Abstract

We report on an efficient use of CsLiB6O10 (CLBO) crystals employed for an all-solid-state deep-UV laser system operated at 5 kHz. We obtained greater than 3 W of UV radiation around 242 nm by mixing the 349-nm third harmonic of a Nd:YLF laser with the tunable output from a Ti:sapphire laser in a CLBO crystal. This UV radiation was subsequently mixed with the residual 1047-nm output from the Nd:YLF laser in a second CLBO crystal. The system produced 1.5 W of deep-UV radiation at 196.3 nm, which is, to our knowledge, the highest deep-UV power below 200 nm generated in a nonlinear optical crystal. Additionally, the bandwidth of both outputs was estimated to be less than 200 MHz.

© 2000 Optical Society of America

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  1. Y. Mori, I. Kuroda, S. Nakajima, T. Sasaki, S. Nakai, “New nonlinear optical crystal: cesium lithium borate,” Appl. Phys. Lett. 67, 1818–1820 (1995).
    [CrossRef]
  2. T. Kojima, S. Konno, S. Fujikawa, K. Yasui, K. Yoshizawa, Y. Mori, T. Sasaki, M. Tanaka, Y. Okada, “20-W, 10-kHz, UV beam generation by an all-solid-state laser,” in Advanced Solid-State Lasers, M. M. Fejer, H. Injeyan, U. Keller, eds., Vol. 26 of OSA Trends in Optics and Photonics (Optical Society of America, Washington, D.C., 1999), pp. 93–96.
  3. H. Masuda, N. Umezu, K. Kimura, S. Kubota, “High-repetition-rate, 192-197 nm pulse generation in β-BaB2O4 by intracavity sum-frequency-mixing of a Ti:Sapphire laser with a frequency-quadrupled Nd:YAG laser,” in Advanced Solid State Lasers, M. M. Fejer, H. Injeyan, U. Keller, eds., Vol. 26 of OSA Trends in Optics and Photonics (Optical Society of America, Washington, D.C., 1999), pp. 63–69.
  4. R. D. Mead, C. E. Hamilton, D. D. Lowenthal, “Solid state lasers for 193-nm lithography,” in Optical Microlithography X, G. E. Fuller, ed., Proc. SPIE3051, 882–889 (1997).
    [CrossRef]
  5. K. Deki, J. Sakuma, Y. Ohsako, N. Kitatochi, T. Yokota, M. Horiguchi, Y. Mori, T. Sasaki, “200 mW 192 nm Generation using CsLiB6O10 Crystal,” in Conference on Lasers and Electro-Optics, 1998 OSA Technical Digest (Optical Society of America, Washington, D.C., 1998), postdeadline paper CPD4.
  6. A. Finch, J. Sakuma, Y. Ohsako, K. Deki, M. Horiguchi, T. Yokota, “All-solid-state, tunable, high power UV generation by sum-frequency-mixing in CLBO,” in Advanced Solid State Lasers, M. M. Fejer, H. Injeyan, U. Keller, eds., Vol. 26 of OSA Trends in Optics and Photonics (Optical Society of America, Washington, D.C., 1999), pp. 70–73.
  7. J. Sakuma, A. Finch, Y. Ohsako, K. Deki, M. Yoshino, M. Horiguchi, T. Yokota, Y. Mori, T. Sasaki, “All-solid-state, 1-W, 5-kHz laser source below 200 nm,” in Advanced Solid State Lasers, M. M. Fejer, H. Injeyan, U. Keller, eds., Vol. 26 of OSA Trends in Optics and Photonics (Optical Society of America, Washington, D.C., 1999), pp. 89–92.
  8. Y. K. Yap, M. Inagaki, S. Nakajima, Y. Mori, T. Sasaki, “High-power fourth- and fifth-harmonic generation of a Nd:YAG laser by means of a CsLIB6O10,” Opt. Lett. 21, 1348–1350 (1996).
    [CrossRef] [PubMed]
  9. A. Finch, Y. Ohsako, J. Sakuma, K. Deki, M. Horiguchi, Y. Mori, T. Sasaki, K. Wall, J. Harrison, P. F. Moulton, J. Manni, “Development of a high-power, high-repetition rate, diode-pumped, deep UV laser system,” in Advanced Solid State Lasers, W. R. Bosenberg, M. M. Fejer, eds., Vol. 19 of OSA Trends in Optics and Photonics (Optical Society of America, Washington, D.C., 1998), pp. 16–19.
  10. N. Umemura, K. Kato, “Ultraviolet generation tunable to 0.185 µm on CsLiB6O10,” Appl. Opt. 36, 6794–6796 (1997).
    [CrossRef]
  11. G. Ryu, C. S. Yoon, T. P. J. Han, H. G. Gallagher, “Growth and characterization of CsLiB6O10 (CLBO) crystal,” J. Cryst. Growth 191, 492–500 (1998).
    [CrossRef]
  12. N. Umemura, K. Yoshida, T. Kamimura, Y. Mori, T. Sasaki, K. Kato, “New data on the phase-matching properties of CsLiB6O10,” in Advanced Solid State Lasers, M. M. Fejer, H. Injeyan, U. Keller, eds., Vol. 26 of OSA Trends in Optics and Photonics (Optical Society of America, Washington, D.C., 1999), pp. 715–719.
  13. K. Kato, “Second-harmonic generation to 2048 A in β-BaB2O4,” IEEE J. Quantum Electron. QE-22, 1013–1014 (1986).
    [CrossRef]
  14. V. G. Dmitriev, G. G. Gurzadyan, D. N. Nikogosyan, eds., Handbook of Nonlinear Optical Crystals, 2nd ed., Vol. 64 of Springer Series in Optical Sciences (Springer-Verlag, Berlin, 1997), pp. 32–66.
  15. Y. K. Yap, K. Deki, N. Kitatochi, Y. Mori, T. Sasaki, “Alleviation of thermally induced phase mismatch in CsLiB6O10 crystal by means of temperature-profile compensation,” Opt. Lett. 23, 1016–1018 (1998).
    [CrossRef]

1998

G. Ryu, C. S. Yoon, T. P. J. Han, H. G. Gallagher, “Growth and characterization of CsLiB6O10 (CLBO) crystal,” J. Cryst. Growth 191, 492–500 (1998).
[CrossRef]

Y. K. Yap, K. Deki, N. Kitatochi, Y. Mori, T. Sasaki, “Alleviation of thermally induced phase mismatch in CsLiB6O10 crystal by means of temperature-profile compensation,” Opt. Lett. 23, 1016–1018 (1998).
[CrossRef]

1997

1996

1995

Y. Mori, I. Kuroda, S. Nakajima, T. Sasaki, S. Nakai, “New nonlinear optical crystal: cesium lithium borate,” Appl. Phys. Lett. 67, 1818–1820 (1995).
[CrossRef]

1986

K. Kato, “Second-harmonic generation to 2048 A in β-BaB2O4,” IEEE J. Quantum Electron. QE-22, 1013–1014 (1986).
[CrossRef]

Deki, K.

Y. K. Yap, K. Deki, N. Kitatochi, Y. Mori, T. Sasaki, “Alleviation of thermally induced phase mismatch in CsLiB6O10 crystal by means of temperature-profile compensation,” Opt. Lett. 23, 1016–1018 (1998).
[CrossRef]

A. Finch, J. Sakuma, Y. Ohsako, K. Deki, M. Horiguchi, T. Yokota, “All-solid-state, tunable, high power UV generation by sum-frequency-mixing in CLBO,” in Advanced Solid State Lasers, M. M. Fejer, H. Injeyan, U. Keller, eds., Vol. 26 of OSA Trends in Optics and Photonics (Optical Society of America, Washington, D.C., 1999), pp. 70–73.

A. Finch, Y. Ohsako, J. Sakuma, K. Deki, M. Horiguchi, Y. Mori, T. Sasaki, K. Wall, J. Harrison, P. F. Moulton, J. Manni, “Development of a high-power, high-repetition rate, diode-pumped, deep UV laser system,” in Advanced Solid State Lasers, W. R. Bosenberg, M. M. Fejer, eds., Vol. 19 of OSA Trends in Optics and Photonics (Optical Society of America, Washington, D.C., 1998), pp. 16–19.

J. Sakuma, A. Finch, Y. Ohsako, K. Deki, M. Yoshino, M. Horiguchi, T. Yokota, Y. Mori, T. Sasaki, “All-solid-state, 1-W, 5-kHz laser source below 200 nm,” in Advanced Solid State Lasers, M. M. Fejer, H. Injeyan, U. Keller, eds., Vol. 26 of OSA Trends in Optics and Photonics (Optical Society of America, Washington, D.C., 1999), pp. 89–92.

K. Deki, J. Sakuma, Y. Ohsako, N. Kitatochi, T. Yokota, M. Horiguchi, Y. Mori, T. Sasaki, “200 mW 192 nm Generation using CsLiB6O10 Crystal,” in Conference on Lasers and Electro-Optics, 1998 OSA Technical Digest (Optical Society of America, Washington, D.C., 1998), postdeadline paper CPD4.

Finch, A.

J. Sakuma, A. Finch, Y. Ohsako, K. Deki, M. Yoshino, M. Horiguchi, T. Yokota, Y. Mori, T. Sasaki, “All-solid-state, 1-W, 5-kHz laser source below 200 nm,” in Advanced Solid State Lasers, M. M. Fejer, H. Injeyan, U. Keller, eds., Vol. 26 of OSA Trends in Optics and Photonics (Optical Society of America, Washington, D.C., 1999), pp. 89–92.

A. Finch, J. Sakuma, Y. Ohsako, K. Deki, M. Horiguchi, T. Yokota, “All-solid-state, tunable, high power UV generation by sum-frequency-mixing in CLBO,” in Advanced Solid State Lasers, M. M. Fejer, H. Injeyan, U. Keller, eds., Vol. 26 of OSA Trends in Optics and Photonics (Optical Society of America, Washington, D.C., 1999), pp. 70–73.

A. Finch, Y. Ohsako, J. Sakuma, K. Deki, M. Horiguchi, Y. Mori, T. Sasaki, K. Wall, J. Harrison, P. F. Moulton, J. Manni, “Development of a high-power, high-repetition rate, diode-pumped, deep UV laser system,” in Advanced Solid State Lasers, W. R. Bosenberg, M. M. Fejer, eds., Vol. 19 of OSA Trends in Optics and Photonics (Optical Society of America, Washington, D.C., 1998), pp. 16–19.

Fujikawa, S.

T. Kojima, S. Konno, S. Fujikawa, K. Yasui, K. Yoshizawa, Y. Mori, T. Sasaki, M. Tanaka, Y. Okada, “20-W, 10-kHz, UV beam generation by an all-solid-state laser,” in Advanced Solid-State Lasers, M. M. Fejer, H. Injeyan, U. Keller, eds., Vol. 26 of OSA Trends in Optics and Photonics (Optical Society of America, Washington, D.C., 1999), pp. 93–96.

Gallagher, H. G.

G. Ryu, C. S. Yoon, T. P. J. Han, H. G. Gallagher, “Growth and characterization of CsLiB6O10 (CLBO) crystal,” J. Cryst. Growth 191, 492–500 (1998).
[CrossRef]

Hamilton, C. E.

R. D. Mead, C. E. Hamilton, D. D. Lowenthal, “Solid state lasers for 193-nm lithography,” in Optical Microlithography X, G. E. Fuller, ed., Proc. SPIE3051, 882–889 (1997).
[CrossRef]

Han, T. P. J.

G. Ryu, C. S. Yoon, T. P. J. Han, H. G. Gallagher, “Growth and characterization of CsLiB6O10 (CLBO) crystal,” J. Cryst. Growth 191, 492–500 (1998).
[CrossRef]

Harrison, J.

A. Finch, Y. Ohsako, J. Sakuma, K. Deki, M. Horiguchi, Y. Mori, T. Sasaki, K. Wall, J. Harrison, P. F. Moulton, J. Manni, “Development of a high-power, high-repetition rate, diode-pumped, deep UV laser system,” in Advanced Solid State Lasers, W. R. Bosenberg, M. M. Fejer, eds., Vol. 19 of OSA Trends in Optics and Photonics (Optical Society of America, Washington, D.C., 1998), pp. 16–19.

Horiguchi, M.

A. Finch, J. Sakuma, Y. Ohsako, K. Deki, M. Horiguchi, T. Yokota, “All-solid-state, tunable, high power UV generation by sum-frequency-mixing in CLBO,” in Advanced Solid State Lasers, M. M. Fejer, H. Injeyan, U. Keller, eds., Vol. 26 of OSA Trends in Optics and Photonics (Optical Society of America, Washington, D.C., 1999), pp. 70–73.

A. Finch, Y. Ohsako, J. Sakuma, K. Deki, M. Horiguchi, Y. Mori, T. Sasaki, K. Wall, J. Harrison, P. F. Moulton, J. Manni, “Development of a high-power, high-repetition rate, diode-pumped, deep UV laser system,” in Advanced Solid State Lasers, W. R. Bosenberg, M. M. Fejer, eds., Vol. 19 of OSA Trends in Optics and Photonics (Optical Society of America, Washington, D.C., 1998), pp. 16–19.

J. Sakuma, A. Finch, Y. Ohsako, K. Deki, M. Yoshino, M. Horiguchi, T. Yokota, Y. Mori, T. Sasaki, “All-solid-state, 1-W, 5-kHz laser source below 200 nm,” in Advanced Solid State Lasers, M. M. Fejer, H. Injeyan, U. Keller, eds., Vol. 26 of OSA Trends in Optics and Photonics (Optical Society of America, Washington, D.C., 1999), pp. 89–92.

K. Deki, J. Sakuma, Y. Ohsako, N. Kitatochi, T. Yokota, M. Horiguchi, Y. Mori, T. Sasaki, “200 mW 192 nm Generation using CsLiB6O10 Crystal,” in Conference on Lasers and Electro-Optics, 1998 OSA Technical Digest (Optical Society of America, Washington, D.C., 1998), postdeadline paper CPD4.

Inagaki, M.

Kamimura, T.

N. Umemura, K. Yoshida, T. Kamimura, Y. Mori, T. Sasaki, K. Kato, “New data on the phase-matching properties of CsLiB6O10,” in Advanced Solid State Lasers, M. M. Fejer, H. Injeyan, U. Keller, eds., Vol. 26 of OSA Trends in Optics and Photonics (Optical Society of America, Washington, D.C., 1999), pp. 715–719.

Kato, K.

N. Umemura, K. Kato, “Ultraviolet generation tunable to 0.185 µm on CsLiB6O10,” Appl. Opt. 36, 6794–6796 (1997).
[CrossRef]

K. Kato, “Second-harmonic generation to 2048 A in β-BaB2O4,” IEEE J. Quantum Electron. QE-22, 1013–1014 (1986).
[CrossRef]

N. Umemura, K. Yoshida, T. Kamimura, Y. Mori, T. Sasaki, K. Kato, “New data on the phase-matching properties of CsLiB6O10,” in Advanced Solid State Lasers, M. M. Fejer, H. Injeyan, U. Keller, eds., Vol. 26 of OSA Trends in Optics and Photonics (Optical Society of America, Washington, D.C., 1999), pp. 715–719.

Kimura, K.

H. Masuda, N. Umezu, K. Kimura, S. Kubota, “High-repetition-rate, 192-197 nm pulse generation in β-BaB2O4 by intracavity sum-frequency-mixing of a Ti:Sapphire laser with a frequency-quadrupled Nd:YAG laser,” in Advanced Solid State Lasers, M. M. Fejer, H. Injeyan, U. Keller, eds., Vol. 26 of OSA Trends in Optics and Photonics (Optical Society of America, Washington, D.C., 1999), pp. 63–69.

Kitatochi, N.

Y. K. Yap, K. Deki, N. Kitatochi, Y. Mori, T. Sasaki, “Alleviation of thermally induced phase mismatch in CsLiB6O10 crystal by means of temperature-profile compensation,” Opt. Lett. 23, 1016–1018 (1998).
[CrossRef]

K. Deki, J. Sakuma, Y. Ohsako, N. Kitatochi, T. Yokota, M. Horiguchi, Y. Mori, T. Sasaki, “200 mW 192 nm Generation using CsLiB6O10 Crystal,” in Conference on Lasers and Electro-Optics, 1998 OSA Technical Digest (Optical Society of America, Washington, D.C., 1998), postdeadline paper CPD4.

Kojima, T.

T. Kojima, S. Konno, S. Fujikawa, K. Yasui, K. Yoshizawa, Y. Mori, T. Sasaki, M. Tanaka, Y. Okada, “20-W, 10-kHz, UV beam generation by an all-solid-state laser,” in Advanced Solid-State Lasers, M. M. Fejer, H. Injeyan, U. Keller, eds., Vol. 26 of OSA Trends in Optics and Photonics (Optical Society of America, Washington, D.C., 1999), pp. 93–96.

Konno, S.

T. Kojima, S. Konno, S. Fujikawa, K. Yasui, K. Yoshizawa, Y. Mori, T. Sasaki, M. Tanaka, Y. Okada, “20-W, 10-kHz, UV beam generation by an all-solid-state laser,” in Advanced Solid-State Lasers, M. M. Fejer, H. Injeyan, U. Keller, eds., Vol. 26 of OSA Trends in Optics and Photonics (Optical Society of America, Washington, D.C., 1999), pp. 93–96.

Kubota, S.

H. Masuda, N. Umezu, K. Kimura, S. Kubota, “High-repetition-rate, 192-197 nm pulse generation in β-BaB2O4 by intracavity sum-frequency-mixing of a Ti:Sapphire laser with a frequency-quadrupled Nd:YAG laser,” in Advanced Solid State Lasers, M. M. Fejer, H. Injeyan, U. Keller, eds., Vol. 26 of OSA Trends in Optics and Photonics (Optical Society of America, Washington, D.C., 1999), pp. 63–69.

Kuroda, I.

Y. Mori, I. Kuroda, S. Nakajima, T. Sasaki, S. Nakai, “New nonlinear optical crystal: cesium lithium borate,” Appl. Phys. Lett. 67, 1818–1820 (1995).
[CrossRef]

Lowenthal, D. D.

R. D. Mead, C. E. Hamilton, D. D. Lowenthal, “Solid state lasers for 193-nm lithography,” in Optical Microlithography X, G. E. Fuller, ed., Proc. SPIE3051, 882–889 (1997).
[CrossRef]

Manni, J.

A. Finch, Y. Ohsako, J. Sakuma, K. Deki, M. Horiguchi, Y. Mori, T. Sasaki, K. Wall, J. Harrison, P. F. Moulton, J. Manni, “Development of a high-power, high-repetition rate, diode-pumped, deep UV laser system,” in Advanced Solid State Lasers, W. R. Bosenberg, M. M. Fejer, eds., Vol. 19 of OSA Trends in Optics and Photonics (Optical Society of America, Washington, D.C., 1998), pp. 16–19.

Masuda, H.

H. Masuda, N. Umezu, K. Kimura, S. Kubota, “High-repetition-rate, 192-197 nm pulse generation in β-BaB2O4 by intracavity sum-frequency-mixing of a Ti:Sapphire laser with a frequency-quadrupled Nd:YAG laser,” in Advanced Solid State Lasers, M. M. Fejer, H. Injeyan, U. Keller, eds., Vol. 26 of OSA Trends in Optics and Photonics (Optical Society of America, Washington, D.C., 1999), pp. 63–69.

Mead, R. D.

R. D. Mead, C. E. Hamilton, D. D. Lowenthal, “Solid state lasers for 193-nm lithography,” in Optical Microlithography X, G. E. Fuller, ed., Proc. SPIE3051, 882–889 (1997).
[CrossRef]

Mori, Y.

Y. K. Yap, K. Deki, N. Kitatochi, Y. Mori, T. Sasaki, “Alleviation of thermally induced phase mismatch in CsLiB6O10 crystal by means of temperature-profile compensation,” Opt. Lett. 23, 1016–1018 (1998).
[CrossRef]

Y. K. Yap, M. Inagaki, S. Nakajima, Y. Mori, T. Sasaki, “High-power fourth- and fifth-harmonic generation of a Nd:YAG laser by means of a CsLIB6O10,” Opt. Lett. 21, 1348–1350 (1996).
[CrossRef] [PubMed]

Y. Mori, I. Kuroda, S. Nakajima, T. Sasaki, S. Nakai, “New nonlinear optical crystal: cesium lithium borate,” Appl. Phys. Lett. 67, 1818–1820 (1995).
[CrossRef]

N. Umemura, K. Yoshida, T. Kamimura, Y. Mori, T. Sasaki, K. Kato, “New data on the phase-matching properties of CsLiB6O10,” in Advanced Solid State Lasers, M. M. Fejer, H. Injeyan, U. Keller, eds., Vol. 26 of OSA Trends in Optics and Photonics (Optical Society of America, Washington, D.C., 1999), pp. 715–719.

K. Deki, J. Sakuma, Y. Ohsako, N. Kitatochi, T. Yokota, M. Horiguchi, Y. Mori, T. Sasaki, “200 mW 192 nm Generation using CsLiB6O10 Crystal,” in Conference on Lasers and Electro-Optics, 1998 OSA Technical Digest (Optical Society of America, Washington, D.C., 1998), postdeadline paper CPD4.

J. Sakuma, A. Finch, Y. Ohsako, K. Deki, M. Yoshino, M. Horiguchi, T. Yokota, Y. Mori, T. Sasaki, “All-solid-state, 1-W, 5-kHz laser source below 200 nm,” in Advanced Solid State Lasers, M. M. Fejer, H. Injeyan, U. Keller, eds., Vol. 26 of OSA Trends in Optics and Photonics (Optical Society of America, Washington, D.C., 1999), pp. 89–92.

A. Finch, Y. Ohsako, J. Sakuma, K. Deki, M. Horiguchi, Y. Mori, T. Sasaki, K. Wall, J. Harrison, P. F. Moulton, J. Manni, “Development of a high-power, high-repetition rate, diode-pumped, deep UV laser system,” in Advanced Solid State Lasers, W. R. Bosenberg, M. M. Fejer, eds., Vol. 19 of OSA Trends in Optics and Photonics (Optical Society of America, Washington, D.C., 1998), pp. 16–19.

T. Kojima, S. Konno, S. Fujikawa, K. Yasui, K. Yoshizawa, Y. Mori, T. Sasaki, M. Tanaka, Y. Okada, “20-W, 10-kHz, UV beam generation by an all-solid-state laser,” in Advanced Solid-State Lasers, M. M. Fejer, H. Injeyan, U. Keller, eds., Vol. 26 of OSA Trends in Optics and Photonics (Optical Society of America, Washington, D.C., 1999), pp. 93–96.

Moulton, P. F.

A. Finch, Y. Ohsako, J. Sakuma, K. Deki, M. Horiguchi, Y. Mori, T. Sasaki, K. Wall, J. Harrison, P. F. Moulton, J. Manni, “Development of a high-power, high-repetition rate, diode-pumped, deep UV laser system,” in Advanced Solid State Lasers, W. R. Bosenberg, M. M. Fejer, eds., Vol. 19 of OSA Trends in Optics and Photonics (Optical Society of America, Washington, D.C., 1998), pp. 16–19.

Nakai, S.

Y. Mori, I. Kuroda, S. Nakajima, T. Sasaki, S. Nakai, “New nonlinear optical crystal: cesium lithium borate,” Appl. Phys. Lett. 67, 1818–1820 (1995).
[CrossRef]

Nakajima, S.

Y. K. Yap, M. Inagaki, S. Nakajima, Y. Mori, T. Sasaki, “High-power fourth- and fifth-harmonic generation of a Nd:YAG laser by means of a CsLIB6O10,” Opt. Lett. 21, 1348–1350 (1996).
[CrossRef] [PubMed]

Y. Mori, I. Kuroda, S. Nakajima, T. Sasaki, S. Nakai, “New nonlinear optical crystal: cesium lithium borate,” Appl. Phys. Lett. 67, 1818–1820 (1995).
[CrossRef]

Ohsako, Y.

K. Deki, J. Sakuma, Y. Ohsako, N. Kitatochi, T. Yokota, M. Horiguchi, Y. Mori, T. Sasaki, “200 mW 192 nm Generation using CsLiB6O10 Crystal,” in Conference on Lasers and Electro-Optics, 1998 OSA Technical Digest (Optical Society of America, Washington, D.C., 1998), postdeadline paper CPD4.

J. Sakuma, A. Finch, Y. Ohsako, K. Deki, M. Yoshino, M. Horiguchi, T. Yokota, Y. Mori, T. Sasaki, “All-solid-state, 1-W, 5-kHz laser source below 200 nm,” in Advanced Solid State Lasers, M. M. Fejer, H. Injeyan, U. Keller, eds., Vol. 26 of OSA Trends in Optics and Photonics (Optical Society of America, Washington, D.C., 1999), pp. 89–92.

A. Finch, Y. Ohsako, J. Sakuma, K. Deki, M. Horiguchi, Y. Mori, T. Sasaki, K. Wall, J. Harrison, P. F. Moulton, J. Manni, “Development of a high-power, high-repetition rate, diode-pumped, deep UV laser system,” in Advanced Solid State Lasers, W. R. Bosenberg, M. M. Fejer, eds., Vol. 19 of OSA Trends in Optics and Photonics (Optical Society of America, Washington, D.C., 1998), pp. 16–19.

A. Finch, J. Sakuma, Y. Ohsako, K. Deki, M. Horiguchi, T. Yokota, “All-solid-state, tunable, high power UV generation by sum-frequency-mixing in CLBO,” in Advanced Solid State Lasers, M. M. Fejer, H. Injeyan, U. Keller, eds., Vol. 26 of OSA Trends in Optics and Photonics (Optical Society of America, Washington, D.C., 1999), pp. 70–73.

Okada, Y.

T. Kojima, S. Konno, S. Fujikawa, K. Yasui, K. Yoshizawa, Y. Mori, T. Sasaki, M. Tanaka, Y. Okada, “20-W, 10-kHz, UV beam generation by an all-solid-state laser,” in Advanced Solid-State Lasers, M. M. Fejer, H. Injeyan, U. Keller, eds., Vol. 26 of OSA Trends in Optics and Photonics (Optical Society of America, Washington, D.C., 1999), pp. 93–96.

Ryu, G.

G. Ryu, C. S. Yoon, T. P. J. Han, H. G. Gallagher, “Growth and characterization of CsLiB6O10 (CLBO) crystal,” J. Cryst. Growth 191, 492–500 (1998).
[CrossRef]

Sakuma, J.

J. Sakuma, A. Finch, Y. Ohsako, K. Deki, M. Yoshino, M. Horiguchi, T. Yokota, Y. Mori, T. Sasaki, “All-solid-state, 1-W, 5-kHz laser source below 200 nm,” in Advanced Solid State Lasers, M. M. Fejer, H. Injeyan, U. Keller, eds., Vol. 26 of OSA Trends in Optics and Photonics (Optical Society of America, Washington, D.C., 1999), pp. 89–92.

