Thin-film interference effects were observed in the normal-incidence efficiency of a 2400-groove/mm replica grating. The efficiency was measured in the 100–350-Å wavelength range and had an oscillatory behavior that resulted from the presence of a thin SiO2 coating. The thicknesses of the SiO2 and the underlying oxidized aluminum layers were inferred from computer modeling of the zero-order efficiency. The efficiencies in the diffracted orders were calculated with the modified integral approach and accounting for the multilayer coating and the groove profile derived from atomic force microscopy. The calculated and measured efficiencies were in good agreement.
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