New feasibilities for characterizing rough surfaces by optical-correlation techniques

Oleg V. Angelsky; Peter P. Maksimyak; Vasyl V. Ryukhtin; Steen G. Hanson

doi:10.1364/AO.40.005693

New feasibilities for characterizing rough surfaces by optical-correlation techniques

Oleg V. Angelsky, Peter P. Maksimyak, Vasyl V. Ryukhtin, and Steen G. Hanson

Applied Optics
Vol. 40,
Issue 31,
pp. 5693-5707
(2001)
•https://doi.org/10.1364/AO.40.005693

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Oleg V. Angelsky, Peter P. Maksimyak, Vasyl V. Ryukhtin, and Steen G. Hanson, "New feasibilities for characterizing rough surfaces by optical-correlation techniques," Appl. Opt. 40, 5693-5707 (2001)

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Previously assigned OCIS codes
- Speckle (030.6140)
- Interferometry (120.3180)
- Surfaces (240.6700)

About this Article
History
- Original Manuscript: December 12, 2000
- Revised Manuscript: June 14, 2001
- Published: November 1, 2001

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Abstract

New feasibilities are considered for the optical-correlation diagnostics of rough surfaces with different distributions of irregularities. The influence of deviations of the height surface roughness distribution from a Gaussian probability distribution on the accuracy of optical analysis is discussed. Possibilities for the optical diagnostics of fractal surface structures are shown, and a set of statistical and dimensional parameters of the scattered fields for surface roughness diagnostics is determined. Finally, a multifunctional measuring device for estimating these parameters is proposed.

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h _max (nm)	σ_φ	Fractal			Random
h _max (nm)	σ_φ	0	1R	1S	0	1R	2R	1S	2S
100	h	0.019	0.010	0.022	0.018	0.011	0.004	0.017	0.006
	cf	0.023	0.014	0.030	0.016	0.013	0.004	0.018	0.005
200	h	0.078	0.040	0.090	0.073	0.208	0.017	0.068	0.027
	cf	0.087	0.051	0.103	0.072	0.212	0.017	0.071	0.025
400	h	0.313	0.160	0.360	0.290	0.043	0.070	0.270	0.102
	cf	0.339	0.188	0.392	0.307	0.047	0.074	0.274	0.097

Surface\/Dimension	D _f ^t	D _f ^p	D _f ^c
R0	2.503	2.49	2.55
R1R	2.44	2.47	2.51
R1S	2.48	2.48	2.53
R2R	2.32	2.36	2.42
R2S	2.35	2.39	2.44
F0	2.44	2.45	2.42
F1R	2.36	2.38	2.44
F1S	2.45	2.43	2.48
F2R	2.26	2.31	2.36
F2S	2.38	2.36	2.39

h _max (nm)	σ_φ	Fractal			Random
h _max (nm)	σ_φ	0	1R	1S	0	1R	2R	1S	2S
100	h	0.019	0.010	0.022	0.018	0.011	0.004	0.017	0.006
	cf	0.023	0.014	0.030	0.016	0.013	0.004	0.018	0.005
200	h	0.078	0.040	0.090	0.073	0.208	0.017	0.068	0.027
	cf	0.087	0.051	0.103	0.072	0.212	0.017	0.071	0.025
400	h	0.313	0.160	0.360	0.290	0.043	0.070	0.270	0.102
	cf	0.339	0.188	0.392	0.307	0.047	0.074	0.274	0.097

Surface\/Dimension	D _f ^t	D _f ^p	D _f ^c
R0	2.503	2.49	2.55
R1R	2.44	2.47	2.51
R1S	2.48	2.48	2.53
R2R	2.32	2.36	2.42
R2S	2.35	2.39	2.44
F0	2.44	2.45	2.42
F1R	2.36	2.38	2.44
F1S	2.45	2.43	2.48
F2R	2.26	2.31	2.36
F2S	2.38	2.36	2.39

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