We present a three-dimensional (3D) analysis of subwavelength
diffractive optical elements (DOE’s), using the finite-difference
time-domain (FDTD) method. To this end we develop and apply
efficient 3D FDTD methods that exploit DOE properties, such as
symmetry. An axisymmetric method is validated experimentally and is
used to validate the more general 3D method. Analyses of
subwavelength gratings and lenses, both with and without rotational
symmetry, are presented in addition to a 2 × 2 subwavelength
focusing array generator.
© 2000 Optical Society of America
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