We present a unified two-step analytical inversion of
reflectometric and ellipsometric data of absorbing media. Instead
of a direct determination of the optical constants n, κ
from reflectometric or ellipsometric measurements, we first calculate
the real and the imaginary part η, γ of the normal component of the
wave vector in the absorbing medium. New and simple analytical
formulas are obtained for η and γ in terms of
ρs, ρp or tan ψ, δ,
respectively, where ρs, ρp and
tan ψ, δ are the measured reflectometric and ellipsometric
parameters of the absorbing medium. The optical constants are then
easily determined analytically again from η, γ. We use the new
formulas to compare the sensitivity with experimental errors due to the
inversion of reflectometric and ellipsometric data.
© 2000 Optical Society of America
Equations on this page are rendered with MathJax. Learn more.