Abstract

The wavelengths of six spectral lines emitted by a molecular fluorine (F₂) laser at 157 nm were measured to high accuracy with the 10.7-m normal-incidence vacuum spectrograph at the National Institute of Standards and Technology. Lines from a Pt–Ne hollow-cathode lamp served as the wavelength standards. Spectra of the laser and the Pt–Ne lamp were photographed simultaneously through an uncoated CaF₂ beam splitter. The optical paths were arranged so as to avoid shifts in line positions arising from possible differences in illumination of the grating by the two sources. The strongest lasing line was found to have a wavelength of 157.63094(10) nm. Changes in wavelength for variations in gas mixture, total gas pressure, and voltage were also measured.

© 2001 Optical Society of America

Absolute measurement of F₂-laser power at 157 nm

Stefan Kück, Friedhelm Brandt, Hans-Albert Kremling, Alexander Gottwald, Arne Hoehl, and Mathias Richter
Appl. Opt. 45(14) 3325-3330 (2006)

Fabrication of strong long-period gratings in hydrogen-free fibers with 157-nm F₂-laser radiation

Kevin P. Chen, Peter R. Herman, Jie Zhang, and Robin Tam
Opt. Lett. 26(11) 771-773 (2001)

Light-scattering measurements of optical thin-film components at 157 and 193 nm

Stefan Gliech, Jörg Steinert, and Angela Duparré
Appl. Opt. 41(16) 3224-3235 (2002)

157-nm coherent light source as an inspection tool for F₂ laser lithography

T. Suganuma, H. Kubo, O. Wakabayashi, H. Mizoguchi, K. Nakao, Y. Nabekawa, T. Togashi, and S. Watanabe
Opt. Lett. 27(1) 46-48 (2002)

Stability of photodiodes under irradiation with a 157-nm pulsed excimer laser

Ping-Shine Shaw, Rajeev Gupta, and Keith R. Lykke
Appl. Opt. 44(2) 197-207 (2005)