Abstract

A monolithically integrated optical displacement sensor based on triangulation and optical beam deflection is reported. This sensor is simple and consists of only a laser diode, a polyimide waveguide, and a split detector (a pair of photodiodes) upon a GaAs substrate. The resultant prototype device is extremely small (750 µm × 800 µm). Experiments have shown that this sensor can measure the displacement of a mirror with resolution of better than 4 nm. Additionally, we have experimentally demonstrated both axial and lateral displacement measurements when we used a cylindrical micromirror (diameter, 125 µm) as a movable external object.

© 1999 Optical Society of America

Full Article  |  PDF Article
OSA Recommended Articles
Interference method for ultra-precision measurement and compensation of laser beam angular deflection

Marek Dobosz and Olga Iwasinska-Kowalska
Appl. Opt. 53(1) 111-122 (2014)

Development of a diffraction-type optical triangulation sensor

Chien-Hung Liu, Wen-Yuh Jywe, and Chao-Kwai Chen
Appl. Opt. 43(30) 5607-5613 (2004)

Profile measuring method based on reflection characteristics at a critical angle in a right-angle prism

Tetsuya Matsumoto, Yoichi Kitagawa, Masaaki Adachi, and Takumi Minemoto
Appl. Opt. 30(22) 3205-3209 (1991)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Figures (8)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Tables (2)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Equations (1)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription

Metrics

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access OSA Member Subscription