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Correlation-based method for comparing and reconstructing nearly identical two-dimensional structures

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Abstract

A method for comparing and reconstructing two nearly identical planar objects that are composed of the same number of identical apertures is presented. These structures differ only in the location of one of the apertures. The method is based on a subtraction algorithm, which involves the cross-correlation and autocorrelation functions of the compared structures. Simulated results illustrate the feasibility of the method.

© 2001 Optical Society of America

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