Abstract

Smooth, continuous-profile diffractive optical elements and other regular microstructures demand advanced characterization methods. Here the problem of reconstructing the profiles with optical scatterometry is addressed for the first time to our knowledge. We represent the profile of a blazed grating with an analytic Chebyshev series. The coefficients of the series are inferred from the far-field diffraction pattern, when the grating profile is illuminated with coherent light. An advanced neural-network model is used as a nonlinear statistical estimator. The reconstruction error is found to be less than 4% as normalized to the depth of the profile, even with realistic measurement errors included in the simulations.

© 2001 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Characterization of diffraction gratings in a rigorous domain with optical scatterometry: hierarchical neural-network model

Ilkka Kallioniemi, Jyrki Saarinen, and Erkki Oja
Appl. Opt. 38(28) 5920-5930 (1999)

Spectral uniformity of two- and four-level diffractive optical elements for spectroscopy.

Hallvard Angelskår, Ib-Rune Johansen, Matthieu Lacolle, Håkon Sagberg, and Aasmund S. Sudbø
Opt. Express 17(12) 10206-10222 (2009)

Superresolution of binary images with a nonlinear interpolative neural network

Carlos A. Dávila and B. R. Hunt
Appl. Opt. 39(14) 2291-2299 (2000)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (6)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Tables (1)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (6)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription