Abstract

Experimental results from the emission of vapor sources are considered in designing correcting diaphragms to achieve a uniform thickness distribution during evaporation of thin films mounted on large-area substrate holders, in different geometric configurations.

© 2000 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Optimization of thickness uniformity of optical coatings on a conical substrate in a planetary rotation system

Chun Guo, Mingdong Kong, Cunding Liu, and Bincheng Li
Appl. Opt. 52(4) B26-B32 (2013)

Emission pattern of real vapor sources in high vacuum: an overview

Francisco Villa and Octavio Pompa
Appl. Opt. 38(4) 695-703 (1999)

Theoretical design of shadowing masks for uniform coatings on spherical substrates in planetary rotation systems

Cunding Liu, Mingdong Kong, Chun Guo, Weidong Gao, and Bincheng Li
Opt. Express 20(21) 23790-23797 (2012)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (24)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (25)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription