Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Contrast in the evanescent near field of λ/20 period gratings for photolithography

Not Accessible

Your library or personal account may give you access

Abstract

Light propagation through gratings with periods as small as λ/20 is investigated computationally by use of the multiple multipole method in two dimensions. High image contrast is evident close to the grating. Strong evanescent decay of the high spatial frequency components is observed with the region of high contrast shrinking linearly as the period of the grating is decreased. Simulations were performed for TE and TM polarizations with the TM polarization providing the dominant contrast compared with TE, which is strongly attenuated owing to the polarizing effect of the gratings. These results show good promise for optical contact lithography in the evanescent near field of a shadow mask to attain feature sizes smaller than λ/20.

© 2000 Optical Society of America

Full Article  |  PDF Article
More Like This
Evanescent interferometric lithography

Richard J. Blaikie and Sharee J. McNab
Appl. Opt. 40(10) 1692-1698 (2001)

Imaging profiles of light intensity in the near field: applications to phase-shift photolithography

Joanna Aizenberg, John A. Rogers, Kateri E. Paul, and George M. Whitesides
Appl. Opt. 37(11) 2145-2152 (1998)

Fabrication and simulation of diffractive optical elements with superimposed antireflection subwavelength gratings

Fredrik Nikolajeff, Björn Löfving, Mathias Johansson, Jörgen Bengtsson, Sverker Hård, and Claus Heine
Appl. Opt. 39(26) 4842-4846 (2000)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (7)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (1)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved