Abstract

The plasma-enhanced chemical vapor deposition of optical coatings on plastic substrates leads to the formation of a physically thick (≈50–100-nm) interfacial region (or interphase). We propose, based on our earlier spectroellipsometric (in situ and ex situ) and spectrophotometric (ex situ) studies, an optical model for the description of the interphase refractive-index profile n(z). We study in detail the effect of such an interphase on the spectral performance of various optical filters (antireflective V-coat, W-coat, achromatic W-coat, and minus filter). It is shown that considering the inhomogeneous n(z) profile in the design can improve the optical performance of some filters.

© 2000 Optical Society of America

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  1. J. C. Rostaing, F. Coeuret, B. Drevillon, R. Etemadi, C. Godet, J. Huc, J. Y. Parey, V. A. Yakovlev, “Silicon-based, protective transparent multilayer coatings deposited at high rate on optical polymers by dual-mode MW/r.f. PECVD,” Thin Solid Films 236, 58–63 (1993).
    [CrossRef]
  2. D. Poitras, P. Leroux, J. E. Klemberg-Sapieha, S. C. Gujrathi, L. Martinu, “Characterization of homogeneous and inhomogeneous Si-based optical coatings deposited in dual-frequency plasma,” Opt. Eng. 35, 2690–2699 (1996).
    [CrossRef]
  3. J. E. Klemberg-Sapieha, D. Poitras, L. Martinu, N. L. S. Yamasaki, L. W. Lantman, “Effect of interface on the characteristics of functional films deposited on polycarbonate in dual-frequency plasma,” J. Vac. Sci. Technol. A 15, 985–991 (1997).
    [CrossRef]
  4. A. S. da Silva Sobrinho, N. Schüler, J. E. Klemberg-Sapieha, M. R. Wertheimer, “Plasma-deposited silicon oxide and silicon nitride films on poly(ethylene terephthalate): a multitechnique study of the interphase regions,” J. Vac. Sci. Technol. A 16, 2021–2030 (1998).
    [CrossRef]
  5. L. Martinu, “Plasma deposition and testing of hard coatings on plastics,” in Plasma Processing of Polymers, Vol. 346 of Applied Sciences, R. d’Agostino, P. Favia, F. Fracassi, eds. (NATO ASI/Kluwer Academic, Dordrecht, The Netherlands, 1997), pp. 247–272.
    [CrossRef]
  6. E. M. Liston, L. Martinu, M. R. Wertheimer, “Plasma surface modification of polymers for improved adhesion: a critical review,” J. Adhes. Sci. Technol. 7, 1091–1127 (1993).
    [CrossRef]
  7. A. Bergeron, J. E. Klemberg-Sapieha, L. Martinu, “Structure of the interfacial region between polycarbonate and plasma-deposited SiN1.3 and SiO2 optical coatings studied by ellipsometry,” J. Vac. Sci. Technol. A 16, 3227–3234 (1998).
    [CrossRef]
  8. A. Bergeron, D. Poitras, L. Martinu, “Interphase in plasma deposited silicon nitride optical films on polycarbonate: in situ ellipsometric characterization,” Opt. Eng. (to be published).
  9. S. Vallon, A. Hofrichter, L. Guyot, B. Drévillon, J. E. Klemberg-Sapieha, L. Martinu, F. Poncin-Epaillard, “Adhesion mechanisms of silica layers on plasma treated polymers. Part I: polycarbonate,” J. Adhes. Sci. Technol. 10, 1287–1312 (1996).
    [CrossRef]
  10. J. E. Klemberg-Sapieha, L. Martinu, N. L. S. Yamasaki, C. W. Lantman, Plasma Deposition and Treatment of Polymers, Vol. 544 of Materials Research Society Symposium Proceedings, W. W. Lee, R. d’Agostino, M. R. Wertheimer, eds. (Materials Research Society, Warrendale, Pa., 1998), pp. 277–281.
    [CrossRef]
  11. C. Montcalm, P. A. Kearney, J. M. Slaughter, B. T. Sullivan, M. Chaker, H. Pépin, C. M. Falco, “Survey of Ti-, B-, and Y-based soft-x-ray extreme-ultraviolet multilayer mirrors for the 2–12-nm wavelength region,” Appl. Opt. 35, 5134–5147 (1996).
    [CrossRef] [PubMed]
  12. L. Martinu, J. E. Klemberg-Sapieha, O. M. Kuttel, A. Raveh, M. R. Wertheimer, “Critical ion energy and ion flux in the growth of films by plasma-enhanced chemical vapor deposition,” J. Vac. Sci. Technol. A 12, 1360–1364 (1994).
    [CrossRef]
  13. A. V. Tikhonravov, M. K. Trubetskov, B. T. Sullivan, J. A. Dobrowolski, “Influence of small inhomogeneities on the spectral characteristics of single thin films,” Appl. Opt. 36, 7188–7198 (1997).
    [CrossRef]
  14. F. Abelès, “Recherche sur la propagation des ondes électromagnétiques sinusoïdales dans les milieux stratifiés. Application aux couches minces,” Ann. Phys. (Paris) 5, 596–640 (1950).
  15. H. A. Macleod, Thin-Film Optical Filters, 2nd edition (Hilger, Bristol, 1986).
    [CrossRef]
  16. W. H. Southwell, “Coating design using very thin high- and low-index layers,” Appl. Opt. 24, 457–460 (1985).
    [CrossRef] [PubMed]
  17. D. Rats, D. Poitras, J. M. Soro, L. Martinu, J. von Stebut, “Mechanical properties of plasma-deposited silicon-based inhomogeneous optical coatings,” Surf. Coat. Technol. 111, 220–228 (1999).
    [CrossRef]
  18. S. Dahl, D. Rats, J. von Stebut, L. Martinu, J. E. Klemberg-Sapieha, “Nano- and micro-mechanical characterization of plasma-treated polymer surfaces and plasma-coated polycarbonates surface,” Thin Solid Films 351, 1–5 (1999).

