Abstract

Two example ultrahigh-spatial-resolution laser-backlit grazing-incidence x-ray microscope designs for inertial confinement fusion (ICF) research have been described [Appl. Opt. 40, 4570 (2001)]. Here details of fabrication, assembly, and optical surface errors that are characteristic of present state-of-the-art superpolished multilayer-coated spherical mirrors are given. They indicate that good image qualities can be expected; in particular, <0.5-µm spatial resolution at very high x-ray energies (up to 25 keV) appears to be feasible: Existing ICF imaging diagnostics approach ∼2 µm spatial at low (<2 keV) energy. The improvement in resolution compared with that of other grazing-incidence devices is attributed to a fortuitous residual on-axis aberration dependence on short wavelengths; recent advances in mirror fabrication, including a new thin-film deposition technique to correct figure errors precisely in one dimension; and novel design. For even higher resolutions, a means of creating precise aspherical mirrors of spheric-quality microroughness may be possible by use of the same deposition technique.

© 2001 Optical Society of America

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