Abstract

Hot-pressed B4C is found to have a high normal reflectance in the extreme-UV spectral region above 49 nm. This reflectance is comparable with or higher than chemical-vapor-deposited SiC in the spectral region from 49 to 92 nm. Reflectance measurements as a function of the angle of incidence yielded the optical constants of B4C in the spectral range 49–121.6 nm.

© 2000 Optical Society of America

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References

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1998 (1)

1994 (1)

1993 (2)

1988 (2)

1976 (1)

1974 (1)

1967 (1)

Blumenstock, G. M.

Choyke, W. J.

Corson, M.

Dymon, K. F.

Farich, R. F.

Fleetwood, C. M.

Ginter, M. L.

G. M. Blumenstock, R. A. M. Keski-Kuha, M. L. Ginter, “Extreme ultraviolet optical properties of ion-beam-deposited boron carbide thin films,” in X-Ray and Extreme Ultraviolet Optics, R. B. Hoover, A. B. Walker, eds., Proc. SPIE2515, 558–564 (1995).
[CrossRef]

Gum, J. S.

Hass, G.

Herzig, H.

Hoffman, R. A.

Holland, G. E.

Hunter, W. R.

Jacobus, G. F.

Keski-Kuha, R. A. M.

Kortright, J. B.

McCoy, R. P.

Osantowski, J. F.

Schmitt, D. R.

Seely, J. F.

Toft, A. R.

Windt, D. L.

Appl. Opt. (7)

J. Opt. Soc. Am. (2)

Other (1)

G. M. Blumenstock, R. A. M. Keski-Kuha, M. L. Ginter, “Extreme ultraviolet optical properties of ion-beam-deposited boron carbide thin films,” in X-Ray and Extreme Ultraviolet Optics, R. B. Hoover, A. B. Walker, eds., Proc. SPIE2515, 558–564 (1995).
[CrossRef]

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Figures (2)

Fig. 1
Fig. 1

Near-normal reflectance of hot-pressed B4C compared with CVD SiC, IBD B4C films, and Ir films. The curves connecting symbols are guides for the eye.

Fig. 2
Fig. 2

Optical constants of hot-pressed B4C compared with those of IBD B4C. The curves connecting symbols are guides for the eye.

Tables (1)

Tables Icon

Table 1 Optical Constants of Hot-Pressed B4C

Equations (4)

Equations on this page are rendered with MathJax. Learn more.

p=Ip-IsIp+Is,
R=1+p2 Rp+1-p2 Rs,
Rs,p*=Rs,p exp-4πσ cosθλ2,
sj2=i=1,,mRθiexp-Rθi,nj,kj,p2,

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