1999

D. Rats, D. Poitras, J. M. Soro, L. Martinu, J. von Stebut, “Mechanical properties of plasma-deposited silicon-based inhomogeneous optical coatings,” Surf. Coat. Technol. 111, 220–228 (1999).
[CrossRef]

S. Dahl, D. Rats, J. von Stebut, L. Martinu, J. E. Klemberg-Sapieha, “Nano- and micro-mechanical characterization of plasma-treated polymer surfaces and plasma-coated polycarbonates surface,” Thin Solid Films 351, 1–5 (1999).

1998

A. S. da Silva Sobrinho, N. Schüler, J. E. Klemberg-Sapieha, M. R. Wertheimer, “Plasma-deposited silicon oxide and silicon nitride films on poly(ethylene terephthalate): a multitechnique study of the interphase regions,” J. Vac. Sci. Technol. A 16, 2021–2030 (1998).
[CrossRef]

A. Bergeron, J. E. Klemberg-Sapieha, L. Martinu, “Structure of the interfacial region between polycarbonate and plasma-deposited SiN1.3 and SiO2 optical coatings studied by ellipsometry,” J. Vac. Sci. Technol. A 16, 3227–3234 (1998).
[CrossRef]

1997

A. V. Tikhonravov, M. K. Trubetskov, B. T. Sullivan, J. A. Dobrowolski, “Influence of small inhomogeneities on the spectral characteristics of single thin films,” Appl. Opt. 36, 7188–7198 (1997).
[CrossRef]

J. E. Klemberg-Sapieha, D. Poitras, L. Martinu, N. L. S. Yamasaki, L. W. Lantman, “Effect of interface on the characteristics of functional films deposited on polycarbonate in dual-frequency plasma,” J. Vac. Sci. Technol. A 15, 985–991 (1997).
[CrossRef]

1996

C. Montcalm, P. A. Kearney, J. M. Slaughter, B. T. Sullivan, M. Chaker, H. Pépin, C. M. Falco, “Survey of Ti-, B-, and Y-based soft-x-ray extreme-ultraviolet multilayer mirrors for the 2–12-nm wavelength region,” Appl. Opt. 35, 5134–5147 (1996).
[CrossRef] [PubMed]

S. Vallon, A. Hofrichter, L. Guyot, B. Drévillon, J. E. Klemberg-Sapieha, L. Martinu, F. Poncin-Epaillard, “Adhesion mechanisms of silica layers on plasma treated polymers. Part I: polycarbonate,” J. Adhes. Sci. Technol. 10, 1287–1312 (1996).
[CrossRef]

D. Poitras, P. Leroux, J. E. Klemberg-Sapieha, S. C. Gujrathi, L. Martinu, “Characterization of homogeneous and inhomogeneous Si-based optical coatings deposited in dual-frequency plasma,” Opt. Eng. 35, 2690–2699 (1996).
[CrossRef]

1994

L. Martinu, J. E. Klemberg-Sapieha, O. M. Kuttel, A. Raveh, M. R. Wertheimer, “Critical ion energy and ion flux in the growth of films by plasma-enhanced chemical vapor deposition,” J. Vac. Sci. Technol. A 12, 1360–1364 (1994).
[CrossRef]

