Abstract

New feasibilities are considered for the optical-correlation diagnostics of rough surfaces with different distributions of irregularities. The influence of deviations of the height surface roughness distribution from a Gaussian probability distribution on the accuracy of optical analysis is discussed. Possibilities for the optical diagnostics of fractal surface structures are shown, and a set of statistical and dimensional parameters of the scattered fields for surface roughness diagnostics is determined. Finally, a multifunctional measuring device for estimating these parameters is proposed.

© 2001 Optical Society of America

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