Abstract

We describe a low-coherence interferometric technique for simultaneous measurement of geometric thickness and group refractive index of highly dispersive samples. The technique is immune to the dispersion-induced asymmetry of the interferograms, thus overcoming limitations associated with some other low-coherence approaches to this simultaneous measurement. We use the experimental configuration of a tandem interferometer, with the samples to be characterized placed in an air gap in one arm of the measurement interferometer. Unambiguous, dispersion-insensitive measurements of critical group-delay imbalances in the measurement interferometer are determined from the optical frequency dependence of interferogram phases, by means of dispersive Fourier transform spectrometry. Sample thickness and group refractive index are calculated from these group delays. A thickness measurement precision of 0.2 µm and group index measurement accuracy of 5 parts in 105 across a wavelength range of 150 nm have been achieved for BK7 and fused-silica glass samples in the thickness range 2000 to 6000 µm.

© 2000 Optical Society of America

Full Article  |  PDF Article

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (6)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Tables (1)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (10)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription