Abstract

An x-ray interferometer (XRI), which takes the lattice spacing of silicon as a length unit, can measure displacement with subnanometer resolution. A scanning probe microscope that combines an XRI and a scanning-tunnel microscope is designed to measure pitch. Experimental results have proved the feasibility of the design.

© 2000 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Calibration of subnanometer motion with picometer accuracy

Hernán E. Grecco and Oscar E. Martínez
Appl. Opt. 41(31) 6646-6650 (2002)

Angstrom-range optical path-length measurement with a high-speed scanning heterodyne optical interferometer

Nabeel A. Riza and Muzammil A. Arain
Appl. Opt. 42(13) 2341-2345 (2003)

Step-height measurement by means of a dual-frequency interferometric confocal microscope

Dejiao Lin, Zhongyao Liu, Rui Zhang, Juqun Yan, Chunyong Yin, and Yi Xu
Appl. Opt. 43(7) 1472-1479 (2004)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (5)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Tables (2)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (1)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription