Abstract

A mechanical method of flattening the Gaussian intensity distribution of laser beams in time average is presented. Specially shaped rotating shutters are the key feature of this method, which has been applied to achieve homogeneous submicrometer patterning of macroscopically large samples by laser interference exposure. This method represents a simple yet useful alternative to applying beam broadening or degaussing plates (apodizing filters).

© 2000 Optical Society of America

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