Abstract
A two-wavelength interferometer that uses two separate modulating
currents with different phases but the same frequencies to detect a
greater degree of object displacement in real time is proposed and
demonstrated. The measurement error was 57 nm, roughly 1/80 of
the synthetic wavelength. We have confirmed that this modulating
technique enables us to equip our prototype interferometer with a
simple feedback-control system that eliminates external
disturbance.
© 2000 Optical Society of America
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