Abstract

We demonstrate 100-nm-resolution holographic aerial image monitoring based on lensless Fourier-transform holography at extreme-UV (EUV) wavelengths, using synchrotron-based illumination. This method can be used to monitor the coherent imaging performance of EUV lithographic optical systems. The system has been implemented in the EUV phase-shifting point-diffraction interferometer recently developed at Lawrence Berkeley National Laboratory. Here we introduce the idea of the holographic aerial image-recording technique and present imaging performance characterization results for a 10× Schwarzschild objective, a prototype EUV lithographic optic. The results are compared with simulations, and good agreement is obtained. Various object patterns, including phase-shift-enhanced patterns, have been studied. Finally, the application of the holographic aerial image-recording technique to EUV multilayer mask-blank defect characterization is discussed.

© 2001 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Tabletop single-shot extreme ultraviolet Fourier transform holography of an extended object

Erik B. Malm, Nils C. Monserud, Christopher G. Brown, Przemyslaw W. Wachulak, Huiwen Xu, Ganesh Balakrishnan, Weilun Chao, Erik Anderson, and Mario C. Marconi
Opt. Express 21(8) 9959-9966 (2013)

At-wavelength, system-level flare characterization of extreme-ultraviolet optical systems

Patrick Naulleau, Kenneth A. Goldberg, Eric M. Gullikson, and Jeffrey Bokor
Appl. Opt. 39(17) 2941-2947 (2000)

Contouring of diffused objects using lensless Fourier transform digital moiré holography

Md. Mosarraf Hossain, Gyanendra Sheoran, Varun Kumar, and Chandra Shakher
Appl. Opt. 51(21) 5331-5339 (2012)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (10)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (4)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription