Abstract

The strip coating material, Opticlean, which has been reformulated, has been shown to remove 1–5-µm-diameter particles as well as contamination remaining from previous drag wipe cleaning on a used silicon wafer. In addition, no residue that produced scattering was found on a fresh silicon wafer when Opticlean was applied and then stripped off. The total integrated scattering technique used for the measurements could measure scattering levels of He–Ne laser light as low as a few ppm (parts in 106), corresponding to a surface roughness of <1 Å rms.

© 2000 Optical Society of America

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References

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  1. J. M. Bennett, L. Mattsson, M. P. Keane, L. Karlsson, “Test of strip coating materials for protecting optics,” Appl. Opt. 28, 1018–1026 (1989).
    [CrossRef] [PubMed]
  2. J. M. Bennett, L. Mattsson, Introduction to Surface Roughness and Scattering, 2nd ed. (Optical Society of America, Washington, D.C., 1999), pp. 29–33, 62–66.
  3. Dantronix Research and Technologies, 180 Bayley Avenue, Platteville, Wisc. 53818-3505; web site: http://www.opticlean.com .
  4. L. Mattsson, “Total integrated scatter measurement system for quality assessment of coatings on optical surfaces,” in Thin Film Technologies, J. R. Jacobsson, ed., Proc. SPIE652, 264–271 (1986).
    [CrossRef]
  5. American Society for Testing and Materials, “Standard Test Method for Measuring the Effective Surface Roughness of Optical Components by Total Integrated Scattering,” , (American Society for Testing and Materials, West Conshohocken, Pa., 1987); web site: http://www.astm.org .
  6. Ref. 2, p. 92.
  7. Ref. 2, pp. 7–9.
  8. Ref. 2, pp. 90–95.

1989

Bennett, J. M.

J. M. Bennett, L. Mattsson, M. P. Keane, L. Karlsson, “Test of strip coating materials for protecting optics,” Appl. Opt. 28, 1018–1026 (1989).
[CrossRef] [PubMed]

J. M. Bennett, L. Mattsson, Introduction to Surface Roughness and Scattering, 2nd ed. (Optical Society of America, Washington, D.C., 1999), pp. 29–33, 62–66.

Karlsson, L.

Keane, M. P.

Mattsson, L.

J. M. Bennett, L. Mattsson, M. P. Keane, L. Karlsson, “Test of strip coating materials for protecting optics,” Appl. Opt. 28, 1018–1026 (1989).
[CrossRef] [PubMed]

J. M. Bennett, L. Mattsson, Introduction to Surface Roughness and Scattering, 2nd ed. (Optical Society of America, Washington, D.C., 1999), pp. 29–33, 62–66.

L. Mattsson, “Total integrated scatter measurement system for quality assessment of coatings on optical surfaces,” in Thin Film Technologies, J. R. Jacobsson, ed., Proc. SPIE652, 264–271 (1986).
[CrossRef]

Appl. Opt.

Other

J. M. Bennett, L. Mattsson, Introduction to Surface Roughness and Scattering, 2nd ed. (Optical Society of America, Washington, D.C., 1999), pp. 29–33, 62–66.

Dantronix Research and Technologies, 180 Bayley Avenue, Platteville, Wisc. 53818-3505; web site: http://www.opticlean.com .

L. Mattsson, “Total integrated scatter measurement system for quality assessment of coatings on optical surfaces,” in Thin Film Technologies, J. R. Jacobsson, ed., Proc. SPIE652, 264–271 (1986).
[CrossRef]

American Society for Testing and Materials, “Standard Test Method for Measuring the Effective Surface Roughness of Optical Components by Total Integrated Scattering,” , (American Society for Testing and Materials, West Conshohocken, Pa., 1987); web site: http://www.astm.org .

Ref. 2, p. 92.

Ref. 2, pp. 7–9.

Ref. 2, pp. 90–95.

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Figures (1)

Fig. 1
Fig. 1

TIS from a silicon wafer before (open squares) and after (crosses) coating with particles, applying Opticlean, and stripping. Only seven of the original ten points are shown (see text).

Tables (2)

Tables Icon

Table 1 TIS Before and After Coating and Stripping Opticlean from Half of a Low-Scatter Silicon Watera

Tables Icon

Table 2 TIS Before and After Coating Half of a Used Silicon Wafer with Particles and Then Stripping with Opticleana

Metrics