Simple estimates for the effects of mid-spatial-frequency surface errors on image quality

Abstract

Mid-spatial-frequency surface errors can be introduced by various manufacturing processes. These errors bridge the gap between traditional figure and finish errors. Although the effects of mid-spatial-frequency errors on the imagery of an optical system can be modeled with a ray-based approach, simply tracing rays provides little insight. We present an alternative method that treats surface errors as perturbations to the nominal surface profile. This approach, combined with standard statistical methods, allows one to make simple back-of-the-envelope predictions of the effects of mid-spatial-frequency errors for various measures of optical performance. Two examples illustrating the effectiveness of this approach are presented.

© 2000 Optical Society of America

Effects of structured mid-spatial frequency surface errors on image performance

John M. Tamkin and Tom D. Milster
Appl. Opt. 49(33) 6522-6536 (2010)

Theory of modulation transfer function artifacts due to mid-spatial-frequency errors and its application to optical tolerancing

John M. Tamkin, Tom D. Milster, and William Dallas
Appl. Opt. 49(25) 4825-4835 (2010)

Theory of point-spread function artifacts due to structured mid-spatial frequency surface errors

John M. Tamkin, William J. Dallas, and Tom D. Milster
Appl. Opt. 49(25) 4814-4824 (2010)

Experimental power spectral density analysis for mid- to high-spatial frequency surface error control

Javier Del Hoyo, Heejoo Choi, James H. Burge, Geon-Hee Kim, and Dae Wook Kim
Appl. Opt. 56(18) 5258-5267 (2017)

Modeling the image quality of enhanced reflectance x-ray multilayers as a surface power spectral density filter function

James E. Harvey
Appl. Opt. 34(19) 3715-3726 (1995)