Abstract

We describe a capillary discharge source configuration, allowing for collection of extreme-ultraviolet (EUV) radiation at large off-axis angles, without the need for an EUV window. Operating with xenon gas, the source emits intensely within the EUV spectral region at 11.3 and 13.5 nm. When coupled with a high-collection-efficiency optical system, this source may be suitable for a number of high-average-power EUV imaging applications.

© 2001 Optical Society of America

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References

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  1. M. Klosner, W. Silfvast, “Intense xenon capillary-discharge extreme-ultraviolet source in the 10–16-nm-wavelength region,” Opt. Lett. 23, 1609–1611 (1998).
    [CrossRef]
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  4. W. Silfvast, “Intense EUV incoherent plasma sources for EUV lithography and other applications,” IEEE J. Quantum Electron. 35, 700–708 (1999).
    [CrossRef]
  5. M. Klosner, W. Silfvast, “High-temperature lithium metal-vapor capillary discharge extreme-ultraviolet source at 13.5 nm,” Appl. Opt. 39, 3678–3682 (2000).
    [CrossRef]
  6. M. Klosner, W. Silfvast, “Xenon emission spectra identification in the 5–20-nm spectral region in highly ionized xenon capillary-discharge plasmas,” J. Opt. Soc. Am. B 17, 1279–1290 (2000).
    [CrossRef]

2000 (2)

1999 (1)

W. Silfvast, “Intense EUV incoherent plasma sources for EUV lithography and other applications,” IEEE J. Quantum Electron. 35, 700–708 (1999).
[CrossRef]

1998 (1)

1993 (2)

Ceglio, N.

Hawryluk, A.

Klosner, M.

Rosen, R.

Silfvast, W.

Sommargren, G.

Stearns, D.

Vernon, S.

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Figures (4)

Fig. 1
Fig. 1

(a) Differentially pumped capillary (DPC) discharge configuration; (b) uniform pressure capillary (UPC) discharge configuration. The capillary serves as the differential pumping tube for the DPC device, whereas a separate differential pumping assembly is used for the UPC device. Emission from the DPC device can be collected over a full hemisphere.

Fig. 2
Fig. 2

Xenon capillary discharge emission spectra at pressures ranging from 0.3 to 3 Torr. Emission at 13.5 nm is optimized at 0.75 Torr.

Fig. 3
Fig. 3

Intensity output at 13.5 nm measured from xenon DPC and UPC sources.

Fig. 4
Fig. 4

EUV pinhole image of the DPC discharge xenon source. Emission flux was filtered by a 1-µm-thick beryllium foil. The horizontal axis is scaled to the 1-mm diameter of the capillary.

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