K. Deki, J. Sakuma, Y. Ohsako, N. Kitatochi, T. Yokota, M. Horiguchi, Y. Mori, T. Sasaki, “200 mW 192 nm Generation using CsLiB6O10 Crystal,” in Conference on Lasers and Electro-Optics, 1998 OSA Technical Digest (Optical Society of America, Washington, D.C., 1998), postdeadline paper CPD4.

A. Finch, Y. Ohsako, J. Sakuma, K. Deki, M. Horiguchi, Y. Mori, T. Sasaki, K. Wall, J. Harrison, P. F. Moulton, J. Manni, “Development of a high-power, high-repetition rate, diode-pumped, deep UV laser system,” in Advanced Solid State Lasers, W. R. Bosenberg, M. M. Fejer, eds., Vol. 19 of OSA Trends in Optics and Photonics (Optical Society of America, Washington, D.C., 1998), pp. 16–19.

A. Finch, J. Sakuma, Y. Ohsako, K. Deki, M. Horiguchi, T. Yokota, “All-solid-state, tunable, high power UV generation by sum-frequency-mixing in CLBO,” in Advanced Solid State Lasers, M. M. Fejer, H. Injeyan, U. Keller, eds., Vol. 26 of OSA Trends in Optics and Photonics (Optical Society of America, Washington, D.C., 1999), pp. 70–73.

Sasaki, T.

Y. K. Yap, K. Deki, N. Kitatochi, Y. Mori, T. Sasaki, “Alleviation of thermally induced phase mismatch in CsLiB6O10 crystal by means of temperature-profile compensation,” Opt. Lett. 23, 1016–1018 (1998).
[CrossRef]

Y. K. Yap, M. Inagaki, S. Nakajima, Y. Mori, T. Sasaki, “High-power fourth- and fifth-harmonic generation of a Nd:YAG laser by means of a CsLIB6O10,” Opt. Lett. 21, 1348–1350 (1996).
[CrossRef] [PubMed]

Y. Mori, I. Kuroda, S. Nakajima, T. Sasaki, S. Nakai, “New nonlinear optical crystal: cesium lithium borate,” Appl. Phys. Lett. 67, 1818–1820 (1995).
[CrossRef]

K. Deki, J. Sakuma, Y. Ohsako, N. Kitatochi, T. Yokota, M. Horiguchi, Y. Mori, T. Sasaki, “200 mW 192 nm Generation using CsLiB6O10 Crystal,” in Conference on Lasers and Electro-Optics, 1998 OSA Technical Digest (Optical Society of America, Washington, D.C., 1998), postdeadline paper CPD4.

N. Umemura, K. Yoshida, T. Kamimura, Y. Mori, T. Sasaki, K. Kato, “New data on the phase-matching properties of CsLiB6O10,” in Advanced Solid State Lasers, M. M. Fejer, H. Injeyan, U. Keller, eds., Vol. 26 of OSA Trends in Optics and Photonics (Optical Society of America, Washington, D.C., 1999), pp. 715–719.

J. Sakuma, A. Finch, Y. Ohsako, K. Deki, M. Yoshino, M. Horiguchi, T. Yokota, Y. Mori, T. Sasaki, “All-solid-state, 1-W, 5-kHz laser source below 200 nm,” in Advanced Solid State Lasers, M. M. Fejer, H. Injeyan, U. Keller, eds., Vol. 26 of OSA Trends in Optics and Photonics (Optical Society of America, Washington, D.C., 1999), pp. 89–92.

A. Finch, Y. Ohsako, J. Sakuma, K. Deki, M. Horiguchi, Y. Mori, T. Sasaki, K. Wall, J. Harrison, P. F. Moulton, J. Manni, “Development of a high-power, high-repetition rate, diode-pumped, deep UV laser system,” in Advanced Solid State Lasers, W. R. Bosenberg, M. M. Fejer, eds., Vol. 19 of OSA Trends in Optics and Photonics (Optical Society of America, Washington, D.C., 1998), pp. 16–19.

T. Kojima, S. Konno, S. Fujikawa, K. Yasui, K. Yoshizawa, Y. Mori, T. Sasaki, M. Tanaka, Y. Okada, “20-W, 10-kHz, UV beam generation by an all-solid-state laser,” in Advanced Solid-State Lasers, M. M. Fejer, H. Injeyan, U. Keller, eds., Vol. 26 of OSA Trends in Optics and Photonics (Optical Society of America, Washington, D.C., 1999), pp. 93–96.

Tanaka, M.

T. Kojima, S. Konno, S. Fujikawa, K. Yasui, K. Yoshizawa, Y. Mori, T. Sasaki, M. Tanaka, Y. Okada, “20-W, 10-kHz, UV beam generation by an all-solid-state laser,” in Advanced Solid-State Lasers, M. M. Fejer, H. Injeyan, U. Keller, eds., Vol. 26 of OSA Trends in Optics and Photonics (Optical Society of America, Washington, D.C., 1999), pp. 93–96.

Umemura, N.

N. Umemura, K. Kato, “Ultraviolet generation tunable to 0.185 µm on CsLiB6O10,” Appl. Opt. 36, 6794–6796 (1997).
[CrossRef]

N. Umemura, K. Yoshida, T. Kamimura, Y. Mori, T. Sasaki, K. Kato, “New data on the phase-matching properties of CsLiB6O10,” in Advanced Solid State Lasers, M. M. Fejer, H. Injeyan, U. Keller, eds., Vol. 26 of OSA Trends in Optics and Photonics (Optical Society of America, Washington, D.C., 1999), pp. 715–719.

Umezu, N.

H. Masuda, N. Umezu, K. Kimura, S. Kubota, “High-repetition-rate, 192-197 nm pulse generation in β-BaB2O4 by intracavity sum-frequency-mixing of a Ti:Sapphire laser with a frequency-quadrupled Nd:YAG laser,” in Advanced Solid State Lasers, M. M. Fejer, H. Injeyan, U. Keller, eds., Vol. 26 of OSA Trends in Optics and Photonics (Optical Society of America, Washington, D.C., 1999), pp. 63–69.

Wall, K.

A. Finch, Y. Ohsako, J. Sakuma, K. Deki, M. Horiguchi, Y. Mori, T. Sasaki, K. Wall, J. Harrison, P. F. Moulton, J. Manni, “Development of a high-power, high-repetition rate, diode-pumped, deep UV laser system,” in Advanced Solid State Lasers, W. R. Bosenberg, M. M. Fejer, eds., Vol. 19 of OSA Trends in Optics and Photonics (Optical Society of America, Washington, D.C., 1998), pp. 16–19.

Yap, Y. K.

Yasui, K.

T. Kojima, S. Konno, S. Fujikawa, K. Yasui, K. Yoshizawa, Y. Mori, T. Sasaki, M. Tanaka, Y. Okada, “20-W, 10-kHz, UV beam generation by an all-solid-state laser,” in Advanced Solid-State Lasers, M. M. Fejer, H. Injeyan, U. Keller, eds., Vol. 26 of OSA Trends in Optics and Photonics (Optical Society of America, Washington, D.C., 1999), pp. 93–96.

Yokota, T.

A. Finch, J. Sakuma, Y. Ohsako, K. Deki, M. Horiguchi, T. Yokota, “All-solid-state, tunable, high power UV generation by sum-frequency-mixing in CLBO,” in Advanced Solid State Lasers, M. M. Fejer, H. Injeyan, U. Keller, eds., Vol. 26 of OSA Trends in Optics and Photonics (Optical Society of America, Washington, D.C., 1999), pp. 70–73.

J. Sakuma, A. Finch, Y. Ohsako, K. Deki, M. Yoshino, M. Horiguchi, T. Yokota, Y. Mori, T. Sasaki, “All-solid-state, 1-W, 5-kHz laser source below 200 nm,” in Advanced Solid State Lasers, M. M. Fejer, H. Injeyan, U. Keller, eds., Vol. 26 of OSA Trends in Optics and Photonics (Optical Society of America, Washington, D.C., 1999), pp. 89–92.

K. Deki, J. Sakuma, Y. Ohsako, N. Kitatochi, T. Yokota, M. Horiguchi, Y. Mori, T. Sasaki, “200 mW 192 nm Generation using CsLiB6O10 Crystal,” in Conference on Lasers and Electro-Optics, 1998 OSA Technical Digest (Optical Society of America, Washington, D.C., 1998), postdeadline paper CPD4.

Yoon, C. S.

G. Ryu, C. S. Yoon, T. P. J. Han, H. G. Gallagher, “Growth and characterization of CsLiB6O10 (CLBO) crystal,” J. Cryst. Growth 191, 492–500 (1998).
[CrossRef]

Yoshida, K.

N. Umemura, K. Yoshida, T. Kamimura, Y. Mori, T. Sasaki, K. Kato, “New data on the phase-matching properties of CsLiB6O10,” in Advanced Solid State Lasers, M. M. Fejer, H. Injeyan, U. Keller, eds., Vol. 26 of OSA Trends in Optics and Photonics (Optical Society of America, Washington, D.C., 1999), pp. 715–719.

Yoshino, M.

J. Sakuma, A. Finch, Y. Ohsako, K. Deki, M. Yoshino, M. Horiguchi, T. Yokota, Y. Mori, T. Sasaki, “All-solid-state, 1-W, 5-kHz laser source below 200 nm,” in Advanced Solid State Lasers, M. M. Fejer, H. Injeyan, U. Keller, eds., Vol. 26 of OSA Trends in Optics and Photonics (Optical Society of America, Washington, D.C., 1999), pp. 89–92.

Yoshizawa, K.

T. Kojima, S. Konno, S. Fujikawa, K. Yasui, K. Yoshizawa, Y. Mori, T. Sasaki, M. Tanaka, Y. Okada, “20-W, 10-kHz, UV beam generation by an all-solid-state laser,” in Advanced Solid-State Lasers, M. M. Fejer, H. Injeyan, U. Keller, eds., Vol. 26 of OSA Trends in Optics and Photonics (Optical Society of America, Washington, D.C., 1999), pp. 93–96.

Appl. Opt.

Appl. Phys. Lett.

Y. Mori, I. Kuroda, S. Nakajima, T. Sasaki, S. Nakai, “New nonlinear optical crystal: cesium lithium borate,” Appl. Phys. Lett. 67, 1818–1820 (1995).
[CrossRef]

IEEE J. Quantum Electron.

K. Kato, “Second-harmonic generation to 2048 A in β-BaB2O4,” IEEE J. Quantum Electron. QE-22, 1013–1014 (1986).
[CrossRef]

J. Cryst. Growth

G. Ryu, C. S. Yoon, T. P. J. Han, H. G. Gallagher, “Growth and characterization of CsLiB6O10 (CLBO) crystal,” J. Cryst. Growth 191, 492–500 (1998).
[CrossRef]

Opt. Lett.

Other

N. Umemura, K. Yoshida, T. Kamimura, Y. Mori, T. Sasaki, K. Kato, “New data on the phase-matching properties of CsLiB6O10,” in Advanced Solid State Lasers, M. M. Fejer, H. Injeyan, U. Keller, eds., Vol. 26 of OSA Trends in Optics and Photonics (Optical Society of America, Washington, D.C., 1999), pp. 715–719.

V. G. Dmitriev, G. G. Gurzadyan, D. N. Nikogosyan, eds., Handbook of Nonlinear Optical Crystals, 2nd ed., Vol. 64 of Springer Series in Optical Sciences (Springer-Verlag, Berlin, 1997), pp. 32–66.

A. Finch, Y. Ohsako, J. Sakuma, K. Deki, M. Horiguchi, Y. Mori, T. Sasaki, K. Wall, J. Harrison, P. F. Moulton, J. Manni, “Development of a high-power, high-repetition rate, diode-pumped, deep UV laser system,” in Advanced Solid State Lasers, W. R. Bosenberg, M. M. Fejer, eds., Vol. 19 of OSA Trends in Optics and Photonics (Optical Society of America, Washington, D.C., 1998), pp. 16–19.

T. Kojima, S. Konno, S. Fujikawa, K. Yasui, K. Yoshizawa, Y. Mori, T. Sasaki, M. Tanaka, Y. Okada, “20-W, 10-kHz, UV beam generation by an all-solid-state laser,” in Advanced Solid-State Lasers, M. M. Fejer, H. Injeyan, U. Keller, eds., Vol. 26 of OSA Trends in Optics and Photonics (Optical Society of America, Washington, D.C., 1999), pp. 93–96.

H. Masuda, N. Umezu, K. Kimura, S. Kubota, “High-repetition-rate, 192-197 nm pulse generation in β-BaB2O4 by intracavity sum-frequency-mixing of a Ti:Sapphire laser with a frequency-quadrupled Nd:YAG laser,” in Advanced Solid State Lasers, M. M. Fejer, H. Injeyan, U. Keller, eds., Vol. 26 of OSA Trends in Optics and Photonics (Optical Society of America, Washington, D.C., 1999), pp. 63–69.

R. D. Mead, C. E. Hamilton, D. D. Lowenthal, “Solid state lasers for 193-nm lithography,” in Optical Microlithography X, G. E. Fuller, ed., Proc. SPIE3051, 882–889 (1997).
[CrossRef]

K. Deki, J. Sakuma, Y. Ohsako, N. Kitatochi, T. Yokota, M. Horiguchi, Y. Mori, T. Sasaki, “200 mW 192 nm Generation using CsLiB6O10 Crystal,” in Conference on Lasers and Electro-Optics, 1998 OSA Technical Digest (Optical Society of America, Washington, D.C., 1998), postdeadline paper CPD4.

A. Finch, J. Sakuma, Y. Ohsako, K. Deki, M. Horiguchi, T. Yokota, “All-solid-state, tunable, high power UV generation by sum-frequency-mixing in CLBO,” in Advanced Solid State Lasers, M. M. Fejer, H. Injeyan, U. Keller, eds., Vol. 26 of OSA Trends in Optics and Photonics (Optical Society of America, Washington, D.C., 1999), pp. 70–73.

J. Sakuma, A. Finch, Y. Ohsako, K. Deki, M. Yoshino, M. Horiguchi, T. Yokota, Y. Mori, T. Sasaki, “All-solid-state, 1-W, 5-kHz laser source below 200 nm,” in Advanced Solid State Lasers, M. M. Fejer, H. Injeyan, U. Keller, eds., Vol. 26 of OSA Trends in Optics and Photonics (Optical Society of America, Washington, D.C., 1999), pp. 89–92.

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Figures (7)

Fig. 1
Fig. 1

Dependence of the phase-matching angle on different incident wavelengths to be mixed with the 1047-nm radiation. The three curves were calculated based on the Sellmeier equations reported by three different groups. The filled circles represent experimental data.

Fig. 2
Fig. 2

Optical arrangement for generation of deep-UV radiation: M, dichroic mirror; L, lens, λ/2, half-wave plate.

Fig. 3
Fig. 3

Average power of SFM radiation at 241.6 nm as a function of input power of the Ti:sapphire laser tuned at 785 nm, with that of the UV radiation at 349 nm fixed at 9.0 W. The solid curve represents the theoretical result.

Fig. 4
Fig. 4

Temperature dependence of the minimum SFM phase-matching wavelength with 1047-nm radiation of a 90°-cut CLBO crystal. The solid line represents the calculated result.

Fig. 5
Fig. 5

Average power of the deep-UV output at 196.3 nm versus input power of 241.6-nm light with that of the 1047-nm radiation maintained at 7.8 W. The solid and dotted curves represent the results of calculations when α = 0, 0.1, and 0.2 cm-1 at 196.3 nm.

Fig. 6
Fig. 6

Measured temporal profile of (a) the 785-nm Ti:sapphire laser output (FWHM = 14.5 ns), (b) the 349-nm third-harmonic of the Nd:YLF laser output (15.7 ns), (c) the 241.6-nm first SFM radiation (13.0 ns), (d) the 196.3-nm second SFM radiation (11.3 ns). The horizontal scale is 10 ns/div.

Fig. 7
Fig. 7

Spectral distribution of the deep-UV radiation at 193.4 nm measured with a spectrum analyzer equipped with a 7.5-GHz free-spectral-range etalon with a finesse of 40.

Tables (1)

Tables Icon

Table 1 Calculated Properties of CLBO and BBO Crystals for 241.6- and 196.3-nm Generation

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