 194, 537–541 (1999).
[CrossRef]

Liu, Z. F.

M. Tang, S. M. Cai, Z. F. Liu, “Direct-nanolithography on gelatin film using scanning near-field optical microscopy,” Opt. Commun. 146, 21–24 (1998).
[CrossRef]

Magruder, R. H.

R. H. Magruder, Li Yang, R. F. Haglund, C. W. White, L. Yang, R. Dorsinville, R. R. Alfano, “Optical properties of gold nanocluster composites formed by deep ion implantation in silica,” Appl. Phys. Lett. 62, 1730–1732 (1993).
[CrossRef]

Markel, V. A.

V. P. Safonov, V. M. Shalaev, V. A. Markel, Yu. E. Danilova, N. N. Lepeshkin, W. Kim, S. G. Rautian, R. L. Armstrong, “Spectral dependence of selective photomodification in fractal aggregates of colloidal particles,” Phys. Rev. Lett. 80, 1102–1105 (1998).
[CrossRef]

Mayer, A. B. R.

A. B. R. Mayer, W. Grebner, R. Wannemacher, “Preparation of silver–latex composites,” J. Phys. Chem. B 104, 7278–7285 (2000).
[CrossRef]

Melnik, I.

K. Lieberman, Y. Shani, I. Melnik, S. Yoffe, Y. Sharon, “Near-field optical photomask repair with a femtosecond laser,” J. Microsc. (Oxford) 194, 537–541 (1999).
[CrossRef]

Mitsuyu, T.

K. Miura, J. Qiu, H. Inouye, T. Mitsuyu, K. Hirao, “Photowritten optical waveguides in various glasses with ultrashort pulse laser,” Appl. Phys. Lett. 71, 3329–3331 (1997).
[CrossRef]

Miura, K.

K. Miura, J. Qiu, H. Inouye, T. Mitsuyu, K. Hirao, “Photowritten optical waveguides in various glasses with ultrashort pulse laser,” Appl. Phys. Lett. 71, 3329–3331 (1997).
[CrossRef]

Morkved, T. L.

T. L. Morkved, P. Wiltzius, H. M. Jaeger, D. G. Grier, T. A. Witten, “Mesoscopic self-assembly of gold islands on diblock-copolymer films,” Appl. Phys. Lett. 64, 422–424 (1994).
[CrossRef]

Müller, F.

J. Werner, A. Heilmann, F. Müller, “Electron beam induced coalescence in plasma polymer silver composite films,” Appl. Phys. Lett. 66, 3436–3438 (1995).
[CrossRef]

Naber, A.

U. C. Fischer, A. Naber, T. Dziomba, J. Koglin, W. Gohde, O. Panzer, H. Fuchs, “Near-field optical tools to read, write and copy information at the 100–10 nm scale,” in Laser Techniques for Surface Science III, H. Dai, H. Freund, eds., Proc. SPIE3272, 2–6 (1998).
[CrossRef]

Ngoc Uan, D.

D. Ngoc Uan, A. Heilmann, “Determination of thermally induced microstructural changes of embedded metal nanoparticles by lateral and cross-sectional transmission electron microscopy,” Vacuum 49, 51–57 (1998).
[CrossRef]

Ohtsu, M.

V. V. Polonski, Y. Yamamoto, M. Kourogi, H. Fukuda, M. Ohtsu, “Nanometric patterning of zinc by optical near-field photochemical vapour deposition,” J. Microsc. (Oxford) 194, 545–551 (1999).
[CrossRef]

Panzer, O.

U. C. Fischer, A. Naber, T. Dziomba, J. Koglin, W. Gohde, O. Panzer, H. Fuchs, “Near-field optical tools to read, write and copy information at the 100–10 nm scale,” in Laser Techniques for Surface Science III, H. Dai, H. Freund, eds., Proc. SPIE3272, 2–6 (1998).
[CrossRef]

Pech, B.

L. Weber, W. Ehrfeld, H. Freimuth, M. Lacher, H. Lehr, B. Pech, “Micro molding—a powerful tool for the large scale production of precise microstructures,” in Micromachining and Microfabrication Process Technology II, S. W. Pang, S. Chang, eds., Proc. SPIE2879, 156–167 (1996).
[CrossRef]

Polonski, V. V.

V. V. Polonski, Y. Yamamoto, M. Kourogi, H. Fukuda, M. Ohtsu, “Nanometric patterning of zinc by optical near-field photochemical vapour deposition,” J. Microsc. (Oxford) 194, 545–551 (1999).
[CrossRef]

Qiu, J.

K. Miura, J. Qiu, H. Inouye, T. Mitsuyu, K. Hirao, “Photowritten optical waveguides in various glasses with ultrashort pulse laser,” Appl. Phys. Lett. 71, 3329–3331 (1997).
[CrossRef]

Quinten, M.

A. Heilmann, M. Quinten, J. Werner, “Optical response of thin plasma-polymer films with non-spherical silver nanoparticles,” Eur. J. Phys. B 3, 455–461 (1998).
[CrossRef]

Rautian, S. G.

V. P. Safonov, V. M. Shalaev, V. A. Markel, Yu. E. Danilova, N. N. Lepeshkin, W. Kim, S. G. Rautian, R. L. Armstrong, “Spectral dependence of selective photomodification in fractal aggregates of colloidal particles,” Phys. Rev. Lett. 80, 1102–1105 (1998).
[CrossRef]

Safonov, V. P.

V. P. Safonov, V. M. Shalaev, V. A. Markel, Yu. E. Danilova, N. N. Lepeshkin, W. Kim, S. G. Rautian, R. L. Armstrong, “Spectral dependence of selective photomodification in fractal aggregates of colloidal particles,” Phys. Rev. Lett. 80, 1102–1105 (1998).
[CrossRef]

Shalaev, V. M.

V. P. Safonov, V. M. Shalaev, V. A. Markel, Yu. E. Danilova, N. N. Lepeshkin, W. Kim, S. G. Rautian, R. L. Armstrong, “Spectral dependence of selective photomodification in fractal aggregates of colloidal particles,” Phys. Rev. Lett. 80, 1102–1105 (1998).
[CrossRef]

Shani, Y.

K. Lieberman, Y. Shani, I. Melnik, S. Yoffe, Y. Sharon, “Near-field optical photomask repair with a femtosecond laser,” J. Microsc. (Oxford) 194, 537–541 (1999).
[CrossRef]

Sharon, Y.

K. Lieberman, Y. Shani, I. Melnik, S. Yoffe, Y. Sharon, “Near-field optical photomask repair with a femtosecond laser,” J. Microsc. (Oxford) 194, 537–541 (1999).
[CrossRef]

Steiger, B.

J. Werner, A. Heilmann, V. Hopfe, F. Homilius, B. Steiger, O. Stenzel, “Changes of the optical properties of plasma polymer silver composite films caused by laser annealing,” Thin Solid Films 237, 193–199 (1994).
[CrossRef]

Stenzel, O.

J. Werner, A. Heilmann, V. Hopfe, F. Homilius, B. Steiger, O. Stenzel, “Changes of the optical properties of plasma polymer silver composite films caused by laser annealing,” Thin Solid Films 237, 193–199 (1994).
[CrossRef]

Stern, M. B.

M. B. Stern, “Pattern transfer for diffractive and refractive microoptics,” Microelectron. Eng. 34, 299–319 (1997).
[CrossRef]

Tang, M.

M. Tang, S. M. Cai, Z. F. Liu, “Direct-nanolithography on gelatin film using scanning near-field optical microscopy,” Opt. Commun. 146, 21–24 (1998).
[CrossRef]

Wannemacher, R.

A. B. R. Mayer, W. Grebner, R. Wannemacher, “Preparation of silver–latex composites,” J. Phys. Chem. B 104, 7278–7285 (2000).
[CrossRef]

Weber, L.

L. Weber, W. Ehrfeld, H. Freimuth, M. Lacher, H. Lehr, B. Pech, “Micro molding—a powerful tool for the large scale production of precise microstructures,” in Micromachining and Microfabrication Process Technology II, S. W. Pang, S. Chang, eds., Proc. SPIE2879, 156–167 (1996).
[CrossRef]

Werner, J.

A. Heilmann, M. Quinten, J. Werner, “Optical response of thin plasma-polymer films with non-spherical silver nanoparticles,” Eur. J. Phys. B 3, 455–461 (1998).
[CrossRef]

A. Heilmann, J. Werner, “In situ observation of microstructural changes of embedded silver particles,” Thin Solid Films 317, 21–26 (1998), and references therein.

J. Werner, A. Heilmann, F. Müller, “Electron beam induced coalescence in plasma polymer silver composite films,” Appl. Phys. Lett. 66, 3436–3438 (1995).
[CrossRef]

J. Werner, A. Heilmann, V. Hopfe, F. Homilius, B. Steiger, O. Stenzel, “Changes of the optical properties of plasma polymer silver composite films caused by laser annealing,” Thin Solid Films 237, 193–199 (1994).
[CrossRef]

White, C. W.

R. H. Magruder, Li Yang, R. F. Haglund, C. W. White, L. Yang, R. Dorsinville, R. R. Alfano, “Optical properties of gold nanocluster composites formed by deep ion implantation in silica,” Appl. Phys. Lett. 62, 1730–1732 (1993).
[CrossRef]

Wiltzius, P.