1993

J. C. Rostaing, F. Coeuret, B. Drevillon, R. Etemadi, C. Godet, J. Huc, J. Y. Parey, V. A. Yakovlev, “Silicon-based, protective transparent multilayer coatings deposited at high rate on optical polymers by dual-mode MW/r.f. PECVD,” Thin Solid Films 236, 58–63 (1993).
[CrossRef]

E. M. Liston, L. Martinu, M. R. Wertheimer, “Plasma surface modification of polymers for improved adhesion: a critical review,” J. Adhes. Sci. Technol. 7, 1091–1127 (1993).
[CrossRef]

1985

1950

F. Abelès, “Recherche sur la propagation des ondes électromagnétiques sinusoïdales dans les milieux stratifiés. Application aux couches minces,” Ann. Phys. (Paris) 5, 596–640 (1950).

Abelès, F.

F. Abelès, “Recherche sur la propagation des ondes électromagnétiques sinusoïdales dans les milieux stratifiés. Application aux couches minces,” Ann. Phys. (Paris) 5, 596–640 (1950).

Bergeron, A.

A. Bergeron, J. E. Klemberg-Sapieha, L. Martinu, “Structure of the interfacial region between polycarbonate and plasma-deposited SiN1.3 and SiO2 optical coatings studied by ellipsometry,” J. Vac. Sci. Technol. A 16, 3227–3234 (1998).
[CrossRef]

A. Bergeron, D. Poitras, L. Martinu, “Interphase in plasma deposited silicon nitride optical films on polycarbonate: in situ ellipsometric characterization,” Opt. Eng. (to be published).

Chaker, M.

Coeuret, F.

J. C. Rostaing, F. Coeuret, B. Drevillon, R. Etemadi, C. Godet, J. Huc, J. Y. Parey, V. A. Yakovlev, “Silicon-based, protective transparent multilayer coatings deposited at high rate on optical polymers by dual-mode MW/r.f. PECVD,” Thin Solid Films 236, 58–63 (1993).
[CrossRef]

da Silva Sobrinho, A. S.

A. S. da Silva Sobrinho, N. Schüler, J. E. Klemberg-Sapieha, M. R. Wertheimer, “Plasma-deposited silicon oxide and silicon nitride films on poly(ethylene terephthalate): a multitechnique study of the interphase regions,” J. Vac. Sci. Technol. A 16, 2021–2030 (1998).
[CrossRef]

Dahl, S.

S. Dahl, D. Rats, J. von Stebut, L. Martinu, J. E. Klemberg-Sapieha, “Nano- and micro-mechanical characterization of plasma-treated polymer surfaces and plasma-coated polycarbonates surface,” Thin Solid Films 351, 1–5 (1999).

Dobrowolski, J. A.

Drevillon, B.

J. C. Rostaing, F. Coeuret, B. Drevillon, R. Etemadi, C. Godet, J. Huc, J. Y. Parey, V. A. Yakovlev, “Silicon-based, protective transparent multilayer coatings deposited at high rate on optical polymers by dual-mode MW/r.f. PECVD,” Thin Solid Films 236, 58–63 (1993).
[CrossRef]

Drévillon, B.

S. Vallon, A. Hofrichter, L. Guyot, B. Drévillon, J. E. Klemberg-Sapieha, L. Martinu, F. Poncin-Epaillard, “Adhesion mechanisms of silica layers on plasma treated polymers. Part I: polycarbonate,” J. Adhes. Sci. Technol. 10, 1287–1312 (1996).
[CrossRef]

Etemadi, R.

J. C. Rostaing, F. Coeuret, B. Drevillon, R. Etemadi, C. Godet, J. Huc, J. Y. Parey, V. A. Yakovlev, “Silicon-based, protective transparent multilayer coatings deposited at high rate on optical polymers by dual-mode MW/r.f. PECVD,” Thin Solid Films 236, 58–63 (1993).
[CrossRef]

Falco, C. M.

Godet, C.

J. C. Rostaing, F. Coeuret, B. Drevillon, R. Etemadi, C. Godet, J. Huc, J. Y. Parey, V. A. Yakovlev, “Silicon-based, protective transparent multilayer coatings deposited at high rate on optical polymers by dual-mode MW/r.f. PECVD,” Thin Solid Films 236, 58–63 (1993).
[CrossRef]

Gujrathi, S. C.

D. Poitras, P. Leroux, J. E. Klemberg-Sapieha, S. C. Gujrathi, L. Martinu, “Characterization of homogeneous and inhomogeneous Si-based optical coatings deposited in dual-frequency plasma,” Opt. Eng. 35, 2690–2699 (1996).
[CrossRef]

Guyot, L.

S. Vallon, A. Hofrichter, L. Guyot, B. Drévillon, J. E. Klemberg-Sapieha, L. Martinu, F. Poncin-Epaillard, “Adhesion mechanisms of silica layers on plasma treated polymers. Part I: polycarbonate,” J. Adhes. Sci. Technol. 10, 1287–1312 (1996).
[CrossRef]

Hofrichter, A.

S. Vallon, A. Hofrichter, L. Guyot, B. Drévillon, J. E. Klemberg-Sapieha, L. Martinu, F. Poncin-Epaillard, “Adhesion mechanisms of silica layers on plasma treated polymers. Part I: polycarbonate,” J. Adhes. Sci. Technol. 10, 1287–1312 (1996).
[CrossRef]

Huc, J.

J. C. Rostaing, F. Coeuret, B. Drevillon, R. Etemadi, C. Godet, J. Huc, J. Y. Parey, V. A. Yakovlev, “Silicon-based, protective transparent multilayer coatings deposited at high rate on optical polymers by dual-mode MW/r.f. PECVD,” Thin Solid Films 236, 58–63 (1993).
[CrossRef]

Kearney, P. A.

Klemberg-Sapieha, J. E.

S. Dahl, D. Rats, J. von Stebut, L. Martinu, J. E. Klemberg-Sapieha, “Nano- and micro-mechanical characterization of plasma-treated polymer surfaces and plasma-coated polycarbonates surface,” Thin Solid Films 351, 1–5 (1999).

A. S. da Silva Sobrinho, N. Schüler, J. E. Klemberg-Sapieha, M. R. Wertheimer, “Plasma-deposited silicon oxide and silicon nitride films on poly(ethylene terephthalate): a multitechnique study of the interphase regions,” J. Vac. Sci. Technol. A 16, 2021–2030 (1998).
[CrossRef]

A. Bergeron, J. E. Klemberg-Sapieha, L. Martinu, “Structure of the interfacial region between polycarbonate and plasma-deposited SiN1.3 and SiO2 optical coatings studied by ellipsometry,” J. Vac. Sci. Technol. A 16, 3227–3234 (1998).
[CrossRef]

J. E. Klemberg-Sapieha, D. Poitras, L. Martinu, N. L. S. Yamasaki, L. W. Lantman, “Effect of interface on the characteristics of functional films deposited on polycarbonate in dual-frequency plasma,” J. Vac. Sci. Technol. A 15, 985–991 (1997).
[CrossRef]

D. Poitras, P. Leroux, J. E. Klemberg-Sapieha, S. C. Gujrathi, L. Martinu, “Characterization of homogeneous and inhomogeneous Si-based optical coatings deposited in dual-frequency plasma,” Opt. Eng. 35, 2690–2699 (1996).
[CrossRef]

S. Vallon, A. Hofrichter, L. Guyot, B. Drévillon, J. E. Klemberg-Sapieha, L. Martinu, F. Poncin-Epaillard, “Adhesion mechanisms of silica layers on plasma treated polymers. Part I: polycarbonate,” J. Adhes. Sci. Technol. 10, 1287–1312 (1996).
[CrossRef]

L. Martinu, J. E. Klemberg-Sapieha, O. M. Kuttel, A. Raveh, M. R. Wertheimer, “Critical ion energy and ion flux in the growth of films by plasma-enhanced chemical vapor deposition,” J. Vac. Sci. Technol. A 12, 1360–1364 (1994).
[CrossRef]

J. E. Klemberg-Sapieha, L. Martinu, N. L. S. Yamasaki, C. W. Lantman, Plasma Deposition and Treatment of Polymers, Vol. 544 of Materials Research Society Symposium Proceedings, W. W. Lee, R. d’Agostino, M. R. Wertheimer, eds. (Materials Research Society, Warrendale, Pa., 1998), pp. 277–281.
[CrossRef]

Kuttel, O. M.

L. Martinu, J. E. Klemberg-Sapieha, O. M. Kuttel, A. Raveh, M. R. Wertheimer, “Critical ion energy and ion flux in the growth of films by plasma-enhanced chemical vapor deposition,” J. Vac. Sci. Technol. A 12, 1360–1364 (1994).
[CrossRef]

Lantman, C. W.

J. E. Klemberg-Sapieha, L. Martinu, N. L. S. Yamasaki, C. W. Lantman, Plasma Deposition and Treatment of Polymers, Vol. 544 of Materials Research Society Symposium Proceedings, W. W. Lee, R. d’Agostino, M. R. Wertheimer, eds. (Materials Research Society, Warrendale, Pa., 1998), pp. 277–281.
[CrossRef]

Lantman, L. W.

J. E. Klemberg-Sapieha, D. Poitras, L. Martinu, N. L. S. Yamasaki, L. W. Lantman, “Effect of interface on the characteristics of functional films deposited on polycarbonate in dual-frequency plasma,” J. Vac. Sci. Technol. A 15, 985–991 (1997).
[CrossRef]

Leroux, P.

D. Poitras, P. Leroux, J. E. Klemberg-Sapieha, S. C. Gujrathi, L. Martinu, “Characterization of homogeneous and inhomogeneous Si-based optical coatings deposited in dual-frequency plasma,” Opt. Eng. 35, 2690–2699 (1996).
[CrossRef]

Liston, E. M.

E. M. Liston, L. Martinu, M. R. Wertheimer, “Plasma surface modification of polymers for improved adhesion: a critical review,” J. Adhes. Sci. Technol. 7, 1091–1127 (1993).
[CrossRef]

Macleod, H. A.

H. A. Macleod, Thin-Film Optical Filters, 2nd edition (Hilger, Bristol, 1986).
[CrossRef]

Martinu, L.

S. Dahl, D. Rats, J. von Stebut, L. Martinu, J. E. Klemberg-Sapieha, “Nano- and micro-mechanical characterization of plasma-treated polymer surfaces and plasma-coated polycarbonates surface,” Thin Solid Films 351, 1–5 (1999).

D. Rats, D. Poitras, J. M. Soro, L. Martinu, J. von Stebut, “Mechanical properties of plasma-deposited silicon-based inhomogeneous optical coatings,” Surf. Coat. Technol. 111, 220–228 (1999).
[CrossRef]

A. Bergeron, J. E. Klemberg-Sapieha, L. Martinu, “Structure of the interfacial region between polycarbonate and plasma-deposited SiN1.3 and SiO2 optical coatings studied by ellipsometry,” J. Vac. Sci. Technol. A 16, 3227–3234 (1998).
[CrossRef]

J. E. Klemberg-Sapieha, D. Poitras, L. Martinu, N. L. S. Yamasaki, L. W. Lantman, “Effect of interface on the characteristics of functional films deposited on polycarbonate in dual-frequency plasma,” J. Vac. Sci. Technol. A 15, 985–991 (1997).
[CrossRef]

D. Poitras, P. Leroux, J. E. Klemberg-Sapieha, S. C. Gujrathi, L. Martinu, “Characterization of homogeneous and inhomogeneous Si-based optical coatings deposited in dual-frequency plasma,” Opt. Eng. 35, 2690–2699 (1996).
[CrossRef]

S. Vallon, A. Hofrichter, L. Guyot, B. Drévillon, J. E. Klemberg-Sapieha, L. Martinu, F. Poncin-Epaillard, “Adhesion mechanisms of silica layers on plasma treated polymers. Part I: polycarbonate,” J. Adhes. Sci. Technol. 10, 1287–1312 (1996).
[CrossRef]

L. Martinu, J. E. Klemberg-Sapieha, O. M. Kuttel, A. Raveh, M. R. Wertheimer, “Critical ion energy and ion flux in the growth of films by plasma-enhanced chemical vapor deposition,” J. Vac. Sci. Technol. A 12, 1360–1364 (1994).
[CrossRef]

E. M. Liston, L. Martinu, M. R. Wertheimer, “Plasma surface modification of polymers for improved adhesion: a critical review,” J. Adhes. Sci. Technol. 7, 1091–1127 (1993).
[CrossRef]

J. E. Klemberg-Sapieha, L. Martinu, N. L. S. Yamasaki, C. W. Lantman, Plasma Deposition and Treatment of Polymers, Vol. 544 of Materials Research Society Symposium Proceedings, W. W. Lee, R. d’Agostino, M. R. Wertheimer, eds. (Materials Research Society, Warrendale, Pa., 1998), pp. 277–281.
[CrossRef]

A. Bergeron, D. Poitras, L. Martinu, “Interphase in plasma deposited silicon nitride optical films on polycarbonate: in situ ellipsometric characterization,” Opt. Eng. (to be published).

L. Martinu, “Plasma deposition and testing of hard coatings on plastics,” in Plasma Processing of Polymers, Vol. 346 of Applied Sciences, R. d’Agostino, P. Favia, F. Fracassi, eds. (NATO ASI/Kluwer Academic, Dordrecht, The Netherlands, 1997), pp. 247–272.
[CrossRef]

Montcalm, C.

