Abstract

An improved x-ray microscope with a fully electronic CCD detector system has been constructed that allows improved laboratory-based microstructural investigations of materials with hard x rays. It uses the Kirkpatrick–Baez multilayer mirror design to form an image that has a demonstrated resolution of 4 µm at 8 keV (Cu Kα radiation). This microscope performs well with standard sealed-tube laboratory x-ray sources, producing digital images with 20-s exposure times for a 5-µm Au grid (a thickness of two absorption lengths).

© 2000 Optical Society of America

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