Abstract

The performance of the Phase Metrics DFHT IV (DFHT) fly height tester was compared with the performance of the Zygo Pegasus 2000 (P2000) fly height tester. The testers showed comparable repeatabilities (0.25 nm for the DFHT and 0.30 nm for the P2000) and correlated well at all points except at the center rail trailing edge. The DFHT had a measurement uncertainty of 0.76 nm at a fly height of 25 nm and 0.35 nm near contact. Similarly the P2000 exhibited an uncertainty of 1 nm at 25 nm and 0.5 nm at contact. The measurement uncertainty of the DFHT is due to calibration at a location different from the measurement location; for the P2000, it is primarily due to residual uncertainty in the correction for stress-induced birefringence in the test disk. The P2000 did not recognize the presence of small diamondlike carbon bumps on the air bearing surface. There was a consistent 3-nm absolute offset between the fly height measurements of the two testers. Neither tester possessed a clear advantage over the other in the approaching era of near-contact recording.

© 2001 Optical Society of America

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References

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2000 (2)

C. W. Strunk, J. L. Lo, P. J. Sides, “Calibration of fly height measured by scattered total internal reflection,” IEEE Trans. Magn. 36, 2727–2729 (2000).
[CrossRef]

X. Liu, W. Clegg, B. Liu, C. Chow, “Improved intensity interferometry method for measuring head-disk spacing down to contact,” IEEE Trans. Magn. 36, 2674–2676 (2000).
[CrossRef]

1998 (3)

1996 (2)

Azzam, R. M. A.

R. M. A. Azzam, N. M. Bashara, Ellipsometry and Polarized Light (Elsevier Science, Amsterdam, The Netherlands, 1987), pp. 269–363.

Bashara, N. M.

R. M. A. Azzam, N. M. Bashara, Ellipsometry and Polarized Light (Elsevier Science, Amsterdam, The Netherlands, 1987), pp. 269–363.

Bhushan, B.

B. Bhushan, Tribology and Mechanics of Magnetic Storage Devices, 2nd ed. (Springer-Verlag, New York, 1996).
[CrossRef]

Biegen, J.

Chow, C.

X. Liu, W. Clegg, B. Liu, C. Chow, “Improved intensity interferometry method for measuring head-disk spacing down to contact,” IEEE Trans. Magn. 36, 2674–2676 (2000).
[CrossRef]

Clegg, W.

X. Liu, W. Clegg, B. Liu, C. Chow, “Improved intensity interferometry method for measuring head-disk spacing down to contact,” IEEE Trans. Magn. 36, 2674–2676 (2000).
[CrossRef]

de Groot, P.

Deck, L.

Dergevorkian, A.

Duran, C. A.

C. A. Duran, “Error analysis of a multiwavelength dynamic flying height tester,” IEEE Trans. Magn. 32, 3720–3722 (1996).
[CrossRef]

Erickson, T.

Lacey, C.

C. Lacey, E. W. Russ, “Method and apparatus to calibrate intensity and determine fringer order for interferometric measurement of small spacings,” U.S. patent5,457,534 (10October1995).

C. Lacey, “Method and apparatus to calibrate intensity and determine fringer order for interferometric measurement of small spacings,” U.S. patent5,280,340 (18January1994).

Liu, B.

X. Liu, W. Clegg, B. Liu, C. Chow, “Improved intensity interferometry method for measuring head-disk spacing down to contact,” IEEE Trans. Magn. 36, 2674–2676 (2000).
[CrossRef]

Liu, X.

X. Liu, W. Clegg, B. Liu, C. Chow, “Improved intensity interferometry method for measuring head-disk spacing down to contact,” IEEE Trans. Magn. 36, 2674–2676 (2000).
[CrossRef]

Lo, J.

J. Lo, “Using scattered total internal reflection to measure linear nanometric distances in hard disk drives,” Ph.D. dissertation (Carnegie Mellon University, Pittsburgh, Pa., 1999).

Lo, J. L.

C. W. Strunk, J. L. Lo, P. J. Sides, “Calibration of fly height measured by scattered total internal reflection,” IEEE Trans. Magn. 36, 2727–2729 (2000).
[CrossRef]

Pavlat, R.

Russ, E. W.

C. Lacey, E. W. Russ, “Method and apparatus to calibrate intensity and determine fringer order for interferometric measurement of small spacings,” U.S. patent5,457,534 (10October1995).

Sides, P. J.

C. W. Strunk, J. L. Lo, P. J. Sides, “Calibration of fly height measured by scattered total internal reflection,” IEEE Trans. Magn. 36, 2727–2729 (2000).
[CrossRef]

Soobitsky, J.

Strunk, C. W.

C. W. Strunk, J. L. Lo, P. J. Sides, “Calibration of fly height measured by scattered total internal reflection,” IEEE Trans. Magn. 36, 2727–2729 (2000).
[CrossRef]

Appl. Opt. (2)

IEEE Trans. Magn. (3)

X. Liu, W. Clegg, B. Liu, C. Chow, “Improved intensity interferometry method for measuring head-disk spacing down to contact,” IEEE Trans. Magn. 36, 2674–2676 (2000).
[CrossRef]

C. A. Duran, “Error analysis of a multiwavelength dynamic flying height tester,” IEEE Trans. Magn. 32, 3720–3722 (1996).
[CrossRef]

C. W. Strunk, J. L. Lo, P. J. Sides, “Calibration of fly height measured by scattered total internal reflection,” IEEE Trans. Magn. 36, 2727–2729 (2000).
[CrossRef]

J. Opt. Soc. Am. A (1)

Opt. Lett. (1)

Other (5)

B. Bhushan, Tribology and Mechanics of Magnetic Storage Devices, 2nd ed. (Springer-Verlag, New York, 1996).
[CrossRef]

J. Lo, “Using scattered total internal reflection to measure linear nanometric distances in hard disk drives,” Ph.D. dissertation (Carnegie Mellon University, Pittsburgh, Pa., 1999).

C. Lacey, “Method and apparatus to calibrate intensity and determine fringer order for interferometric measurement of small spacings,” U.S. patent5,280,340 (18January1994).

C. Lacey, E. W. Russ, “Method and apparatus to calibrate intensity and determine fringer order for interferometric measurement of small spacings,” U.S. patent5,457,534 (10October1995).

R. M. A. Azzam, N. M. Bashara, Ellipsometry and Polarized Light (Elsevier Science, Amsterdam, The Netherlands, 1987), pp. 269–363.

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Figures (9)

Fig. 1
Fig. 1

Picture of a hard disk drive, showing the relative positions of the slider, head-gimbal assembly (HGA), actuator arm, and disk.

Fig. 2
Fig. 2

Example of a DFHT calibration plot.

Fig. 3
Fig. 3

Calibration and measurement locations for calibration location testing on the DFHT.

Fig. 4
Fig. 4

Scan sections for the P2000 tester.

Fig. 5
Fig. 5

DFHT crown data for the slider with DLC bumps.

Fig. 6
Fig. 6

DFHT crown data for the slider without DLC bumps.

Fig. 7
Fig. 7

DFHT uncertainty data.

Fig. 8
Fig. 8

P2000 crown data for the slider with DLC bumps.

Fig. 9
Fig. 9

Center rail trailing edge linearity data for the DFHT and P2000 testers.

Tables (2)

Tables Icon

Table 1 Correlation Results

Tables Icon

Table 2 Scan Configuration Sensitivity

Metrics