Parey, J. Y.

J. C. Rostaing, F. Coeuret, B. Drevillon, R. Etemadi, C. Godet, J. Huc, J. Y. Parey, V. A. Yakovlev, “Silicon-based, protective transparent multilayer coatings deposited at high rate on optical polymers by dual-mode MW/r.f. PECVD,” Thin Solid Films 236, 58–63 (1993).
[CrossRef]

Pépin, H.

Poitras, D.

D. Rats, D. Poitras, J. M. Soro, L. Martinu, J. von Stebut, “Mechanical properties of plasma-deposited silicon-based inhomogeneous optical coatings,” Surf. Coat. Technol. 111, 220–228 (1999).
[CrossRef]

J. E. Klemberg-Sapieha, D. Poitras, L. Martinu, N. L. S. Yamasaki, L. W. Lantman, “Effect of interface on the characteristics of functional films deposited on polycarbonate in dual-frequency plasma,” J. Vac. Sci. Technol. A 15, 985–991 (1997).
[CrossRef]

D. Poitras, P. Leroux, J. E. Klemberg-Sapieha, S. C. Gujrathi, L. Martinu, “Characterization of homogeneous and inhomogeneous Si-based optical coatings deposited in dual-frequency plasma,” Opt. Eng. 35, 2690–2699 (1996).
[CrossRef]

A. Bergeron, D. Poitras, L. Martinu, “Interphase in plasma deposited silicon nitride optical films on polycarbonate: in situ ellipsometric characterization,” Opt. Eng. (to be published).

Poncin-Epaillard, F.

S. Vallon, A. Hofrichter, L. Guyot, B. Drévillon, J. E. Klemberg-Sapieha, L. Martinu, F. Poncin-Epaillard, “Adhesion mechanisms of silica layers on plasma treated polymers. Part I: polycarbonate,” J. Adhes. Sci. Technol. 10, 1287–1312 (1996).
[CrossRef]

Rats, D.

D. Rats, D. Poitras, J. M. Soro, L. Martinu, J. von Stebut, “Mechanical properties of plasma-deposited silicon-based inhomogeneous optical coatings,” Surf. Coat. Technol. 111, 220–228 (1999).
[CrossRef]

S. Dahl, D. Rats, J. von Stebut, L. Martinu, J. E. Klemberg-Sapieha, “Nano- and micro-mechanical characterization of plasma-treated polymer surfaces and plasma-coated polycarbonates surface,” Thin Solid Films 351, 1–5 (1999).

Raveh, A.

L. Martinu, J. E. Klemberg-Sapieha, O. M. Kuttel, A. Raveh, M. R. Wertheimer, “Critical ion energy and ion flux in the growth of films by plasma-enhanced chemical vapor deposition,” J. Vac. Sci. Technol. A 12, 1360–1364 (1994).
[CrossRef]

Rostaing, J. C.

J. C. Rostaing, F. Coeuret, B. Drevillon, R. Etemadi, C. Godet, J. Huc, J. Y. Parey, V. A. Yakovlev, “Silicon-based, protective transparent multilayer coatings deposited at high rate on optical polymers by dual-mode MW/r.f. PECVD,” Thin Solid Films 236, 58–63 (1993).
[CrossRef]

Schüler, N.

A. S. da Silva Sobrinho, N. Schüler, J. E. Klemberg-Sapieha, M. R. Wertheimer, “Plasma-deposited silicon oxide and silicon nitride films on poly(ethylene terephthalate): a multitechnique study of the interphase regions,” J. Vac. Sci. Technol. A 16, 2021–2030 (1998).
[CrossRef]

Slaughter, J. M.

Soro, J. M.

D. Rats, D. Poitras, J. M. Soro, L. Martinu, J. von Stebut, “Mechanical properties of plasma-deposited silicon-based inhomogeneous optical coatings,” Surf. Coat. Technol. 111, 220–228 (1999).
[CrossRef]

Southwell, W. H.

Sullivan, B. T.

Tikhonravov, A. V.

Trubetskov, M. K.

Vallon, S.

S. Vallon, A. Hofrichter, L. Guyot, B. Drévillon, J. E. Klemberg-Sapieha, L. Martinu, F. Poncin-Epaillard, “Adhesion mechanisms of silica layers on plasma treated polymers. Part I: polycarbonate,” J. Adhes. Sci. Technol. 10, 1287–1312 (1996).
[CrossRef]

von Stebut, J.

S. Dahl, D. Rats, J. von Stebut, L. Martinu, J. E. Klemberg-Sapieha, “Nano- and micro-mechanical characterization of plasma-treated polymer surfaces and plasma-coated polycarbonates surface,” Thin Solid Films 351, 1–5 (1999).

D. Rats, D. Poitras, J. M. Soro, L. Martinu, J. von Stebut, “Mechanical properties of plasma-deposited silicon-based inhomogeneous optical coatings,” Surf. Coat. Technol. 111, 220–228 (1999).
[CrossRef]

Wertheimer, M. R.

A. S. da Silva Sobrinho, N. Schüler, J. E. Klemberg-Sapieha, M. R. Wertheimer, “Plasma-deposited silicon oxide and silicon nitride films on poly(ethylene terephthalate): a multitechnique study of the interphase regions,” J. Vac. Sci. Technol. A 16, 2021–2030 (1998).
[CrossRef]

L. Martinu, J. E. Klemberg-Sapieha, O. M. Kuttel, A. Raveh, M. R. Wertheimer, “Critical ion energy and ion flux in the growth of films by plasma-enhanced chemical vapor deposition,” J. Vac. Sci. Technol. A 12, 1360–1364 (1994).
[CrossRef]

E. M. Liston, L. Martinu, M. R. Wertheimer, “Plasma surface modification of polymers for improved adhesion: a critical review,” J. Adhes. Sci. Technol. 7, 1091–1127 (1993).
[CrossRef]

Yakovlev, V. A.

J. C. Rostaing, F. Coeuret, B. Drevillon, R. Etemadi, C. Godet, J. Huc, J. Y. Parey, V. A. Yakovlev, “Silicon-based, protective transparent multilayer coatings deposited at high rate on optical polymers by dual-mode MW/r.f. PECVD,” Thin Solid Films 236, 58–63 (1993).
[CrossRef]

Yamasaki, N. L. S.

J. E. Klemberg-Sapieha, D. Poitras, L. Martinu, N. L. S. Yamasaki, L. W. Lantman, “Effect of interface on the characteristics of functional films deposited on polycarbonate in dual-frequency plasma,” J. Vac. Sci. Technol. A 15, 985–991 (1997).
[CrossRef]

J. E. Klemberg-Sapieha, L. Martinu, N. L. S. Yamasaki, C. W. Lantman, Plasma Deposition and Treatment of Polymers, Vol. 544 of Materials Research Society Symposium Proceedings, W. W. Lee, R. d’Agostino, M. R. Wertheimer, eds. (Materials Research Society, Warrendale, Pa., 1998), pp. 277–281.
[CrossRef]

Ann. Phys. (Paris)

F. Abelès, “Recherche sur la propagation des ondes électromagnétiques sinusoïdales dans les milieux stratifiés. Application aux couches minces,” Ann. Phys. (Paris) 5, 596–640 (1950).

Appl. Opt.

J. Adhes. Sci. Technol.

E. M. Liston, L. Martinu, M. R. Wertheimer, “Plasma surface modification of polymers for improved adhesion: a critical review,” J. Adhes. Sci. Technol. 7, 1091–1127 (1993).
[CrossRef]

S. Vallon, A. Hofrichter, L. Guyot, B. Drévillon, J. E. Klemberg-Sapieha, L. Martinu, F. Poncin-Epaillard, “Adhesion mechanisms of silica layers on plasma treated polymers. Part I: polycarbonate,” J. Adhes. Sci. Technol. 10, 1287–1312 (1996).
[CrossRef]

J. Vac. Sci. Technol. A

A. Bergeron, J. E. Klemberg-Sapieha, L. Martinu, “Structure of the interfacial region between polycarbonate and plasma-deposited SiN1.3 and SiO2 optical coatings studied by ellipsometry,” J. Vac. Sci. Technol. A 16, 3227–3234 (1998).
[CrossRef]

J. E. Klemberg-Sapieha, D. Poitras, L. Martinu, N. L. S. Yamasaki, L. W. Lantman, “Effect of interface on the characteristics of functional films deposited on polycarbonate in dual-frequency plasma,” J. Vac. Sci. Technol. A 15, 985–991 (1997).
[CrossRef]

A. S. da Silva Sobrinho, N. Schüler, J. E. Klemberg-Sapieha, M. R. Wertheimer, “Plasma-deposited silicon oxide and silicon nitride films on poly(ethylene terephthalate): a multitechnique study of the interphase regions,” J. Vac. Sci. Technol. A 16, 2021–2030 (1998).
[CrossRef]

L. Martinu, J. E. Klemberg-Sapieha, O. M. Kuttel, A. Raveh, M. R. Wertheimer, “Critical ion energy and ion flux in the growth of films by plasma-enhanced chemical vapor deposition,” J. Vac. Sci. Technol. A 12, 1360–1364 (1994).
[CrossRef]

Opt. Eng.

D. Poitras, P. Leroux, J. E. Klemberg-Sapieha, S. C. Gujrathi, L. Martinu, “Characterization of homogeneous and inhomogeneous Si-based optical coatings deposited in dual-frequency plasma,” Opt. Eng. 35, 2690–2699 (1996).
[CrossRef]

Surf. Coat. Technol.

D. Rats, D. Poitras, J. M. Soro, L. Martinu, J. von Stebut, “Mechanical properties of plasma-deposited silicon-based inhomogeneous optical coatings,” Surf. Coat. Technol. 111, 220–228 (1999).
[CrossRef]

Thin Solid Films

S. Dahl, D. Rats, J. von Stebut, L. Martinu, J. E. Klemberg-Sapieha, “Nano- and micro-mechanical characterization of plasma-treated polymer surfaces and plasma-coated polycarbonates surface,” Thin Solid Films 351, 1–5 (1999).

J. C. Rostaing, F. Coeuret, B. Drevillon, R. Etemadi, C. Godet, J. Huc, J. Y. Parey, V. A. Yakovlev, “Silicon-based, protective transparent multilayer coatings deposited at high rate on optical polymers by dual-mode MW/r.f. PECVD,” Thin Solid Films 236, 58–63 (1993).
[CrossRef]

Other

L. Martinu, “Plasma deposition and testing of hard coatings on plastics,” in Plasma Processing of Polymers, Vol. 346 of Applied Sciences, R. d’Agostino, P. Favia, F. Fracassi, eds. (NATO ASI/Kluwer Academic, Dordrecht, The Netherlands, 1997), pp. 247–272.
[CrossRef]

A. Bergeron, D. Poitras, L. Martinu, “Interphase in plasma deposited silicon nitride optical films on polycarbonate: in situ ellipsometric characterization,” Opt. Eng. (to be published).

J. E. Klemberg-Sapieha, L. Martinu, N. L. S. Yamasaki, C. W. Lantman, Plasma Deposition and Treatment of Polymers, Vol. 544 of Materials Research Society Symposium Proceedings, W. W. Lee, R. d’Agostino, M. R. Wertheimer, eds. (Materials Research Society, Warrendale, Pa., 1998), pp. 277–281.
[CrossRef]

H. A. Macleod, Thin-Film Optical Filters, 2nd edition (Hilger, Bristol, 1986).
[CrossRef]

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Figures (8)

Fig. 1
Fig. 1

Reflectance spectra calculated for a homogeneous achromatic W-coat AR design: continuous curve, PC|0.16H′0.35LHHL|air; dotted curve, experimentally obtained results.

Fig. 2
Fig. 2

(a) In situ SE data measured during plasma deposition of a 275-nm-thick SiN1.3 film on polycarbonate. (b) Refractive-index profiles n(z) used for fitting data: dotted curve, cumulative layers; continuous curve, inhomogeneous layers. Inset: large dotted curve, postdeposition ellipsometric spectra; dotted and continuous curves, fitting curves (after Bergeron et al.8).

Fig. 3
Fig. 3

Effect of interphase on an AR V-coat when SiN1.3 (H) and SiO2 (L) are used: (a) optimized design without and with interphase; (b) corresponding reflectance spectra; (c) admittance diagrams.

Fig. 4
Fig. 4

(a) Effect of interphase on an AR W coat; (b) corresponding admittance diagrams.

Fig. 5
Fig. 5

Effect of interphase on a minus filter: (a) optical design used for the simulation; (b) reflectance spectra; (c) difference in reflectance induced by introducing the interphase.

Fig. 6
Fig. 6

Achromatic AR W-coat (PC|0.16H0.35LHHL|air, reoptimized) when a correction of the thickness of the first layer is considered: (a) design without and with the interphase; (b) comparison of the spectra of the first layers in both designs; (c) corresponding reflectance spectra.

Fig. 7
Fig. 7

Achromatic AR W coat with an interphase corrected for the optical thickness (OT) of the first layer: (a) comparison of the spectra of the first layers in both designs; (b) reflectance spectra of both designs.

Fig. 8
Fig. 8

Achromatic W-coat AR coating with an interphase. Performance of the homogeneous coating and improvement of the design by introducing the interphase: (a) comparison of the reflectance spectra; (b) corresponding admittance diagrams.

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