Abstract

We report what we believe to be a novel method for fabrication of permanent submicrometer periodic structures by interference laser fields. The new method is holographic lithography combined with laser-induced thermoplastification. The crystalline structures that result from this new method not only can be maintained permanently after the optical field is evacuated but also can be rewritten by exposure of an inteference laser field for the second time. The process of fabrication is rapid, convenient, and effective.

© 2001 Optical Society of America

Submicrometer defect detection in periodic structures by photorefractive holography: system design and performance

Craig Uhrich and Lambertus Hesselink
Appl. Opt. 33(5) 744-757 (1994)

Fabrication of periodic nanovein structures by holography lithography technique

Ngoc Diep Lai, Yu Di Huang, Jian Hung Lin, Danh Bich Do, and Chia Chen Hsu
Opt. Express 17(5) 3362-3369 (2009)

Rapid fabrication of large-area periodic structures containing well-defined defects by combining holography and mask techniques

Ngoc Diep Lai, Wen Ping Liang, Jian Hung Lin, and Chia Chen Hsu
Opt. Express 13(14) 5331-5337 (2005)

Fabrication of two-dimensional superposed microstructure by interference lithography

Hao Lü, Qiu-Ling Zhao, Qing-Yue Zhang, Dong-Jie Niu, and Xia Wang
Appl. Opt. 51(3) 302-305 (2012)

Pattern-integrated interference lithography: single-exposure fabrication of photonic-crystal structures

Guy M. Burrow, Matthieu C. R. Leibovici, and Thomas K. Gaylord
Appl. Opt. 51(18) 4028-4041 (2012)