T. L. Morkved, P. Wiltzius, H. M. Jaeger, D. G. Grier, T. A. Witten, “Mesoscopic self-assembly of gold islands on diblock-copolymer films,” Appl. Phys. Lett. 64, 422–424 (1994).
[CrossRef]

Witten, T. A.

T. L. Morkved, P. Wiltzius, H. M. Jaeger, D. G. Grier, T. A. Witten, “Mesoscopic self-assembly of gold islands on diblock-copolymer films,” Appl. Phys. Lett. 64, 422–424 (1994).
[CrossRef]

Yamamoto, Y.

V. V. Polonski, Y. Yamamoto, M. Kourogi, H. Fukuda, M. Ohtsu, “Nanometric patterning of zinc by optical near-field photochemical vapour deposition,” J. Microsc. (Oxford) 194, 545–551 (1999).
[CrossRef]

Yang, L.

R. H. Magruder, Li Yang, R. F. Haglund, C. W. White, L. Yang, R. Dorsinville, R. R. Alfano, “Optical properties of gold nanocluster composites formed by deep ion implantation in silica,” Appl. Phys. Lett. 62, 1730–1732 (1993).
[CrossRef]

Yang, Li

R. H. Magruder, Li Yang, R. F. Haglund, C. W. White, L. Yang, R. Dorsinville, R. R. Alfano, “Optical properties of gold nanocluster composites formed by deep ion implantation in silica,” Appl. Phys. Lett. 62, 1730–1732 (1993).
[CrossRef]

Yoffe, S.

K. Lieberman, Y. Shani, I. Melnik, S. Yoffe, Y. Sharon, “Near-field optical photomask repair with a femtosecond laser,” J. Microsc. (Oxford) 194, 537–541 (1999).
[CrossRef]

Zhang, R.

P. B. Comita, E. Kay, R. Zhang, W. Jacob, “Laser-induced coalescence of gold clusters in fluorocarbon composite thin films,” Appl. Surf. Sci. 79/80, 196–202 (1994).

Appl. Phys. Lett. (4)

K. Miura, J. Qiu, H. Inouye, T. Mitsuyu, K. Hirao, “Photowritten optical waveguides in various glasses with ultrashort pulse laser,” Appl. Phys. Lett. 71, 3329–3331 (1997).
[CrossRef]

T. L. Morkved, P. Wiltzius, H. M. Jaeger, D. G. Grier, T. A. Witten, “Mesoscopic self-assembly of gold islands on diblock-copolymer films,” Appl. Phys. Lett. 64, 422–424 (1994).
[CrossRef]

R. H. Magruder, Li Yang, R. F. Haglund, C. W. White, L. Yang, R. Dorsinville, R. R. Alfano, “Optical properties of gold nanocluster composites formed by deep ion implantation in silica,” Appl. Phys. Lett. 62, 1730–1732 (1993).
[CrossRef]

J. Werner, A. Heilmann, F. Müller, “Electron beam induced coalescence in plasma polymer silver composite films,” Appl. Phys. Lett. 66, 3436–3438 (1995).
[CrossRef]

Appl. Surf. Sci. (1)

P. B. Comita, E. Kay, R. Zhang, W. Jacob, “Laser-induced coalescence of gold clusters in fluorocarbon composite thin films,” Appl. Surf. Sci. 79/80, 196–202 (1994).

Eur. J. Phys. B (1)

A. Heilmann, M. Quinten, J. Werner, “Optical response of thin plasma-polymer films with non-spherical silver nanoparticles,” Eur. J. Phys. B 3, 455–461 (1998).
[CrossRef]

J. Microsc. (Oxford) (2)

V. V. Polonski, Y. Yamamoto, M. Kourogi, H. Fukuda, M. Ohtsu, “Nanometric patterning of zinc by optical near-field photochemical vapour deposition,” J. Microsc. (Oxford) 194, 545–551 (1999).
[CrossRef]

K. Lieberman, Y. Shani, I. Melnik, S. Yoffe, Y. Sharon, “Near-field optical photomask repair with a femtosecond laser,” J. Microsc. (Oxford) 194, 537–541 (1999).
[CrossRef]

J. Phys. Chem. B (1)

A. B. R. Mayer, W. Grebner, R. Wannemacher, “Preparation of silver–latex composites,” J. Phys. Chem. B 104, 7278–7285 (2000).
[CrossRef]

J. Vac. Sci. Technol. (1)

U. Ch. Fischer and H. P. Zingsheim, “Submicroscopic pattern replication with visible light,” J. Vac. Sci. Technol. 19, 881–885 (1981).
[CrossRef]

Microelectron. Eng. (1)

M. B. Stern, “Pattern transfer for diffractive and refractive microoptics,” Microelectron. Eng. 34, 299–319 (1997).
[CrossRef]

Opt. Commun. (1)

M. Tang, S. M. Cai, Z. F. Liu, “Direct-nanolithography on gelatin film using scanning near-field optical microscopy,” Opt. Commun. 146, 21–24 (1998).
[CrossRef]

Phys. Rev. Lett. (1)

V. P. Safonov, V. M. Shalaev, V. A. Markel, Yu. E. Danilova, N. N. Lepeshkin, W. Kim, S. G. Rautian, R. L. Armstrong, “Spectral dependence of selective photomodification in fractal aggregates of colloidal particles,” Phys. Rev. Lett. 80, 1102–1105 (1998).
[CrossRef]

Thin Solid Films (2)

A. Heilmann, J. Werner, “In situ observation of microstructural changes of embedded silver particles,” Thin Solid Films 317, 21–26 (1998), and references therein.

J. Werner, A. Heilmann, V. Hopfe, F. Homilius, B. Steiger, O. Stenzel, “Changes of the optical properties of plasma polymer silver composite films caused by laser annealing,” Thin Solid Films 237, 193–199 (1994).
[CrossRef]

Vacuum (1)

D. Ngoc Uan, A. Heilmann, “Determination of thermally induced microstructural changes of embedded metal nanoparticles by lateral and cross-sectional transmission electron microscopy,” Vacuum 49, 51–57 (1998).
[CrossRef]

Z. Phys. D (1)

E. Kay, “Synthesis and properties of metal clusters in polymeric matrices,” Z. Phys. D 3, 251–262 (1986).
[CrossRef]

Other (3)

L. Weber, W. Ehrfeld, H. Freimuth, M. Lacher, H. Lehr, B. Pech, “Micro molding—a powerful tool for the large scale production of precise microstructures,” in Micromachining and Microfabrication Process Technology II, S. W. Pang, S. Chang, eds., Proc. SPIE2879, 156–167 (1996).
[CrossRef]

A. Heilmann, G. Kampfrath, V. Hopfe, “Optical properties of plasma-polymer–silver composite films and their simulation by means of effective medium theories,” in Linear Optical Composite Materials, A. Lakhtakia, ed., Vol. 120 of SPIE Milestone Series (Society for Photo-Optical Instrumentation Engineers, Bellingham, Wash., 1996), pp. 429–437.

U. C. Fischer, A. Naber, T. Dziomba, J. Koglin, W. Gohde, O. Panzer, H. Fuchs, “Near-field optical tools to read, write and copy information at the 100–10 nm scale,” in Laser Techniques for Surface Science III, H. Dai, H. Freund, eds., Proc. SPIE3272, 2–6 (1998).
[CrossRef]

Cited By

OSA participates in CrossRef's Cited-By Linking service. Citing articles from OSA journals and other participating publishers are listed here.

Alert me when this article is cited.


Figures (4)

Fig. 1
Fig. 1

Transmission spectra of the laser-irradiated composite thin film in the focal region as a function of the irradiation time. Laser power, 7 mW; 0.8 NA, f = 3.3 mm microscope lens. Transmission spectrum before irradiation (solid curve), transmission spectrum after laser irradiation for 1 s (dashed curve), 5 s (dotted curve), 38 s (dotted–dashed curve), 60 s (double-dotted–dashed curve).

Fig. 2
Fig. 2

SEM images of laser-irradiated dots on a plasmapolymer–silver nanoparticle composite thin film. (a) Four dots irradiated with total laser power, 7 mW for a duration of 5, 8, 21, and 30 s, respectively, for dots in upper left to lower right corners. Scale bar, 1 µm. (b) High-resolution image of dot in lower-right corner of Fig. 2(a). Scale bar, 300 nm.

Fig. 3
Fig. 3

Scanning microscope images of a pattern of laser-modified dots, integrated over the spectral regions indicated in the figure. Irradiation times 250 ms to 60 s from top left to bottom right of the figure. Laser power, 7 mW. Image size, 11 µm × 11 µm.

Fig. 4
Fig. 4

Scanning microscope images of a Fresnel lens of 19.5-µm diameter with five dark and five bright regions generated by laser-induced coalescence of silver nanoparticles in the silver–plasmapolymer composite thin film. The upper row of graphs represents the transmission profiles along the white line indicated in the middle row of images. The images in the lower row display the intensity in a plane perpendicular to the film and containing the optical axis. In each case the transmitted light is integrated over the given the spectral range.

Metrics