Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Comparison of the Phase Metrics DFHT IV and Zygo Pegasus 2000 fly height testers

Not Accessible

Your library or personal account may give you access

Abstract

The performance of the Phase Metrics DFHT IV (DFHT) fly height tester was compared with the performance of the Zygo Pegasus 2000 (P2000) fly height tester. The testers showed comparable repeatabilities (0.25 nm for the DFHT and 0.30 nm for the P2000) and correlated well at all points except at the center rail trailing edge. The DFHT had a measurement uncertainty of 0.76 nm at a fly height of 25 nm and 0.35 nm near contact. Similarly the P2000 exhibited an uncertainty of 1 nm at 25 nm and 0.5 nm at contact. The measurement uncertainty of the DFHT is due to calibration at a location different from the measurement location; for the P2000, it is primarily due to residual uncertainty in the correction for stress-induced birefringence in the test disk. The P2000 did not recognize the presence of small diamondlike carbon bumps on the air bearing surface. There was a consistent 3-nm absolute offset between the fly height measurements of the two testers. Neither tester possessed a clear advantage over the other in the approaching era of near-contact recording.

© 2001 Optical Society of America

Full Article  |  PDF Article
More Like This
Determining the optical constants of read-write sliders during flying-height testing

Peter de Groot, Ara Dergevorkian, Tod Erickson, and Russell Pavlat
Appl. Opt. 37(22) 5116-5125 (1998)

Calibration method for measurement of linear nanometric distances by scattered total internal reflection

Corley W. Strunk and Paul J. Sides
Appl. Opt. 43(10) 2046-2053 (2004)

Scanning laser differential-heterodyne interferometer for flying-height measurement

Bryan Kok Ann Ngoi, Krishnan Venkatakrishnan, and Bo Tan
Appl. Opt. 39(4) 578-584 (2000)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (9)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Tables (2)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved