Abstract

A method of optical coherence profilometry, believed to be new, is demonstrated. This method is based on the spatial, rather than the temporal, coherence phenomenon. Therefore the proposed interferometric system is illuminated by a quasi-monochromatic spatial incoherent source instead of a broadband light source. The surface profile is measured by means of shifting the spatial degree of coherence gradually along its longitudinal axis while keeping the optical path difference between the measured surface and a reference plane constant. Experimental proof of the new principle is presented.

© 2000 Optical Society of America

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References

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1999 (2)

1996 (1)

1995 (1)

J. Rosen, A. Yariv, “Longitudinal partial coherence of optical radiation,” Opt. Commun. 117, 8–12 (1995).
[CrossRef]

1994 (3)

1992 (1)

1991 (1)

D. Huang, E. A. Swanson, C. P. Lin, J. S. Schuman, W. G. Stinson, W. Chang, M. R. Hee, T. Flotte, K. Gregory, C. A. Puliafito, J. G. Fujimoto, “Optical coherence tomography,” Science 254, 1178–1181 (1991).
[CrossRef] [PubMed]

1990 (1)

1972 (1)

1966 (1)

Biegen, J. E.

Chang, W.

D. Huang, E. A. Swanson, C. P. Lin, J. S. Schuman, W. G. Stinson, W. Chang, M. R. Hee, T. Flotte, K. Gregory, C. A. Puliafito, J. G. Fujimoto, “Optical coherence tomography,” Science 254, 1178–1181 (1991).
[CrossRef] [PubMed]

Cohen, F.

M. Davidson, K. Kaufman, I. Mazor, F. Cohen, “An application of interference microscopy to integrated circuit inspection and metrology,” in Integrated Circuit Metrology, Inspection, and Process Control, K. M. Monahan, ed., Proc. SPIE775, 233–247 (1987).
[CrossRef]

Davidson, M.

M. Davidson, K. Kaufman, I. Mazor, F. Cohen, “An application of interference microscopy to integrated circuit inspection and metrology,” in Integrated Circuit Metrology, Inspection, and Process Control, K. M. Monahan, ed., Proc. SPIE775, 233–247 (1987).
[CrossRef]

de Boer, J. F.

Dresel, T.

Flotte, T.

D. Huang, E. A. Swanson, C. P. Lin, J. S. Schuman, W. G. Stinson, W. Chang, M. R. Hee, T. Flotte, K. Gregory, C. A. Puliafito, J. G. Fujimoto, “Optical coherence tomography,” Science 254, 1178–1181 (1991).
[CrossRef] [PubMed]

Flournoy, P. A.

Fujimoto, J. G.

D. Huang, E. A. Swanson, C. P. Lin, J. S. Schuman, W. G. Stinson, W. Chang, M. R. Hee, T. Flotte, K. Gregory, C. A. Puliafito, J. G. Fujimoto, “Optical coherence tomography,” Science 254, 1178–1181 (1991).
[CrossRef] [PubMed]

Goodman, J. W.

J. W. Goodman, Statistical Optics, 1st ed. (Wiley, New York, 1985), Chap. 3, p. 73 (1985); L. Mandel, E. Wolf, Optical Coherence and Quantum Optics, 1st ed. (Cambridge University, Cambridge, UK, 1995), Chap. 2, p. 59.

Gregory, K.

D. Huang, E. A. Swanson, C. P. Lin, J. S. Schuman, W. G. Stinson, W. Chang, M. R. Hee, T. Flotte, K. Gregory, C. A. Puliafito, J. G. Fujimoto, “Optical coherence tomography,” Science 254, 1178–1181 (1991).
[CrossRef] [PubMed]

Hausler, G.

Hee, M. R.

D. Huang, E. A. Swanson, C. P. Lin, J. S. Schuman, W. G. Stinson, W. Chang, M. R. Hee, T. Flotte, K. Gregory, C. A. Puliafito, J. G. Fujimoto, “Optical coherence tomography,” Science 254, 1178–1181 (1991).
[CrossRef] [PubMed]

Hotate, K.

K. Hotate, T. Okugawa, “Optical information-processing by synthesis of the coherence function,” J. Lightwave Technol. 12, 1247–1255 (1994).
[CrossRef]

Huang, D.

D. Huang, E. A. Swanson, C. P. Lin, J. S. Schuman, W. G. Stinson, W. Chang, M. R. Hee, T. Flotte, K. Gregory, C. A. Puliafito, J. G. Fujimoto, “Optical coherence tomography,” Science 254, 1178–1181 (1991).
[CrossRef] [PubMed]

Kannari, F.

Kaufman, K.

M. Davidson, K. Kaufman, I. Mazor, F. Cohen, “An application of interference microscopy to integrated circuit inspection and metrology,” in Integrated Circuit Metrology, Inspection, and Process Control, K. M. Monahan, ed., Proc. SPIE775, 233–247 (1987).
[CrossRef]

Lee, B. S.

Lin, C. P.

D. Huang, E. A. Swanson, C. P. Lin, J. S. Schuman, W. G. Stinson, W. Chang, M. R. Hee, T. Flotte, K. Gregory, C. A. Puliafito, J. G. Fujimoto, “Optical coherence tomography,” Science 254, 1178–1181 (1991).
[CrossRef] [PubMed]

Mandel, L.

L. Mandel, E. Wolf, Optical Coherence and Quantum Optics, 1st ed. (Cambridge University, Cambridge, UK, 1995), Chap. 4, p. 149.

Mazor, I.

M. Davidson, K. Kaufman, I. Mazor, F. Cohen, “An application of interference microscopy to integrated circuit inspection and metrology,” in Integrated Circuit Metrology, Inspection, and Process Control, K. M. Monahan, ed., Proc. SPIE775, 233–247 (1987).
[CrossRef]

McClure, R. W.

McCutchen, C. W.

Milner, T. E.

Nelson, J. S.

Okugawa, T.

K. Hotate, T. Okugawa, “Optical information-processing by synthesis of the coherence function,” J. Lightwave Technol. 12, 1247–1255 (1994).
[CrossRef]

Pashley, D. H.

Puliafito, C. A.

D. Huang, E. A. Swanson, C. P. Lin, J. S. Schuman, W. G. Stinson, W. Chang, M. R. Hee, T. Flotte, K. Gregory, C. A. Puliafito, J. G. Fujimoto, “Optical coherence tomography,” Science 254, 1178–1181 (1991).
[CrossRef] [PubMed]

Rosen, J.

Schuman, J. S.

D. Huang, E. A. Swanson, C. P. Lin, J. S. Schuman, W. G. Stinson, W. Chang, M. R. Hee, T. Flotte, K. Gregory, C. A. Puliafito, J. G. Fujimoto, “Optical coherence tomography,” Science 254, 1178–1181 (1991).
[CrossRef] [PubMed]

Stinson, W. G.

D. Huang, E. A. Swanson, C. P. Lin, J. S. Schuman, W. G. Stinson, W. Chang, M. R. Hee, T. Flotte, K. Gregory, C. A. Puliafito, J. G. Fujimoto, “Optical coherence tomography,” Science 254, 1178–1181 (1991).
[CrossRef] [PubMed]

Strand, T. C.

Suzuki, K.

Suzuki, M.

Swanson, E. A.

D. Huang, E. A. Swanson, C. P. Lin, J. S. Schuman, W. G. Stinson, W. Chang, M. R. Hee, T. Flotte, K. Gregory, C. A. Puliafito, J. G. Fujimoto, “Optical coherence tomography,” Science 254, 1178–1181 (1991).
[CrossRef] [PubMed]

Teramura, Y.

Venzke, H.

Wang, X. J.

Wolf, E.

L. Mandel, E. Wolf, Optical Coherence and Quantum Optics, 1st ed. (Cambridge University, Cambridge, UK, 1995), Chap. 4, p. 149.

Wyntjes, G.

Yariv, A.

Zhang, Y.

Appl. Opt. (5)

J. Lightwave Technol. (1)

K. Hotate, T. Okugawa, “Optical information-processing by synthesis of the coherence function,” J. Lightwave Technol. 12, 1247–1255 (1994).
[CrossRef]

J. Opt. Soc. Am. (1)

J. Opt. Soc. Am. A (1)

Opt. Commun. (1)

J. Rosen, A. Yariv, “Longitudinal partial coherence of optical radiation,” Opt. Commun. 117, 8–12 (1995).
[CrossRef]

Opt. Lett. (2)

Science (1)

D. Huang, E. A. Swanson, C. P. Lin, J. S. Schuman, W. G. Stinson, W. Chang, M. R. Hee, T. Flotte, K. Gregory, C. A. Puliafito, J. G. Fujimoto, “Optical coherence tomography,” Science 254, 1178–1181 (1991).
[CrossRef] [PubMed]

Other (3)

M. Davidson, K. Kaufman, I. Mazor, F. Cohen, “An application of interference microscopy to integrated circuit inspection and metrology,” in Integrated Circuit Metrology, Inspection, and Process Control, K. M. Monahan, ed., Proc. SPIE775, 233–247 (1987).
[CrossRef]

L. Mandel, E. Wolf, Optical Coherence and Quantum Optics, 1st ed. (Cambridge University, Cambridge, UK, 1995), Chap. 4, p. 149.

J. W. Goodman, Statistical Optics, 1st ed. (Wiley, New York, 1985), Chap. 3, p. 73 (1985); L. Mandel, E. Wolf, Optical Coherence and Quantum Optics, 1st ed. (Cambridge University, Cambridge, UK, 1995), Chap. 2, p. 59.

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Figures (2)

Fig. 1
Fig. 1

Schematic of the interferometric system used for the optical spatial coherence profilometry.

Fig. 2
Fig. 2

(a) Set of Fresnel zone plates used to mask the light source. (b) Output images recorded by the CCD for every zone plate shown in (a). (c) Illustration of the magnitude of the complex degree of coherence for every zone plate in relation to the step of the two mirrors.

Equations (7)

Equations on this page are rendered with MathJax. Learn more.

ux, y, z=Isxs, ys1/2jλfexpj 2πz+2fλ-j 2πλf×xsx+ysy-j πzλf2xs2+ys2,
IDx, y, z=L|x,ySr|= Isxs, ys1/2jλfexpj 2πL+2fλ-j 2πλfxsx+ysy-j πLλf2xs2+ys2+Isxs, ys1/2jλfexpj 2πL+2Δz+2fλ-j 2πλfxs+αxx+ys+αyy-j πL+2Δzλf2xs2+ys22dxsdys,
IDx, y, L|x,ySr|=A1+|μ2Δz|cos2πλfαxx+αyy-4πΔzλ+ϕ2Δz,
μΔz= Isxs, ysexpj πΔzλf2xs2+ys2dxsdys Isxs, ysdxsdys.
μΔx, Δy, Δz= Isxs, ysexp-j 2πλfxsΔx+ysΔy+j πΔzλf2xs2+ys2dxsdys Isxs, ysdxsdys.
Isrs  1+cosπγnrs2+βm,  0rsR,
μΔz  sincΔzR22λf2 * 2δΔz+expjβmδΔz+γnλf2+exp-jβmδΔz-γnλf2,

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